Warnning
^[[3~
** Labit(V-2.12.06 2005/06/22) in BEXEL system. 2019/09/25 13:04:49 **
                                   Copyright (C) Fujitsu LTD. 1996-2005
***  INPUT PARAMETER LIST  ***
    input GDS file name   = /export/home/makoto_f/Goto/inscribe_polygon-ellipsis-p0.1um-s5.0mm.gds
input control file name   = /export/home/makoto_f/xx
   output BEF file name   = /export/home/makoto_f/Goto/inscribe-5mm.bef
work directory name ( 1)  = /tmp

--- INPUT CONTROL STATEMENT LIST ---------------------------------------
LABIT {
        HIERARCHY {
                top = top;
                block_order = auto;
        }
        OPTION {
                layer = 0;
                block_mode = normal;
                origin = 0, 0;
                magnification = 100;
                matrix = 2;
        }
        OBJECT {
                assign = wafer;
                data1 = inscribe50;
                data2 = BEF;
        }
        DEFLECTION {
                chip = 50, 50;
                field = 400, 400(5, 5);
                sub = 80, 80(5, 5);
                sub_step = 2.0;
                scan = yx;
                sub_adjust = on(2);
                sub_flat = off;
        }
        BLOCK {
                extraction_mode = auto;
                size = 4.5, 4.5(0.1);
                shade = auto;
                triangle = off;
                master = off;
        }
        ERROR {
                level = detail;
        }
}
------------------------------------------------------------------------
Labit -200331 ALARM   Invalid BOUNDARY data ( found redundancy line,redundancy p
                      oint or duplicate point ).(3471:analyze)
 -BOUNDARY-  structure name : inscribe_polygon-X5.0-Y2.5-P0.1  layer code = 0  data type = 0
             xyn = 322 ( XY=2500,178,2450,178,2450,308,...)
Labit -000007 ALARM   - error trace back - [ 100102 ](669:main)

*** INPUT PROCESS INFORMATION LIST ***
  total input structure number    = 3
  total reserved structure number = 1 ( intermediate:0  block:0 )
  simple chip magnification       = 100 %
  exposure subject                = wafer
  --FIELD INFORMATION--
    field size ( margin size )    :  400.000, 400.000(  5.000,  5.000)micron
    field scanning direction      : Y scan
    sub field size ( margin size ):   80.000,  80.000(  5.000,  5.000)micron
    sub field scanning direction  : X scan
    sub field merge               : on( 2 )
    sub field flatten             : off
  ��CM EXPOSURE INFOMATION��
    chip size                     : 50.000,50.000 mm
    change field size             : max  800 micron    min  200 micron
    change sub field size         : max   80 micron    min   50 micron
    change sub field step         :  2.0 micron
    overlap judge value of field  :  700 micron
  --ERROR MESSAGE CONTROL--
    error message level : detail

                                                                               
*** OUTPUT BEF INFOMATION LIST ***
  data name 1  = inscribe50
  data name 2  = BEF
  comment      = 
  --LITHOGRAPHY DATA INFOMATION--
    total field number      :169 
    total sub field number  :3969 
    total opc number in PTD :3818958 
    total flat opc number   :3818958 
    data area               :left  under( -2523.000, -2521.800)micron.
                            :right upper(  2517.000,  2518.200)micron.
    field area              :left  under( -2603.000, -2601.800)micron.
                            :right upper(  2597.000,  2598.200)micron.

  CPU TIME = 00:10:38.767      ELAPS TIME = 00:10:38.781
  MEMORY SIZE = 616.453(MB)

** Labit process end. exit code( 4 ). **
Warnning