[SemImageFile] InstructName=SU8200 SemVersion=03-11 SDMVersion= SerialNumber=8200-1693-01 DataNumber=Regulus 0143 SampleName= Format=jpg ImageName=-10_85.jpg Directory=Z:\MITA_LAB\yinoue\250331DWL_JSR\20mm_pAF\ Date=2025/04/03 Time=11:16:13 Media=NE[DATA] DataSize=1280x960 PixelSize=9.912953 SignalName=SE(UL) DisplaySignalName=SE(UL) SEDetSetting= AcceleratingVoltage=5000 Volt DecelerationVoltage=0 Volt DecelerationMode= Magnification=10009 WorkingDistance=18025.81 um EmissionCurrent=9800 nA LensMode=Normal PhotoSize=1000 MagnificationDisplay=0 Vacuum= MicronMarker=5000 SubMagnification=0 SubSignalName= SpecimenBias=0 V Condencer1=7000 ScanSpeed=Capture_Slow(20) CaptureSpeed_Integration= CalibrationScanSpeed=24 ImgEnhance=0 ColorMode=RGB Color ColorPalette= ScreenMode=Full Screen Comment= KeyWord1= KeyWord2= Condition=Vacc=5.0kV Mag=x10.0k WD=18.0mm DataDisplayCombine=1 StageType=5 StagePositionX=32215000 StagePositionY=44266998 StagePositionR=0.792 StagePositionZ=18000000 StagePositionT=45 FocusDepth=1.0 DynamicFocus=0 TiltCompensation=0 RasterRotation=0.0 MagneticSample=OFF EBIC_Value00= EBIC_ValueFF= EBIC_Polarity= DriftCorrectionIntegration=0 LiveImgEnhance=0