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11 photos

1 scratch of Resist area 640x480 | original size	2 Measuring scratch of Resist area 640x480 | original size	3 ZEP520A 4000 rpm It is 340 nm 640x480 | original size	4 Measuring extra etching of Si surface SPT-HR-white 640x480 | original size
5 Measuring extra etching of Si surface SPT-HR-white It is about 18 um 640x480 | original size	6 Measuring before etching pattern (no image for result, but it is 340 nm) 640x480 | original size	7 Measuring SPT-HR-white- DRIE trench 640x480 | original size	8 SPT-HR-white- DRIE trench 99.5 um 640x480 | original size
9 Measuring SPT-HR-grey DRIE trench 640x480 | original size	10 Measuring SPT-HR-grey DRIE trench 95 um 640x480 | original size	11 640x480 | original size