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7 photos

Contrast Curve compensation trial part 5

Extract raw contrast curve (2023/10/17)
Fitting Trial (2023/10/19)

Date Time

DWL66+ 2023/10/27 09:30
Dektak 2023/10/27 09:50

sample

Si, small chip 525 um;

STL model

toyokura-slope-D2-lower-center-crossx2

conversion

stl unit

inv

mode

Head

Use Gray Value

n-over

1000

yes

lower

5m/m

lines	filename
1024	ma-P-1275-1krpm.2.gvt
256	ma-P-1275-1krpm.2.map

4

spin coat

material	rpm	sec	PAB	duration (recommended)
HMDS(OAP)	3000	30	110	30 (60) sec
ma-P-1275G	1000	30	103	10 min

DWL66+

Designs	Focus %	Intensity %	Laser Power mW	Filter %	LUT#2	Effective Power mW
mef_231025_5mm_gvt_1000_nover_4	0	100	300	25	katagiri.2.5mm.lut	75
mef_231025_5mm_gvt_1000_nover_4	0	100	150	25	katagiri.2.5mm.lut	37.5
mef_231025_5mm_gvt_1000_nover_4	0	100	75	25	katagiri.2.5mm.lut	19

Development

NMD-W (TMAH 2.38%) 5 min at 20 deg

Photos

10
640x480 | original size

20
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30
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40
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50
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60
640x480 | original size

70
640x480 | original size