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55 photos
ZEP530A L/S, CP 18 Hole test, all with --pec
X values are inside of each Area in micron
1
Dose: 140 (X:1784 Y:30516)
W200-209 (191 + 209 = 400)
640x480 | original size		 2
Dose: 140 (X:1784 Y:30516)
W200-209 (191 + 209 = 400)
640x480 | original size		 3
Dose: 140 (X:1761 Y:30575)
W200-209 (191 + 209 = 400)
640x480 | original size		 4
Dose: 140 (X:1780 Y:30557)
W200-209 (191 + 209 = 400)
640x480 | original size
5
Dose: 140 (X:1780 Y:30557)
W200-209 (191 + 209 = 400)
640x480 | original size		 6
Dose: 140 (X:1064 Y:30586)
S006-300-P600 (300 nm)
640x480 | original size		 7
Dose: 140 (X:1064 Y:30586)
S006-300-P600 (300 nm)
640x480 | original size		 8
Dose: 140 (X:1064 Y:30586)
S006-300-P600 (300 nm)
640x480 | original size
9
Dose: 140 (X:1064 Y:30586)
S006-300-P600 (300 nm)
640x480 | original size		 10
Dose: 140 (X:1064 Y:30602)
S006-300-P600 (300 nm)
640x480 | original size		 11
Dose: 140 (X:1064 Y:30647)
S006-200-P400 (200 nm)
640x480 | original size		 12
Dose: 140 (X:1064 Y:30669)
S006-200-P400 (200 nm)
640x480 | original size
13
Dose: 140 (X:1065 Y:30741)
S006-050-P100 (50 nm)
640x480 | original size		 14
Dose: 140 (X:1065 Y:30727)
S006-050-P100 (50 nm)
640x480 | original size		 15
Dose: 150 (X:1065 Y:30730)
S006-050-P100 (50 nm)
640x480 | original size		 16
Dose: 150 (X:1065 Y:30734)
S005-050-P100 (50nm pitch 100)
640x480 | original size
17
Dose: 160 (X:1007 Y:539)
S005-300-P600

640x480 | original size		 18
Dose: 160 (X:1006 Y:509)
640x480 | original size		 19
Dose: 150 (X:1004 Y:519)
640x480 | original size		 20
Dose: 160 (X:1008 Y:513)
W120-104 (104 + 136 = 240)
640x480 | original size
21
Dose: 140 (X:204 Y:528)
W50-34 (34 + 66 = 100)
640x480 | original size		 22
Dose: 150 (X:205 Y:523)
W50-34 ( 34 + 66 = 100 )
640x480 | original size		 23
Dose: 150 (X:204 Y:520)
W50-34 ( 34 + 66 = 100 )
640x480 | original size		 24
Dose: 160 (X:207 Y:516)
W50-34 (34 + 66 = 100)
640x480 | original size
25
Dose: 160 (X:205 Y:514)
W50-34 (34 + 66 = 100)
640x480 | original size		 26
Dose: 160 (X:1007 Y:690)
S005-050-P100 (50 nm)
640x480 | original size		 27
Dose: 160 (X:1009 Y:689)
S005-050-P100 (50 nm)
640x480 | original size		 28
Dose: 160 (X:1006 Y:661)
S005-100-P200 (100nm)
640x480 | original size
29
Dose: 160 (X:1006 Y:658)
S005-100-P200 (100nm)
640x480 | original size		 30
Dose: 160 (X:1006 Y:658)
S005-100-P200 (100nm)
640x480 | original size		 31
Dose: 160 (X:1008 Y:602)
S005-150-300 (150nm)
640x480 | original size		 32
Dose: 160 (X:1007 Y:605)
S005-150-300 (150nm)
640x480 | original size
33
Dose: 160 (X:1007 Y:598)
S005-200-P400 (200nm)
640x480 | original size		 34
Dose: 160 (X:1007 Y:598)
S005-200-P400 (200nm)
640x480 | original size		 35
Dose: 160 (X:805 Y:512)
W100-84 (84 + 116 = 200)
640x480 | original size		 36
Dose: 160 (X:805 Y:511)
W100-84 (84 + 116 = 200)
640x480 | original size
37
Dose: 160 (X:805 Y:511)
W100-84 (84 + 116 = 200)
640x480 | original size		 38
Dose: 160 (X:805 Y:511)
W100-84 (84 + 116 = 200)
640x480 | original size		 39
Dose: 160 (X:886 Y:526)
640x480 | original size		 40
Dose: 160 (X:887 Y:509)
W100-100 (100 + 100 = 200)
640x480 | original size
41
Dose: 160 (X:835 Y:514)
W120-90 (90 + 150 = 240)
640x480 | original size		 42
Dose: 160 (X:833 Y:509)
W120-90 (90 + 150 = 240)
640x480 | original size		 43
Dose: 160 (X:833 Y:509)
640x480 | original size		 44
Dose: 160 (X:820 Y:509)
W100-87 (87 + 113 = 200)
640x480 | original size
45
Dose: 160 (X:819 Y:507)
W100-87 (87 + 113 = 200)
640x480 | original size		 46
Dose: 160 (X:819 Y:507)
640x480 | original size		 47
Dose: 160 (X:807 Y:511)
640x480 | original size		 48
Dose: 160 (X:805 Y:509)
W100-84 (84 + 116 = 200)
640x480 | original size
49
Dose: 150 (X:804 Y:519)
W120-84 (106 + 134 = 240)
640x480 | original size		 50
Dose: 150 (X:804 Y:519)
W100-84 (84 + 116 = 200)
640x480 | original size		 51
Dose: 140 (X:893 Y:520)
640x480 | original size		 52
Dose: 140 (X:804 Y:525)
W100-84 (84 + 116 = 200)
640x480 | original size
53
Dose: 140 (X:802 Y:521)
W100-84 (84 + 116 = 200)
640x480 | original size		 54
Dose: 140 (X:802 Y:525)
Note: without (L)
640x480 | original size		 55
Dose: 140 (X:802 Y:525)
Note: without (L)
640x480 | original size