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70 photos MUC-21 Grease comparison, Grey or White (Shin-etsu KS-613)
GDSII
2023/01/17 F7000S exposure (4 inch Si,ZEP520A, 340 nm), ADE-3000S and DICING
2023/01/23 MUC-21 etching(ERIC-NT 60 cycle)
2023/01/26 Regulus8230
By Yurie Inoue, Makoto Fujiwara and Ayako Mizushima
1
ERIC-NT 60 cycle grey
Width Ratio:
0.10 1:1
X -5.25 (m/m)
2023/01/26 14:03:34

640x480 | original size		 2
ERIC-NT 60 cycle grey
Width Ratio:
0.10 1:1
X -5.25 (m/m)
2023/01/26 14:04:19

640x480 | original size		 3
ERIC-NT 60 cycle grey
Width Ratio:
0.20 1:1
X -4.75 (m/m)
2023/01/26 14:07:47

640x480 | original size		 4
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:1
X -4.25 (m/m)
2023/01/26 14:09:50

640x480 | original size		 5
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:1
X -4.25 (m/m)
2023/01/26 14:10:48

640x480 | original size		 6
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:1
X -4.25 (m/m)
2023/01/26 14:11:16

640x480 | original size		 7
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:1
X -3.73 (m/m)
2023/01/26 14:12:55

640x480 | original size		 8
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:1
X -3.73 (m/m)
2023/01/26 14:14:10

640x480 | original size
9
ERIC-NT 60 cycle grey
Width Ratio:
100.00 1:1
X -3.35 (m/m)
2023/01/26 14:15:08

640x480 | original size		 10
ERIC-NT 60 cycle grey
Width Ratio:
0.05 1:2
X -2.75 (m/m)
2023/01/26 14:17:57

640x480 | original size		 11
ERIC-NT 60 cycle grey
Width Ratio:
0.10 1:2
X -2.25 (m/m)
2023/01/26 14:19:55

640x480 | original size		 12
ERIC-NT 60 cycle grey
Width Ratio:
0.20 1:2
X -1.75 (m/m)
2023/01/26 14:21:41

640x480 | original size		 13
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:2
X -1.25 (m/m)
2023/01/26 14:25:15

640x480 | original size		 14
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:2
X -1.25 (m/m)
2023/01/26 14:26:08

640x480 | original size		 15
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:2
X -1.25 (m/m)
2023/01/26 14:30:44

640x480 | original size		 16
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:2
X -1.25 (m/m)
2023/01/26 14:31:46

640x480 | original size
17
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:2
X -0.83 (m/m)
2023/01/26 14:33:45

640x480 | original size		 18
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:2
X -0.85 (m/m)
2023/01/26 14:34:51

640x480 | original size		 19
ERIC-NT 60 cycle grey
Width Ratio:
100.00 1:2
X -0.45 (m/m)
2023/01/26 14:36:05

640x480 | original size		 20
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:5
X 1.75 (m/m)
2023/01/26 14:40:21

640x480 | original size		 21
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:5
X 1.75 (m/m)
2023/01/26 14:41:31

640x480 | original size		 22
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:5
X 2.20 (m/m)
2023/01/26 14:44:31

640x480 | original size		 23
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:5
X 2.25 (m/m)
2023/01/26 14:45:43

640x480 | original size		 24
ERIC-NT 60 cycle grey
Width Ratio:
100.00 1:5
X 2.75 (m/m)
2023/01/26 14:48:08

640x480 | original size
25
ERIC-NT 60 cycle grey
Width Ratio:
0.10 1:10
X 3.75 (m/m)
2023/01/26 14:49:57

640x480 | original size		 26
ERIC-NT 60 cycle grey
Width Ratio:
0.10 1:10
X 3.75 (m/m)
2023/01/26 14:51:22

640x480 | original size		 27
ERIC-NT 60 cycle grey
Width Ratio:
0.20 1:10
X 4.25 (m/m)
2023/01/26 14:54:36

640x480 | original size		 28
ERIC-NT 60 cycle grey
Width Ratio:
0.20 1:10
X 4.25 (m/m)
2023/01/26 14:56:02

640x480 | original size		 29
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:10
X 4.67 (m/m)
2023/01/26 14:58:12

640x480 | original size		 30
ERIC-NT 60 cycle grey
Width Ratio:
1.00 1:10
X 4.72 (m/m)
2023/01/26 15:00:19

640x480 | original size		 31
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:10
X 5.15 (m/m)
2023/01/26 15:01:42

