00_top-index.cgi 01/04 01/12 01/12g 01/17 01/19 01/20 01/24 01/25 01/25i 01/26 01/27 01/28 01/28x 01/31h 01/31z 02/01 02/06 02/06k 02/07k 02/09 02/14 02/21 02/23 02/26 03/01 03/01J 03/03-R 03/03-T 03/03-V 03/03-V2 03/09 03/10 03/10a 03/14 03/15 03/30 04/04 04/04d 04/04i 04/06 04/10 05/18 05/29 06/06 06/14 06/21 06/26 06/27 06/30 07/07 07/12 08/01 08/02 08/07 08/28 09/19 09/22 10/17 10/17-raw 10/17D 10/19 10/19p 10/20 10/25 10/27 10/27d 10/30 11/10 11/11 11/17 11/21 11/30 12/20 12/27
103 photos
Contrast curve exposure
(F7000S on 2023/01/17) HSQ 2% 5000 rpm -> 50 nm
Develop NMD-3 2.38%, 4 min
GDSII
Dektak
1
DOSE: 1421 SIZE: 1.6 um
X/Y(mm) -3.567/40.2
2023/02/01 15:34:56

640x480 | original size		 2
DOSE: 1421 SIZE: 1.6 um
X/Y(mm) -3.567/40.2
2023/02/01 15:34:59

640x480 | original size		 3
DOSE: 1421 SIZE: 0.05 um
X/Y(mm) -3.567/27.5
2023/02/01 15:36:24

640x480 | original size		 4
DOSE: 1289 SIZE: 0.05 um
X/Y(mm) -3.374/26.7
2023/02/01 15:37:32

640x480 | original size		 5
DOSE: 1421 SIZE: 0.05 um
X/Y(mm) -3.572/26.6
2023/02/01 15:39:13

640x480 | original size		 6
DOSE: 1421 SIZE: 0.05 um
X/Y(mm) -3.572/26.6
2023/02/01 15:41:24

640x480 | original size		 7
DOSE: 1421 SIZE: 0.05 um
Measured: 33.710
X/Y(mm) -3.572/26.6
2023/02/01 15:42:18

640x480 | original size		 8
DOSE: 1 SIZE: 0.05 um
X/Y(mm) -3.495/26.6
2023/02/01 15:42:54

640x480 | original size
9
DOSE: 1 SIZE: 0.05 um
X/Y(mm) -3.495/26.6
2023/02/01 15:43:20

640x480 | original size		 10
DOSE: 1 SIZE: 0.05 um
X/Y(mm) -3.495/26.6
2023/02/01 15:43:23

640x480 | original size		 11
DOSE: 1353 SIZE: 0.05 um
X/Y(mm) -3.420/26.6
2023/02/01 15:44:04

640x480 | original size		 12
DOSE: 1353 SIZE: 0.05 um
X/Y(mm) -3.420/26.6
2023/02/01 15:44:04

640x480 | original size		 13
DOSE: 1353 SIZE: 0.05 um
X/Y(mm) -3.420/26.6
2023/02/01 15:44:57

640x480 | original size		 14
DOSE: 1353 SIZE: 0.05 um
Measured: 29.765
X/Y(mm) -3.420/26.6
2023/02/01 15:45:07

640x480 | original size		 15
DOSE: 1353 SIZE: 0.05 um
X/Y(mm) -3.420/26.6
2023/02/01 15:45:31

640x480 | original size		 16
DOSE: 1353 SIZE: 0.05 um
Measured: 35.520
X/Y(mm) -3.420/26.6
2023/02/01 15:45:47

640x480 | original size
17
DOSE: 1353 SIZE: 0.05 um
X/Y(mm) -3.420/26.6
2023/02/01 15:46:13

640x480 | original size		 18
DOSE: 1353 SIZE: 0.05 um
X/Y(mm) -3.420/26.6
2023/02/01 15:46:14

640x480 | original size		 19
DOSE: 1289 SIZE: 0.05 um
X/Y(mm) -3.370/26.6
2023/02/01 15:47:22

640x480 | original size		 20
DOSE: 1289 SIZE: 0.05 um
Measured: 33.139
X/Y(mm) -3.370/26.6
2023/02/01 15:47:34

