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66 photos
ZEP520A-7 CP17,CP18 Mix test
Exposure 2023/01/25
GDSII
ZEP520A-7, 6000 rpm x 60s
Regulus8230 2023/01/28
Size in nm are NOT always correct, just for reference
1
DOSE: 95 SIZE: 600 nm
X/Y(mm) 2.59/0.473
2023/01/28 16:42:26

640x480 | original size		 2
DOSE: 95 SIZE: 600 nm
X/Y(mm) 2.59/0.473
2023/01/28 16:42:27

640x480 | original size		 3
DOSE: 90 SIZE: 600 nm
X/Y(mm) 0.58/0.499
2023/01/28 16:44:58

640x480 | original size		 4
DOSE: 90 SIZE: 600 nm
X/Y(mm) 0.58/0.499
2023/01/28 16:45:00

640x480 | original size
5
DOSE: 100 SIZE: 600 nm
X/Y(mm) 4.59/0.441
2023/01/28 16:45:53

640x480 | original size		 6
DOSE: 100 SIZE: 600 nm
X/Y(mm) 4.59/0.441
2023/01/28 16:46:33

640x480 | original size		 7
DOSE: 105 SIZE: 600 nm
X/Y(mm) 6.68/0.493
2023/01/28 16:48:17

640x480 | original size		 8
DOSE: 105 SIZE: 30 nm
X/Y(mm) 6.68/0.848
2023/01/28 16:49:49

640x480 | original size
9
DOSE: 105 SIZE: 30 nm
X/Y(mm) 6.68/0.852
2023/01/28 16:52:23

640x480 | original size		 10
DOSE: 105 SIZE: 30 nm
X/Y(mm) 6.68/0.847
2023/01/28 16:56:25

640x480 | original size		 11
DOSE: 105 SIZE: 30 nm
X/Y(mm) 6.68/0.847
2023/01/28 17:00:34

640x480 | original size		 12
DOSE: 105 SIZE: 30 nm
Measured: 20.009 25.135 22.324 24.805
X/Y(mm) 6.68/0.847
2023/01/28 17:03:17

640x480 | original size
13
DOSE: 90 SIZE: 40 nm
X/Y(mm) 0.67/0.866
2023/01/28 17:05:43

640x480 | original size		 14
DOSE: 90 SIZE: 30 nm
X/Y(mm) 0.67/0.869
2023/01/28 17:09:21

640x480 | original size		 15
DOSE: 90 SIZE: 30 nm
X/Y(mm) 0.67/0.869
2023/01/28 17:09:45

640x480 | original size		 16
DOSE: 90 SIZE: 30 nm
Measured: 17.354 17.354
X/Y(mm) 0.67/0.869
2023/01/28 17:10:32

640x480 | original size
17
DOSE: 90 SIZE: 40 nm
X/Y(mm) 0.67/0.856
2023/01/28 17:14:24

640x480 | original size		 18
DOSE: 90 SIZE: 40 nm
Measured: 39.152 37.169
X/Y(mm) 0.67/0.856
2023/01/28 17:14:52

640x480 | original size		 19
DOSE: 90 SIZE: 30 nm
X/Y(mm) 0.66/0.854
2023/01/28 17:16:18

640x480 | original size		 20
DOSE: 90 SIZE: 30 nm
X/Y(mm) 0.66/0.854
2023/01/28 17:17:06

640x480 | original size
21
DOSE: 90 SIZE: 30 nm
Measured: 14.218 13.556
X/Y(mm) 0.66/0.854
2023/01/28 17:17:38

640x480 | original size		 22
DOSE: 105 SIZE: 40 nm
X/Y(mm) 6.68/0.838
2023/01/28 17:18:41

640x480 | original size		 23
DOSE: 105 SIZE: 50 nm
X/Y(mm) 6.68/0.835
2023/01/28 17:21:34

640x480 | original size		 24
DOSE: 105 SIZE: 40 nm
X/Y(mm) 6.68/0.846
2023/01/28 17:24:47

640x480 | original size
25
DOSE: 105 SIZE: 40 nm
Measured: 22.153 24.137
X/Y(mm) 6.68/0.846
2023/01/28 17:25:37

640x480 | original size		 26
DOSE: 105 SIZE: 50 nm
X/Y(mm) 6.67/0.827
2023/01/28 17:28:43

640x480 | original size		 27
DOSE: 105 SIZE: 50 nm
Measured: 42.775 42.941 45.088
X/Y(mm) 6.67/0.827
2023/01/28 17:29:21

640x480 | original size		 28
DOSE: 105 SIZE: 100 nm
X/Y(mm) 6.68/0.740
2023/01/28 17:30:28

640x480 | original size
29
DOSE: 105 SIZE: 100 nm
X/Y(mm) 6.68/0.737
2023/01/28 17:31:54

640x480 | original size		 30
DOSE: 105 SIZE: 100 nm
X/Y(mm) 6.68/0.737
2023/01/28 17:32:44

640x480 | original size		 31
DOSE: 105 SIZE: 100 nm
Measured: 120.36 116.76
X/Y(mm) 6.68/0.737
2023/01/28 17:33:19

640x480 | original size		 32
DOSE: 105 SIZE: 110 nm
X/Y(mm) 6.68/0.726
2023/01/28 17:33:51

640x480 | original size
33
DOSE: 105 SIZE: 110 nm
X/Y(mm) 6.68/0.726
2023/01/28 17:34:57

