00_top-index.cgi 01/04 01/12 01/12g 01/17 01/19 01/20 01/24 01/25 01/25i 01/26 01/27 01/28 01/28x 01/31h 01/31z 02/01 02/06 02/06k 02/07k 02/09 02/14 02/21 02/23 02/26 03/01 03/01J 03/03-R 03/03-T 03/03-V 03/03-V2 03/09 03/10 03/10a 03/14 03/15 03/30 04/04 04/04d 04/04i 04/06 04/10 05/18 05/29 06/06 06/14 06/21 06/26 06/27 06/30 07/07 07/12 08/01 08/02 08/07 08/28 09/19 09/22 10/17 10/17-raw 10/17D 10/19 10/19p 10/20 10/25 10/27 10/27d 10/30 11/10 11/11 11/17 11/21 11/30 12/20 12/27
4 photos

ma-P-1275G Contrast curve 3000/1000 rpm

Si 20x20 m/m Sample
DWL66+ exposure: 2023/10/17
Head: 5 m/m Head
DekTak: 2023/10/17
By: Mizushima and Fujiwara
Resist: ma-P-1275G

rpm	sec	PAB	Focus	Filter	Power	Effective Power	thickness
3000	30	103 deg x 10 min	0 %	12.5 %	300 mW	37.5 mW	9.5 um
1000	30	103 deg x 10 min	0 %	25 %	300 mW	75 mW	20 um

Development 6 min NMD-W, Rinse DI x 3

10

3000 rpm, 38 mW
640x480 | original size

20
1000 rpm
640x480 | original size

30
640x480 | original size

40
640x480 | original size