1- 9 -
DOSE 70 200nm
(CP 50 + VSB)
dose ratio x1.37
640x480 | original size
2- 8 -
DOSE 70 200nm
(VSB)
640x480 | original size
3- 7 -
DOSE 70 200nm
(VSB)
640x480 | original size
4- 6 -
DOSE 70 200nm
(CP 100 x 4)
640x480 | original size
5- 5 -
DOSE 70 150nm
(CP 100 + 50 x 5)
640x480 | original size
6- 4 -
DOSE 70 150nm
(20nm x 3 + 10nm)
640x480 | original size
7- 3 -
DOSE 70 150nm
(20nm + 10nm x 3)
640x480 | original size
8- 2 -
DOSE 70 150nm
(20nm x 4)
640x480 | original size
9- 1 -
DOSE 70 150nm
(10nm x 4)
640x480 | original size
10- 0 -
DOSE 70 150nm
(VSB)
640x480 | original size
11- ID -
DOSE 70
GDSII ID
640x480 | original size