640x480 | original size		 21
DOSE: 1227 SIZE: 0.05 um
X/Y(mm) -3.321/26.6
2023/02/01 15:48:57

640x480 | original size		 22
DOSE: 1227 SIZE: 0.05 um
Measured: 30.758
X/Y(mm) -3.321/26.6
2023/02/01 15:49:10

640x480 | original size		 23
DOSE: 1227 SIZE: 0.05 um
X/Y(mm) -3.321/26.6
2023/02/01 15:49:28

640x480 | original size		 24
DOSE: 1169 SIZE: 0.05 um
X/Y(mm) -3.270/26.6
2023/02/01 15:51:29

640x480 | original size
25
DOSE: 1169 SIZE: 0.05 um
Measured: 30.478
X/Y(mm) -3.270/26.6
2023/02/01 15:51:50

640x480 | original size		 26
DOSE: 1169 SIZE: 0.05 um
X/Y(mm) -3.270/26.6
2023/02/01 15:52:05

640x480 | original size		 27
DOSE: 1169 SIZE: 0.05 um
X/Y(mm) -3.270/26.6
2023/02/01 15:52:54

640x480 | original size		 28
DOSE: 1169 SIZE: 0.05 um
Measured: 31.998 97.606
X/Y(mm) -3.270/26.6
2023/02/01 15:53:21

640x480 | original size		 29
DOSE: 1169 SIZE: 0.05 um
X/Y(mm) -3.270/26.6
2023/02/01 15:53:36

640x480 | original size		 30
DOSE: 1113 SIZE: 0.05 um
X/Y(mm) -3.222/26.6
2023/02/01 15:53:45

640x480 | original size		 31
DOSE: 1113 SIZE: 0.05 um
X/Y(mm) -3.221/26.6
2023/02/01 15:54:22

640x480 | original size		 32
DOSE: 1113 SIZE: 0.05 um
Measured: 29.315 104.63
X/Y(mm) -3.221/26.6
2023/02/01 15:54:44

640x480 | original size
33
DOSE: 1113 SIZE: 0.05 um
X/Y(mm) -3.221/26.6
2023/02/01 15:54:58

640x480 | original size		 34
DOSE: 8 SIZE: 0.05 um
X/Y(mm) -3.152/26.6
2023/02/01 15:55:11

640x480 | original size		 35
DOSE: 1060 SIZE: 0.05 um
X/Y(mm) -3.121/26.6
2023/02/01 15:55:19

640x480 | original size		 36
DOSE: 1060 SIZE: 0.05 um
X/Y(mm) -3.121/26.6
2023/02/01 15:55:49

640x480 | original size		 37
DOSE: 1060 SIZE: 0.05 um
Measured: 29.369 103.58
X/Y(mm) -3.121/26.6
2023/02/01 15:56:16

640x480 | original size		 38
DOSE: 1060 SIZE: 0.05 um
X/Y(mm) -3.121/26.6
2023/02/01 15:56:32

640x480 | original size		 39
DOSE: 1010 SIZE: 0.05 um
X/Y(mm) -3.072/26.6
2023/02/01 15:57:28

640x480 | original size		 40
DOSE: 1010 SIZE: 0.05 um
Measured: 26.417
X/Y(mm) -3.072/26.6
2023/02/01 15:57:41

640x480 | original size
41
DOSE: 1010 SIZE: 0.05 um
X/Y(mm) -3.072/26.6
2023/02/01 15:57:56

640x480 | original size		 42
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.022/26.6
2023/02/01 15:58:49

640x480 | original size		 43
DOSE: 962 SIZE: 0.05 um
Measured: 25.053
X/Y(mm) -3.022/26.6
2023/02/01 15:59:04

640x480 | original size		 44
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.022/26.6
2023/02/01 15:59:18

640x480 | original size		 45
DOSE: 916 SIZE: 0.05 um
X/Y(mm) -2.973/26.6
2023/02/01 15:59:27

640x480 | original size		 46
DOSE: 916 SIZE: 0.05 um
X/Y(mm) -2.974/26.6
2023/02/01 16:00:21

