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11 photos
    EXP-     date    start    sec  rate hh:mm:ss BUF  adj   FP  mA WEC FocusPoint BEF  errors
-------- -------- -------- ------  ---- -------- --    --  [--] - ---------------  
 w  8568 20230112 16:46.56    374  0.82  0:06.14 (1 -  63) [33]    GODA-LAB_sekine_16.5x15-Au
 w  8571 20230112 17:02.53    374  0.82  0:06.14 (1 -  64) [33]    GODA-LAB_sekine_20x20-10-Si

1
Si + Cr + Au substrate
2000 rpm
2023/01/12 15:10:45

640x480 | original size
2
2023/01/12 16:09:33

640x480 | original size
3
Si + HSQ
2 minutes development
(NMD-3)
2023/01/12 17:31:54

640x480 | original size
4
Si + HSQ
2 minutes development
(NMD-3)
2023/01/12 17:34:42

640x480 | original size
5
Si + HSQ
4 minutes development
(NMD-3)
2023/01/12 17:39:45

640x480 | original size
6
Si + HSQ
4 minutes development
(NMD-3)
2023/01/12 17:43:49

640x480 | original size
7
Si + Cr + Au (300nm) + HSQ
2023/01/12 18:24:35

640x480 | original size
8
Si + Cr + Au (300nm) + HSQ
2023/01/12 18:36:31

640x480 | original size
9
Si + Cr + Au (300nm)
+ HSQ -> 20 nm
2023/01/12 18:48:28

640x480 | original size
10
Si + HSQ 100 nm
2023/01/12 19:03:49

640x480 | original size
11
2023/01/12 19:05:08

640x480 | original size