EXP- date start sec rate hh:mm:ss BUF adj FP mA WEC FocusPoint BEF errors -------- -------- -------- ------ ---- -------- -- -- [--] - --------------- w 8568 20230112 16:46.56 374 0.82 0:06.14 (1 - 63) [33] GODA-LAB_sekine_16.5x15-Au w 8571 20230112 17:02.53 374 0.82 0:06.14 (1 - 64) [33] GODA-LAB_sekine_20x20-10-Si
Si + Cr + Au substrate 2000 rpm 2023/01/12 15:10:45 640x480 | original size |
2023/01/12 16:09:33 640x480 | original size |
Si + HSQ 2 minutes development (NMD-3) 2023/01/12 17:31:54 640x480 | original size |
Si + HSQ 2 minutes development (NMD-3) 2023/01/12 17:34:42 640x480 | original size |
Si + HSQ 4 minutes development (NMD-3) 2023/01/12 17:39:45 640x480 | original size |
Si + HSQ 4 minutes development (NMD-3) 2023/01/12 17:43:49 640x480 | original size |
Si + Cr + Au (300nm) + HSQ 2023/01/12 18:24:35 640x480 | original size |
Si + Cr + Au (300nm) + HSQ 2023/01/12 18:36:31 640x480 | original size |
Si + Cr + Au (300nm) + HSQ -> 20 nm 2023/01/12 18:48:28 640x480 | original size |
Si + HSQ 100 nm 2023/01/12 19:03:49 640x480 | original size |
2023/01/12 19:05:08 640x480 | original size |