640x480 | original size		 47
DOSE: 916 SIZE: 0.05 um
Measured: 22.572
X/Y(mm) -2.974/26.6
2023/02/01 16:00:38

640x480 | original size		 48
DOSE: 916 SIZE: 0.05 um
X/Y(mm) -2.974/26.6
2023/02/01 16:00:53

640x480 | original size
49
DOSE: 872 SIZE: 0.05 um
X/Y(mm) -2.923/26.6
2023/02/01 16:01:02

640x480 | original size		 50
DOSE: 872 SIZE: 0.05 um
X/Y(mm) -2.923/26.6
2023/02/01 16:01:39

640x480 | original size		 51
DOSE: 872 SIZE: 0.05 um
Measured: 21.828 95.052
X/Y(mm) -2.923/26.6
2023/02/01 16:02:08

640x480 | original size		 52
DOSE: 872 SIZE: 0.05 um
X/Y(mm) -2.923/26.6
2023/02/01 16:02:23

640x480 | original size		 53
DOSE: 9 SIZE: 0.05 um
X/Y(mm) -2.860/26.6
2023/02/01 16:02:38

640x480 | original size		 54
DOSE: 872 SIZE: 0.05 um
X/Y(mm) -2.922/26.6
2023/02/01 16:02:50

640x480 | original size		 55
DOSE: 10 SIZE: 0.05 um
X/Y(mm) -2.819/26.6
2023/02/01 16:03:29

640x480 | original size		 56
DOSE: 831 SIZE: 0.05 um
X/Y(mm) -2.773/26.6
2023/02/01 16:03:38

640x480 | original size
57
DOSE: 831 SIZE: 0.05 um
X/Y(mm) -2.773/26.6
2023/02/01 16:04:19

640x480 | original size		 58
DOSE: 831 SIZE: 0.05 um
Measured: 19.419 92.982
X/Y(mm) -2.773/26.6
2023/02/01 16:04:38

640x480 | original size		 59
DOSE: 831 SIZE: 0.05 um
X/Y(mm) -2.773/26.6
2023/02/01 16:05:04

640x480 | original size		 60
DOSE: 831 SIZE: 0.05 um
X/Y(mm) -2.773/26.6
2023/02/01 16:05:06

640x480 | original size		 61
DOSE: 791 SIZE: 0.05 um
X/Y(mm) -2.723/26.6
2023/02/01 16:05:16

640x480 | original size		 62
DOSE: 791 SIZE: 0.05 um
X/Y(mm) -2.723/26.6
2023/02/01 16:05:44

640x480 | original size		 63
DOSE: 791 SIZE: 0.05 um
Measured: 122.37
X/Y(mm) -2.723/26.6
2023/02/01 16:06:02

640x480 | original size		 64
DOSE: 791 SIZE: 0.05 um
X/Y(mm) -2.724/26.6
2023/02/01 16:06:43

640x480 | original size
65
DOSE: 791 SIZE: 0.05 um
Measured: 36.512 29.766
X/Y(mm) -2.724/26.6
2023/02/01 16:07:05

640x480 | original size		 66
DOSE: 791 SIZE: 0.05 um
X/Y(mm) -2.724/26.6
2023/02/01 16:07:28

640x480 | original size		 67
DOSE: 791 SIZE: 0.05 um
X/Y(mm) -2.724/26.6
2023/02/01 16:07:29

640x480 | original size		 68
DOSE: 754 SIZE: 0.05 um
X/Y(mm) -2.673/26.6
2023/02/01 16:08:26

640x480 | original size		 69
DOSE: 754 SIZE: 0.05 um
X/Y(mm) -2.673/26.6
2023/02/01 16:08:29

640x480 | original size		 70
DOSE: 754 SIZE: 0.05 um
X/Y(mm) -2.673/26.6
2023/02/01 16:08:59

640x480 | original size		 71
DOSE: 754 SIZE: 0.05 um
X/Y(mm) -2.673/26.6
2023/02/01 16:09:05

640x480 | original size		 72
DOSE: 754 SIZE: 0.05 um
X/Y(mm) -2.673/26.6
2023/02/01 16:09:31

640x480 | original size
73
DOSE: 754 SIZE: 0.1 um
X/Y(mm) -2.673/29.6
2023/02/01 16:10:17

