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24 photos
2023/01/17
F7000S exposure, HSQ 2%, 5000 rpm x 60 sec
DOSE ratio range 0.3 to 14.9, dose set to 100/200
Develop: NMD-3, 4 minutes, 20 degree
GDSII

1 640x480 | original size	2 640x480 | original size	3 640x480 | original size	4 1.6/48.4 um L/S (annotated by DOSE) 640x480 | original size
5 49.2-0.8-200 640x480 | original size	6 0.8/49.2 um L/S annotated by DOSE 640x480 | original size	7 49.6-0.4-200 640x480 | original size	8 49.9-0.1-200 640x480 | original size
9 48-48-skip-30-200 640x480 | original size	10 48-48-skip-30-100 640x480 | original size	11 48.4-1.6-100 640x480 | original size	12 49.2-0.8-100 640x480 | original size
13 49.6-0.4-100.png 640x480 | original size	14 49.9-0.1-100 640x480 | original size	15 49.9-0.1-100 640x480 | original size	16 640x480 | original size
17 0.1-100 640x480 | original size	18 0.1-100-true 640x480 | original size	19 0.1-100-true-2 640x480 | original size	20 0.1-100-true-2-annotated 640x480 | original size
21 0.05-100 640x480 | original size	22 X(DOSE) Y(thickness after development) HSQ 50 nm 0.05-100 annotated 640x480 | original size	23 80nm-step 640x480 | original size	24 0.05-100-zoom 640x480 | original size