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143 photos micro pitch = 5 um, minor = 200 nm, DOSE = 4 m/m
1
Dose: 140 (X:-599
Y:372 / W60-44) -1
640x480 | original size		 2
Dose: 140 (X:-601
Y:367 / W60-44) -1
(NG)
640x480 | original size		 3
Dose: 140 (X:-601
Y:367 / W60-44) -1
44-> 56.56 +12.56
640x480 | original size		 4
Dose: 140 (X:-400
Y:367 / W80-64) -1
64 -> 75.37 +11.37
640x480 | original size
5
Dose: 140 (X:-199
Y:367 / W100-84) -1
84 -> 107.16 (+ 23.16)
640x480 | original size		 6
Dose: 140 (X:2
Y:367 / W120-104) -1
104 -> 126.01 (+22.01)
640x480 | original size		 7
Dose: 140 (X:201
Y:367 / W140-124) -1
124 -> 140.9 (+16.9)
640x480 | original size		 8
Dose: 140 (X:403
Y:367 / W160-144) -1
144 -> 167.62 (+23.6)
640x480 | original size
9
Dose: 140 (X:603
Y:367 / W200-184) -1
184 -> 208.29 (+24.29)
640x480 | original size		 10
Dose: 160 (X:-800
Y:363 / W50-34) -1
640x480 | original size		 11
Dose: 160 (X:-800
Y:360 / W50-34) -1
34 -> 46.80 (+12.8)
640x480 | original size		 12
Dose: 160 (X:-790
Y:360 / W50-36) -1
36 -> 47.6
640x480 | original size
13
Dose: 160 (X:-783
Y:360 / W50-37) -1
37 -> 49.6
640x480 | original size		 14
Dose: 160 (X:-783
Y:360 / W50-37) -1
640x480 | original size		 15
Dose: 160 (X:-783
Y:360 / W50-37) -1
640x480 | original size		 16
Dose: 160 (X:-774
Y:360 / W50-39) -1
640x480 | original size
17
Dose: 160 (X:-769
Y:360 / W50-40) -1
40 -> 47.63
640x480 | original size		 18
Dose: 160 (X:-760
Y:360 / W50-43)
640x480 | original size		 19
Dose: 160 (X:-760
Y:360 / W50-43)
43 -> 53.4
640x480 | original size		 20
Dose: 160 (X:-751
Y:365 / W50-45) 1
640x480 | original size
21
Dose: 160 (X:-751
Y:359 / W50-45) 1
45 -> 52.59
640x480 | original size		 22
Dose: 160 (X:-727
Y:359 / W50-49)
640x480 | original size		 23
Dose: 160 (X:-727
Y:359 / W50-49)
49 -> 55.0 (+6.0)
640x480 | original size		 24
Dose: 160 (X:-702
Y:359 / W50-54)
640x480 | original size
25
Dose: 160 (X:-702
Y:359 / W50-54)
54 -> 58 (+4.0)
640x480 | original size		 26
Dose: 160 (X:-692
Y:361 / W50-56)
640x480 | original size		 27
Dose: 160 (X:-692
Y:361 / W50-56)
56 -> 64.49 (+8.49)
640x480 | original size		 28
Dose: 160 (X:-682
Y:361 / W50-58)
640x480 | original size
29
Dose: 160 (X:-683
Y:360 / W50-58)
58 -> 61.52 ( +3.52)
640x480 | original size		 30
Dose: 160 (X:-404
Y:361 / W80-64) -1
640x480 | original size		 31
Dose: 160 (X:-406
Y:355 / W80-64)
64 -> 75.4
640x480 | original size		 32
Dose: 160 (X:-399
Y:360 / W80-65)
640x480 | original size
33
Dose: 160 (X:-400
Y:359 / W80-65)
65 -> 73.4
640x480 | original size		 34
Dose: 160 (X:-389
Y:362 / W80-67)
640x480 | original size		 35
Dose: 160 (X:-391
Y:360 / W80-67) 1
67 -> 87.37
640x480 | original size		 36
Dose: 160 (X:-379
Y:363 / W80-69)
640x480 | original size
37
Dose: 160 (X:-380
Y:356 / W80-69)
69 -> 78.38
640x480 | original size		 38
Dose: 160 (X:-369
Y:363 / W80-71)
640x480 | original size		 39
Dose: 160 (X:-370
Y:356 / W80-71)
71 -> 86.33
640x480 | original size		 40
Dose: 160 (X:-361
Y:362 / W80-73) 1
640x480 | original size
41
Dose: 160 (X:-361
Y:361 / W80-73) 1
73 -> 81.36
640x480 | original size		 42
Dose: 160 (X:-350
Y:365 / W80-75)
640x480 | original size		 43
Dose: 160 (X:-350
Y:365 / W80-75)
75 -> 82.35
640x480 | original size		 44
Dose: 160 (X:-341
Y:372 / W80-77) 1
640x480 | original size
45
Dose: 160 (X:-333
Y:354 / W80-77) -1
77 -> 88.305
640x480 | original size		 46
Dose: 160 (X:-334
Y:361 / W80-77) -1
640x480 | original size		 47
Dose: 160 (X:-325
Y:361 / W80-79) -1