640x480 | original size		 74
DOSE: 754 SIZE: 0.1 um
X/Y(mm) -2.673/29.6
2023/02/01 16:10:21

640x480 | original size		 75
DOSE: 718 SIZE: 0.1 um
X/Y(mm) -2.613/29.6
2023/02/01 16:10:42

640x480 | original size		 76
DOSE: 718 SIZE: 0.1 um
X/Y(mm) -2.613/29.6
2023/02/01 16:10:45

640x480 | original size		 77
DOSE: 620 SIZE: 0.1 um
X/Y(mm) -2.411/29.6
2023/02/01 16:11:13

640x480 | original size		 78
DOSE: 620 SIZE: 0.1 um
X/Y(mm) -2.411/29.6
2023/02/01 16:11:15

640x480 | original size		 79
DOSE: 562 SIZE: 0.1 um
X/Y(mm) -2.310/29.6
2023/02/01 16:11:25

640x480 | original size		 80
DOSE: 562 SIZE: 0.1 um
X/Y(mm) -2.310/29.6
2023/02/01 16:12:16

640x480 | original size
81
DOSE: 562 SIZE: 0.1 um
Measured: 18.341 106.25
X/Y(mm) -2.310/29.6
2023/02/01 16:12:35

640x480 | original size		 82
DOSE: 562 SIZE: 0.1 um
X/Y(mm) -2.310/29.6
2023/02/01 16:13:04

640x480 | original size		 83
DOSE: 562 SIZE: 0.1 um
X/Y(mm) -2.310/29.6
2023/02/01 16:13:10

640x480 | original size		 84
DOSE: 562 SIZE: 0.4 um
X/Y(mm) -2.310/32.6
2023/02/01 16:13:50

640x480 | original size		 85
DOSE: 562 SIZE: 0.4 um
X/Y(mm) -2.310/32.6
2023/02/01 16:13:52

640x480 | original size		 86
DOSE: 510 SIZE: 0.4 um
X/Y(mm) -2.100/32.6
2023/02/01 16:14:16

640x480 | original size		 87
DOSE: 510 SIZE: 0.4 um
X/Y(mm) -2.100/32.6
2023/02/01 16:14:19

640x480 | original size		 88
DOSE: 463 SIZE: 0.4 um
X/Y(mm) -1.999/32.6
2023/02/01 16:14:29

640x480 | original size
89
DOSE: 463 SIZE: 0.4 um
X/Y(mm) -2.003/32.6
2023/02/01 16:15:14

640x480 | original size		 90
DOSE: 463 SIZE: 0.4 um
Measured: 267.47 369.83
X/Y(mm) -2.003/32.6
2023/02/01 16:15:37

640x480 | original size		 91
DOSE: 463 SIZE: 0.4 um
X/Y(mm) -2.003/32.6
2023/02/01 16:16:04

640x480 | original size		 92
DOSE: 463 SIZE: 0.4 um
X/Y(mm) -2.003/32.6
2023/02/01 16:16:10

640x480 | original size		 93
DOSE: 420 SIZE: 0.4 um
X/Y(mm) -1.902/32.6
2023/02/01 16:16:22

640x480 | original size		 94
DOSE: 24 SIZE: 0.4 um
X/Y(mm) -1.828/32.6
2023/02/01 16:16:56

640x480 | original size		 95
DOSE: 24 SIZE: 0.4 um
X/Y(mm) -1.828/32.6
2023/02/01 16:17:00

640x480 | original size		 96
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.026/26.7
2023/02/01 16:18:35

640x480 | original size
97
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.026/26.7
2023/02/01 16:18:37

640x480 | original size		 98
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.024/26.7
2023/02/01 16:19:37

640x480 | original size		 99
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.024/26.7
2023/02/01 16:19:39

640x480 | original size		 100
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.024/26.7
2023/02/01 16:20:37

640x480 | original size		 101
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.024/26.7
2023/02/01 16:20:39

640x480 | original size		 102
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.024/26.7
2023/02/01 16:22:42

640x480 | original size		 103
DOSE: 962 SIZE: 0.05 um
X/Y(mm) -3.024/26.7
2023/02/01 16:24:23

640x480 | original size