640x480 | original size		 34
DOSE: 105 SIZE: 110 nm
Measured: 126.31 121.85
X/Y(mm) 6.68/0.726
2023/01/28 17:35:28

640x480 | original size		 35
DOSE: 105 SIZE: 110 nm
X/Y(mm) 6.68/0.726
2023/01/28 17:36:50

640x480 | original size		 36
DOSE: 105 SIZE: 110 nm
Measured: 136.70 126.79
X/Y(mm) 6.68/0.726
2023/01/28 17:37:22

640x480 | original size
37
DOSE: 105 SIZE: 120 nm
X/Y(mm) 6.68/0.715
2023/01/28 17:37:51

640x480 | original size		 38
DOSE: 105 SIZE: 120 nm
X/Y(mm) 6.68/0.715
2023/01/28 17:39:15

640x480 | original size		 39
DOSE: 105 SIZE: 120 nm
Measured: 141.88 136.92
X/Y(mm) 6.68/0.715
2023/01/28 17:39:48

640x480 | original size		 40
DOSE: 105 SIZE: 130 nm
X/Y(mm) 6.68/0.705
2023/01/28 17:40:08

640x480 | original size
41
DOSE: 105 SIZE: 130 nm
X/Y(mm) 6.68/0.705
2023/01/28 17:41:59

640x480 | original size		 42
DOSE: 105 SIZE: 130 nm
Measured: 157.96 148.06
X/Y(mm) 6.68/0.705
2023/01/28 17:42:22

640x480 | original size		 43
DOSE: 105 SIZE: 130 nm
X/Y(mm) 6.68/0.705
2023/01/28 17:44:58

640x480 | original size		 44
DOSE: 105 SIZE: 130 nm
Measured: 159.97 152.04
X/Y(mm) 6.68/0.705
2023/01/28 17:45:29

640x480 | original size
45
DOSE: 105 SIZE: 140 nm
X/Y(mm) 6.68/0.695
2023/01/28 17:45:43

640x480 | original size		 46
DOSE: 105 SIZE: 140 nm
X/Y(mm) 6.68/0.695
2023/01/28 17:47:04

640x480 | original size		 47
DOSE: 105 SIZE: 140 nm
X/Y(mm) 6.68/0.695
2023/01/28 17:47:29

640x480 | original size		 48
DOSE: 105 SIZE: 140 nm
Measured: 166.89 155.50
X/Y(mm) 6.68/0.695
2023/01/28 17:47:55

640x480 | original size
49
DOSE: 105 SIZE: 150 nm
X/Y(mm) 6.68/0.685
2023/01/28 17:48:17

640x480 | original size		 50
DOSE: 105 SIZE: 150 nm
X/Y(mm) 6.68/0.685
2023/01/28 17:49:33

640x480 | original size		 51
DOSE: 105 SIZE: 150 nm
Measured: 181.61 175.01
X/Y(mm) 6.68/0.685
2023/01/28 17:49:56

640x480 | original size		 52
DOSE: 105 SIZE: 160 nm
X/Y(mm) 6.68/0.674
2023/01/28 17:50:12

640x480 | original size
53
DOSE: 105 SIZE: 160 nm
X/Y(mm) 6.68/0.674
2023/01/28 17:51:57

640x480 | original size		 54
DOSE: 105 SIZE: 160 nm
X/Y(mm) 6.68/0.674
2023/01/28 17:53:29

640x480 | original size		 55
DOSE: 105 SIZE: 160 nm
Measured: 189.18 185.21
X/Y(mm) 6.68/0.674
2023/01/28 17:53:57

640x480 | original size		 56
DOSE: 105 SIZE: 170 nm
X/Y(mm) 6.68/0.666
2023/01/28 17:54:15

640x480 | original size
57
DOSE: 105 SIZE: 170 nm
X/Y(mm) 6.68/0.665
2023/01/28 17:56:00

640x480 | original size		 58
DOSE: 105 SIZE: 170 nm
Measured: 201.08 197.11
X/Y(mm) 6.68/0.665
2023/01/28 17:56:25

640x480 | original size		 59
DOSE: 105 SIZE: 180 nm
X/Y(mm) 6.68/0.654
2023/01/28 17:56:46

640x480 | original size		 60
DOSE: 105 SIZE: 180 nm
X/Y(mm) 6.68/0.653
2023/01/28 17:57:53

640x480 | original size
61
DOSE: 105 SIZE: 180 nm
Measured: 210.56 212.22
X/Y(mm) 6.68/0.653
2023/01/28 17:58:44

640x480 | original size		 62
DOSE: 105 SIZE: 180 nm
X/Y(mm) 6.68/0.653
2023/01/28 18:00:11

640x480 | original size		 63
DOSE: 105 SIZE: 180 nm
Measured: 209.46 208.91
X/Y(mm) 6.68/0.653
2023/01/28 18:01:36

640x480 | original size		 64
DOSE: 100 SIZE: 400 nm
X/Y(mm) 5.45/0.521
2023/01/28 16:24:26

640x480 | original size
65
DOSE: 100 SIZE: 400 nm
X/Y(mm) 5.45/0.521
2023/01/28 16:25:35

640x480 | original size		 66
DOSE: 100 SIZE: 400 nm
X/Y(mm) 5.45/0.521
2023/01/28 16:26:06

640x480 | original size