01/11 01/27 02/13 02/14 02/22 02/24 07/18 08/16 08/17 08/30 09/04 09/21 10/02 10/02c 10/10 10/23 11/06 11/22 11/23 12/02 12/05 12/06 12/12 12/21 12/22 12/25
4 photos, 150nm square with 500nm pitch array, coordinate of chip center is 12.5,12.5
1
DOSE 95
coordinate (11.586, 13.672)

640x480 | original size
2
DOSE 110
Center of the area
(2nd Quadrant )
640x480 | original size
3
DOSE 95
coordinate (7.52, 7.05)
(the lowest dose area)
640x480 | original size
4
DOSE 105
coordinate (8.214, 14.52)

640x480 | original size