640x480 | original size		 48
Dose: 160 (X:-325
Y:361 / W80-79) -1
640x480 | original size
49
Dose: 160 (X:-326
Y:354 / W80-79)
79 -> 84.336
640x480 | original size		 50
Dose: 160 (X:-315
Y:360 / W80-81) -1
640x480 | original size		 51
Dose: 160 (X:-317
Y:355 / W80-81)
81 -> 91.28
640x480 | original size		 52
Dose: 160 (X:-306
Y:360 / W80-83)
81 -> 91.28
640x480 | original size
53
Dose: 160 (X:-306
Y:360 / W80-83)
83 -> 93.807
640x480 | original size		 54
Dose: 160 (X:-295
Y:363 / W80-85) -1
640x480 | original size		 55
Dose: 160 (X:-295
Y:363 / W80-85) -1
640x480 | original size		 56
Dose: 160 (X:-295
Y:359 / W80-85) -1
640x480 | original size
57
Dose: 160 (X:-295
Y:358 / W80-85) -1
640x480 | original size		 58
Dose: 160 (X:-285
Y:361 / W80-87) -1
640x480 | original size		 59
Dose: 160 (X:-285
Y:359 / W80-87) -1
87 -> 98.23
640x480 | original size		 60
Dose: 160 (X:-285
Y:359 / W80-89) 1
640x480 | original size
61
Dose: 160 (X:-285
Y:356 / W80-89) 1
89 -> 97.23
640x480 | original size		 62
Dose: 160 (X:-7
Y:359 / W120-104)
640x480 | original size		 63
Dose: 160 (X:-7
Y:354 / W120-104)
104 -> 124.9
640x480 | original size		 64
Dose: 160 (X:4
Y:361 / W120-106) 1
640x480 | original size
65
Dose: 160 (X:4
Y:356 / W120-106) 1
106 -> 130.97
640x480 | original size		 66
Dose: 160 (X:7
Y:358 / W120-107) 1
640x480 | original size		 67
Dose: 160 (X:7
Y:358 / W120-107) 1
107 -> 123.0
640x480 | original size		 68
Dose: 160 (X:12
Y:361 / W120-108) 1
640x480 | original size
69
Dose: 160 (X:12
Y:356 / W120-108) 1
108 -> 128.98
640x480 | original size		 70
Dose: 160 (X:23
Y:359 / W120-110) 1
640x480 | original size		 71
Dose: 160 (X:22
Y:351 / W120-110) 1
110 -> 128.93
640x480 | original size		 72
Dose: 160 (X:32
Y:358 / W120-112) 1
640x480 | original size
73
Dose: 160 (X:32
Y:352 / W120-112) 1
112 -> 131.90
640x480 | original size		 74
Dose: 160 (X:43
Y:359 / W120-114) 1
640x480 | original size		 75
Dose: 160 (X:43
Y:355 / W120-114) 1
114 -> 129.98
640x480 | original size		 76
Dose: 160 (X:52
Y:359 / W120-116) 1
640x480 | original size
77
Dose: 160 (X:52
Y:353 / W120-116) 1
116 -> 135.87
640x480 | original size		 78
Dose: 160 (X:62
Y:358 / W120-118) 1
640x480 | original size		 79
Dose: 160 (X:62
Y:352 / W120-118) 1
118 -> 134.88
640x480 | original size		 80
Dose: 160 (X:71
Y:359 / W120-120) 1
640x480 | original size
81
Dose: 160 (X:71
Y:353 / W120-120) 1
120 -> 138.85
640x480 | original size		 82
Dose: 160 (X:83
Y:359 / W120-122) 1
640x480 | original size		 83
Dose: 160 (X:82
Y:353 / W120-122) 1
122 -> 134.89
640x480 | original size		 84
Dose: 160 (X:93
Y:359 / W120-124) 1
640x480 | original size
85
Dose: 160 (X:92
Y:352 / W120-124) 1
124 -> 135.93
640x480 | original size		 86
Dose: 160 (X:101
Y:359 / W120-126) 1
640x480 | original size		 87
Dose: 160 (X:101
Y:354 / W120-126) 1
126 -> 147.76
640x480 | original size		 88
Dose: 160 (X:113
Y:360 / W120-128) 1
640x480 | original size
89
Dose: 160 (X:111
Y:353 / W120-128) 1
128 -> 144.86
640x480 | original size		 90
Dose: 160 (X:111
Y:353 / W120-128) 1
640x480 | original size		 91
Dose: 160 (X:192
Y:359 / W140-124)
640x480 | original size		 92
Dose: 160 (X:192
Y:353 / W140-124)
124 -> 146.76
640x480 | original size
93
Dose: 160 (X:203
Y:358 / W140-126) 1
640x480 | original size		 94
Dose: 160 (X:201
Y:353 / W140-126) 1
126 -> 146.84
640x480 | original size		 95
Dose: 160 (X:211
Y:358 / W140-128) 1
640x480 | original size		 96
Dose: 160 (X:210
Y:354 / W140-128) 1
128 -> 145.85
640x480 | original size