640x480 | original size		 32
ERIC-NT 60 cycle grey
Width Ratio:
10.00 1:10
X 5.05 (m/m)
2023/01/26 15:02:42

640x480 | original size
33
ERIC-NT 60 cycle grey
Width Ratio:
100.00 1:10
X 5.75 (m/m)
2023/01/26 15:03:51

640x480 | original size		 34
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.10 1:1
X -5.24 (m/m)
2023/01/26 15:20:12

640x480 | original size		 35
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.10 1:1
X -5.24 (m/m)
2023/01/26 15:22:30

640x480 | original size		 36
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.20 1:1
X -4.73 (m/m)
2023/01/26 15:24:44

640x480 | original size		 37
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:1
X -4.24 (m/m)
2023/01/26 15:26:44

640x480 | original size		 38
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:1
X -4.24 (m/m)
2023/01/26 15:27:20

640x480 | original size		 39
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:1
X -3.63 (m/m)
2023/01/26 15:29:00

640x480 | original size		 40
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:1
X -3.63 (m/m)
2023/01/26 15:30:56

640x480 | original size
41
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
100.00 1:1
X -3.33 (m/m)
2023/01/26 15:33:09

640x480 | original size		 42
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.05 1:2
X -2.73 (m/m)
2023/01/26 15:36:13

640x480 | original size		 43
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.10 1:2
X -2.24 (m/m)
2023/01/26 15:37:23

640x480 | original size		 44
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.20 1:2
X -1.73 (m/m)
2023/01/26 15:38:27

640x480 | original size		 45
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:2
X -1.24 (m/m)
2023/01/26 15:40:04

640x480 | original size		 46
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:2
X -1.24 (m/m)
2023/01/26 15:41:33

640x480 | original size		 47
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:2
X -1.24 (m/m)
2023/01/26 15:42:25

640x480 | original size		 48
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:2
X -0.73 (m/m)
2023/01/26 15:43:41

640x480 | original size
49
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:2
X -0.71 (m/m)
2023/01/26 15:44:37

640x480 | original size		 50
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
100.00 1:2
X -0.43 (m/m)
2023/01/26 15:46:07

640x480 | original size		 51
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.05 1:5
X 0.27 (m/m)
2023/01/26 15:50:13

640x480 | original size		 52
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.10 1:5
X 0.76 (m/m)
2023/01/26 15:51:32

640x480 | original size		 53
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.20 1:5
X 1.27 (m/m)
2023/01/26 15:54:15

640x480 | original size		 54
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.20 1:5
X 1.27 (m/m)
2023/01/26 15:55:03

640x480 | original size		 55
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:5
X 1.76 (m/m)
2023/01/26 16:07:56

640x480 | original size		 56
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:5
X 1.76 (m/m)
2023/01/26 16:08:30

640x480 | original size
57
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:5
X 2.22 (m/m)
2023/01/26 16:12:01

640x480 | original size		 58
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:5
X 2.16 (m/m)
2023/01/26 16:12:42

640x480 | original size		 59
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
100.00 1:5
X 2.76 (m/m)
2023/01/26 16:14:19

640x480 | original size		 60
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.10 1:10
X 3.76 (m/m)
2023/01/26 16:16:34

640x480 | original size		 61
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.10 1:10
X 3.76 (m/m)
2023/01/26 16:17:07

640x480 | original size		 62
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.10 1:10
X 3.76 (m/m)
2023/01/26 16:18:46

640x480 | original size		 63
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.20 1:10
X 4.26 (m/m)
2023/01/26 16:20:18

640x480 | original size		 64
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
0.20 1:10
X 4.27 (m/m)
2023/01/26 16:21:28

640x480 | original size
65
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:10
X 4.68 (m/m)
2023/01/26 16:22:58

640x480 | original size		 66
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
1.00 1:10
X 4.69 (m/m)
2023/01/26 16:23:33

640x480 | original size		 67
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:10
X 5.16 (m/m)
2023/01/26 16:24:14

640x480 | original size		 68
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:10
X 5.16 (m/m)
2023/01/26 16:24:41

640x480 | original size		 69
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
10.00 1:10
X 5.07 (m/m)
2023/01/26 16:25:27

640x480 | original size		 70
ERIC-NT 60 cycle white (KS-613)
Width (um) Ratio:
100.00 1:10
X 5.76 (m/m)
2023/01/26 16:26:28

640x480 | original size