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12 photos
2025/03/27-28 spin coat and exposure
OAP, JSR 7790G (3000rpm), thickness = 0.86um
DWL66+ 2018 405 nm, 5 m/m head, pneumatic AF
focus % x Laser Power matrix, Filter (5%)
NMD-3, one minutes
Cr 15 nm sputtering on i-Miller

0100 -10_85 X=47557999 Y=26912001 640x480 | original size	0110 -10_85 X=47557999 Y=26912001 640x480 | original size	0120 -10_90 X=52493999 Y=26889000 640x480 | original size	0130 -10_95 X=57472000 Y=26888000 640x480 | original size
0140 0_80 X=42507000 Y=31906000 640x480 | original size	0150 0_85 X=47499001 Y=3191099 640x480 | original size	0160 0_90 X=52486000 Y=31903999 640x480 | original size	0170 0_95 X=57464001 Y=31899009 640x480 | original size
0180 20_80 X=42457001 Y=41904999 640x480 | original size	0190 20_85 X=47455002 Y=41898998 640x480 | original size	0200 20_90 X=52452999 Y=41909000 640x480 | original size	0210 20_95 X=57453999 Y=41890999 640x480 | original size