| Spin Coat | |||
| 500 | 5 | 5 | |
| 3000 | 9 | 30 | the value 9 is important |
| Prebake | 95 | 2'30 | |
| PEB | 95 | 1'30 | |
| devel | SU-8 Developer | 2 min | |
| Rinse | IPA | x 2 | |
| Postbake | 120 | 3 min | |
| Effective Power | 70 mW | ||
| Develop at | Geneal Organic chamber | ||
05640x480 | original size |
07640x480 | original size |
10Feb 22 08:05:33 2024 640x480 | original size |
20Feb 21 13:34:26 2024 640x480 | original size |