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59 photos

OFPR-800 LB 150 cP L/S, Varing width for 1/1 and 3/3 um

For example, 1.00 / 0.70 -> expecting 1.0 um, design = 0.7 um, pitch = 2.0 um
3000 rpm, DWL66+ HR lens, Filter 100 %, Intensity 100 %, Focus 0 % 20221031 exposure,
PAB 90/90, PostBake 120x2 min,
Regulus8230 on 2022/11/04, carbon coater distance 85 m/m, expecting 5 nm coated
Please note: Dimension label -> Real observation, tilt (starting photo #36) with 60 degree,
GDSII: LSratio-2022-10-23-22.21.gds;
1
X: 2.66 m/m
Y: 3.96 m/m
Power: 1.5 mW
T/D: 3.0/2.5
2022/11/04 10:42:08

640x480 | original size		 2
X: 2.66 m/m
Y: 3.96 m/m
Power: 1.5 mW
T/D: 3.0/2.5
2022/11/04 10:43:01

640x480 | original size		 3
X: 4.71 m/m
Y: 3.96 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 10:44:37

640x480 | original size		 4
X: 4.72 m/m
Y: 3.96 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 10:46:18

640x480 | original size
5
X: 4.73 m/m
Y: 3.96 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 10:49:27

640x480 | original size		 6
X: 7.72 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.7
2022/11/04 10:50:55

640x480 | original size		 7
X: 7.72 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.7
2022/11/04 10:51:48

640x480 | original size		 8
X: 7.34 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.5
2022/11/04 10:53:58

640x480 | original size
9
X: 10.33 m/m
Y: 3.96 m/m
Power: 5 mW
T/D: 1.0/0.5
2022/11/04 10:55:09

640x480 | original size		 10
X: 10.33 m/m
Y: 3.96 m/m
Power: 5 mW
T/D: 1.0/0.5
2022/11/04 10:55:51

640x480 | original size		 11
X: 7.33 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.5
2022/11/04 10:56:18

640x480 | original size		 12
X: 7.33 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.5
2022/11/04 10:57:56

640x480 | original size
13
X: 7.12 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 10:58:25

640x480 | original size		 14
X: 7.12 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:00:06

640x480 | original size		 15
X: 7.12 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:02:23

640x480 | original size		 16
X: 4.12 m/m
Y: 3.96 m/m
Power: 2 mW
T/D: 1.0/0.4
2022/11/04 11:04:07

640x480 | original size
17
X: 7.13 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:05:10

640x480 | original size		 18
X: 7.11 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:06:16

640x480 | original size		 19
X: 10.12 m/m
Y: 3.96 m/m
Power: 5 mW
T/D: 1.0/0.4
2022/11/04 11:07:16

640x480 | original size		 20
X: 12.47 m/m
Y: 3.96 m/m
Power: 7.5 mW
T/D: 3.0/2.9
2022/11/04 11:09:10

640x480 | original size
21
X: 11.52 m/m
Y: 3.96 m/m
Power: 5 mW
T/D: 3.0/2.4
2022/11/04 11:10:27

640x480 | original size		 22
X: 11.52 m/m
Y: 3.96 m/m
Power: 5 mW
T/D: 3.0/2.4
2022/11/04 11:11:34

640x480 | original size		 23
X: 8.52 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.4
2022/11/04 11:11:59

640x480 | original size		 24
X: 8.52 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.4
2022/11/04 11:13:38

640x480 | original size
25
X: 5.52 m/m
Y: 3.96 m/m
Power: 2 mW
T/D: 3.0/2.4
2022/11/04 11:14:01

640x480 | original size		 26
X: 5.52 m/m
Y: 3.96 m/m
Power: 2 mW
T/D: 3.0/2.4
2022/11/04 11:15:40

640x480 | original size		 27
X: 5.92 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.6
2022/11/04 11:17:51

640x480 | original size		 28
X: 6.13 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.7
2022/11/04 11:18:20

640x480 | original size
29
X: 6.13 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.7
2022/11/04 11:19:24

640x480 | original size		 30
X: 6.35 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.8
2022/11/04 11:19:54

640x480 | original size		 31
X: 6.35 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.8
2022/11/04 11:21:26

640x480 | original size		 32
X: 8.73 m/m
Y: 3.97 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:22:08

640x480 | original size
33
X: 8.72 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:23:27

640x480 | original size		 34
X: 8.53 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.4
2022/11/04 11:23:49

640x480 | original size		 35
X: 8.53 m/m
Y: 3.96 m/m
Power: 3 mW
T/D: 3.0/2.4
2022/11/04 11:25:09

640x480 | original size		 36
X: 8.60 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:32:57

640x480 | original size
37
X: 8.60 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:33:35

640x480 | original size		 38
X: 8.60 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:34:32

640x480 | original size		 39
X: 8.39 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 3.0/2.4
2022/11/04 11:35:25

640x480 | original size		 40
X: 8.39 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 3.0/2.4
2022/11/04 11:37:11

640x480 | original size
41
X: 8.58 m/m
Y: 4.17 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:38:13

640x480 | original size		 42
X: 8.58 m/m
Y: 4.17 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:38:51

640x480 | original size		 43
X: 8.58 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 3.0/2.5
2022/11/04 11:40:29

640x480 | original size		 44
X: 8.00 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.9
2022/11/04 11:41:37

640x480 | original size
45
X: 7.00 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:42:51

640x480 | original size		 46
X: 4.81 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.8
2022/11/04 11:43:58

640x480 | original size		 47
X: 4.20 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.5
2022/11/04 11:45:28

640x480 | original size		 48
X: 4.20 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.5
2022/11/04 11:48:51

640x480 | original size
49
X: 7.00 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:50:46

640x480 | original size		 50
X: 7.00 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:54:22

640x480 | original size		 51
X: 7.00 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 11:55:19

640x480 | original size		 52
X: 4.60 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 11:56:50

640x480 | original size
53
X: 4.60 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 11:59:07

640x480 | original size		 54
X: 4.60 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 12:03:21

640x480 | original size		 55
X: 4.60 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 12:04:48

640x480 | original size		 56
X: 4.60 m/m
Y: 4.16 m/m
Power: 2 mW
T/D: 1.0/0.7
2022/11/04 12:06:25

640x480 | original size
57
X: 7.61 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.7
2022/11/04 12:07:48

640x480 | original size		 58
X: 7.01 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 12:09:27

640x480 | original size		 59
X: 7.01 m/m
Y: 4.16 m/m
Power: 3 mW
T/D: 1.0/0.4
2022/11/04 12:13:27

640x480 | original size