Spin Coat | |||
500 | 5 | 5 | |
3000 | 9 | 30 | the value 9 is important |
Prebake | 95 | 2'30 | |
PEB | 95 | 1'30 | |
devel | SU-8 Developer | 2 min | |
Rinse | IPA | x 2 | |
Postbake | 120 | 3 min | |
Effective Power | 70 mW | ||
Develop at | Geneal Organic chamber |
![]() 640x480 | original size |
![]() 640x480 | original size |
![]() Feb 22 08:05:33 2024 640x480 | original size |
![]() Feb 21 13:34:26 2024 640x480 | original size |