97
Dose: 160 (X:234
Y:361 / W140-130) -1
640x480 | original size		 98
Dose: 160 (X:232
Y:355 / W140-130) -1
640x480 | original size		 99
Dose: 160 (X:232
Y:355 / W140-130) -1
130 -> 158.75
640x480 | original size		 100
Dose: 160 (X:243
Y:360 / W140-132) -1
640x480 | original size
101
Dose: 160 (X:243
Y:356 / W140-132) -1
132 -> 150.81
640x480 | original size		 102
Dose: 160 (X:255
Y:359 / W140-134) -2
640x480 | original size		 103
Dose: 160 (X:253
Y:354 / W140-134) -1
134 -> 158.65
640x480 | original size		 104
Dose: 160 (X:273
Y:359 / W140-138) -1
640x480 | original size
105
Dose: 160 (X:273
Y:351 / W140-138) -1
138 -> 155.77
640x480 | original size		 106
Dose: 160 (X:284
Y:349 / W140-140) -1
640x480 | original size		 107
Dose: 160 (X:284
Y:344 / W140-140) -1
140 -> 158.75
640x480 | original size		 108
Dose: 160 (X:294
Y:354 / W140-142) -1
640x480 | original size
109
Dose: 160 (X:294
Y:342 / W140-142) -1
142 -> 160.73
640x480 | original size		 110
Dose: 160 (X:304
Y:349 / W140-144) -1
640x480 | original size		 111
Dose: 160 (X:303
Y:346 / W140-144) -1
144 -> 167.58
640x480 | original size		 112
Dose: 160 (X:311
Y:352 / W140-146) -1
640x480 | original size
113
Dose: 160 (X:311
Y:349 / W140-146) -1
146 -> 165.59
640x480 | original size		 114
Dose: 160 (X:323
Y:356 / W140-148) -1
640x480 | original size		 115
Dose: 160 (X:323
Y:348 / W140-148) -1
148 -> 168.55
640x480 | original size		 116
Dose: 160 (X:401
Y:354 / W160-144) -1
640x480 | original size
117
Dose: 160 (X:401
Y:347 / W160-144) -1
144 -> 168.55
640x480 | original size		 118
Dose: 160 (X:412
Y:351 / W160-146) -1
640x480 | original size		 119
Dose: 160 (X:411
Y:345 / W160-146) -1
146 -> 168.54
640x480 | original size		 120
Dose: 160 (X:422
Y:353 / W160-148) -1
640x480 | original size
121
Dose: 160 (X:422
Y:353 / W160-148) -1
148 -> 169.53
640x480 | original size		 122
Dose: 160 (X:433
Y:356 / W160-150) -1
640x480 | original size		 123
Dose: 160 (X:432
Y:351 / W160-150) -1
150 -> 170.66
640x480 | original size		 124
Dose: 160 (X:443
Y:358 / W160-152) -1
640x480 | original size
125
Dose: 160 (X:443
Y:349 / W160-152) -1
152 -> 176.61
640x480 | original size		 126
Dose: 160 (X:451
Y:356 / W160-154) -1
640x480 | original size		 127
Dose: 160 (X:451
Y:349 / W160-154) -1
154 -> 175.62
640x480 | original size		 128
Dose: 160 (X:462
Y:359 / W160-156) -1
640x480 | original size
129
Dose: 160 (X:463
Y:349 / W160-156) -1
156 -> 180.58
640x480 | original size		 130
Dose: 160 (X:472
Y:356 / W160-158) -1
640x480 | original size		 131
Dose: 160 (X:472
Y:349 / W160-158) -1
158 -> 179.59
640x480 | original size		 132
Dose: 160 (X:482
Y:354 / W160-160) -1
640x480 | original size
133
Dose: 160 (X:482
Y:347 / W160-160) -1
160 -> 186.39
640x480 | original size		 134
Dose: 160 (X:492
Y:354 / W160-162) -1
640x480 | original size		 135
Dose: 160 (X:490
Y:346 / W160-162) -1
162 -> 182.42
640x480 | original size		 136
Dose: 160 (X:489
Y:354 / W160-164) 2
640x480 | original size
137
Dose: 160 (X:489
Y:348 / W160-164) 2
164 -> 187.39
640x480 | original size		 138
Dose: 160 (X:500
Y:352 / W160-166) 1
640x480 | original size		 139
Dose: 160 (X:500
Y:352 / W160-166) 1
166 -> 186.53
640x480 | original size		 140
Dose: 160 (X:510
Y:360 / W160-168) 1
640x480 | original size
141
Dose: 160 (X:509
Y:354 / W160-168) 2
168 -> 191.49
640x480 | original size		 142
Dose: 160 (X:590
Y:358 / W200-184) 1
640x480 | original size		 143
Dose: 160 (X:590
Y:351 / W200-184) 1
184 -> 220.12
640x480 | original size