[SemImageFile]
InstructName=SU8200
SemVersion=03-11
SDMVersion=
SerialNumber=8200-1693-01
DataNumber=Regulus 0143
SampleName=
Format=jpg
ImageName=+10_95.jpg
Directory=Z:\MITA_LAB\yinoue\250331DWL_JSR\20mm_pAF\
Date=2025/04/03
Time=10:43:36
Media=NE[DATA]
DataSize=1280x960
PixelSize=9.917908
SignalName=SE(UL)
DisplaySignalName=SE(UL)
SEDetSetting=
AcceleratingVoltage=5000 Volt
DecelerationVoltage=0 Volt
DecelerationMode=
Magnification=10004
WorkingDistance=18006.62 um
EmissionCurrent=10100 nA
LensMode=Normal
PhotoSize=1000
MagnificationDisplay=0
Vacuum=
MicronMarker=5000
SubMagnification=0
SubSignalName=
SpecimenBias=0 V
Condencer1=7000
ScanSpeed=Capture_Slow(20)
CaptureSpeed_Integration=
CalibrationScanSpeed=24
ImgEnhance=0
ColorMode=RGB Color
ColorPalette=
ScreenMode=Full Screen
Comment=
KeyWord1=
KeyWord2=
Condition=Vacc=5.0kV   Mag=x10.0k   WD=18.0mm
DataDisplayCombine=1
StageType=5
StagePositionX=42346001
StagePositionY=54159000
StagePositionR=0.792
StagePositionZ=18000000
StagePositionT=45
FocusDepth=1.0
DynamicFocus=0
TiltCompensation=0
RasterRotation=0.0
MagneticSample=OFF
EBIC_Value00=
EBIC_ValueFF=
EBIC_Polarity=
DriftCorrectionIntegration=0
LiveImgEnhance=0