/*--- COMMAND LINE ---*/ /usr1/bin/f7kcnvexec NANOX-385-333x180-200.gds --log makoto-20190514_194105.1 --root B-3.0x3.0mm-Round-0.385-200 --name NANOX_makoto_B-3.0x3.0mm-Round-0.385-200.bef --log NANOX_makoto_B-3.0x3.0mm-Round-0.385-200.log --layno 0 --field-import 0.6 --str2cp /home/share/18-SIPH.str --fcp-file /home/share/18-SIPH.fcp /*--- CONSOLE INFO ---*/ [JMS(28971)]: verifycp:WARN : CPID 16(HoleSIPH200nm) : pattern does not match /*--- DATA CONVERSION ---*/ F7000 Data Conversion System Ver.04.00.02 ------------------------------------------------- OUTPUT FORMAT : BEF20 Field Size : X = 32.000um, Y = 32.000um Sub Field Size : X = 4.000um, Y = 4.000um Small Fig Size : 0.030um Field Import : 0.600um Sub Field Import : 0.000um Shot Size : 0.800um Slit Width : 0.010um Conversion Area : -1510, -1510, 1510, 1510 BEF20_CP_SIZE : 0.800000 ------------------------------------------------- (GDS-II) /home/makoto/nanox/round/NANOX-385-333x180-200.gds STR = 44 BDRY= 2495 PATH= 0 BOX = 0 TEXT= 0 NODE= 0 SREF= 130 AREF= 49016 FILESIZE=3227KB (MAIN:B-3.0x3.0mm-Round-0.385-200 LYR:0:0) /home/makoto/nanox/round/NANOX_makoto_B-3.0x3.0mm-Round-0.385-200.bef VSB=0 Block=3537319 Matrix=3493941 TotalShot=42368160 FileSize=100137KB /*--- RESULT ---*/ ##Put Date : 2019/05/14 19:41:16 ##Preprocess Date : START 19/05/14 19:41:16 FINISH 19/05/14 19:41:16 ##Conversion Date : START 19/05/14 19:41:17 FINISH 19/05/14 19:41:23