#!/usr/pkg/bin/perl # layer # 0 1st laer Silicon coarse Mark 1 # 1 1st layer Silicon 1 # 2 2nd layer label and resist 2 # 3 not used # 4 not used # 10 Fine (Field) Mark label - # 20 die frame # 30 corner label 2 # 31 global label A ..I 2 # 32 global labe 1 .. 12 2 use warnings; use strict; use GDS2; use Getopt::Std; my $VERSION = "2026-04-27 23:01"; push(@INC, "../Perl_GDSII_Tutorial/code"); push(@INC, "../vernier-J10/"); push(@INC, "."); require 'arc3.pm'; require 'text2gds.pm'; require 'vernier5.pm'; require 'LocalGlobalMarks.pm'; # ---------------------------------------------------------- # Dicing Mark L # ---------------------------------------------------------- sub WaferBoundary { my ($args) = @_; my ($layer) = $args -> { -layer }; my ($size) = $args -> { -size }; my ($gds2File) = $args -> { -gds2File }; my $name = sprintf("Wafer-L%03d-S%0d", $layer, $size/1000); $gds2File -> printBgnstr (-name => $name); my @COORD = arc3::arc({ -x => 0, -y => 0, -radius => $size, -polygon_count => 72, -start_angle => - 71.03 - 3, -end_angle => 180 + 71.03 - 3, -direction => 0, }); $gds2File -> printBoundary ( -xy => [ @COORD ], -layer => $layer, ); $gds2File -> printEndstr(); return $name; } sub ScribeL { my ($args) = @_; my ($LX) = $args -> { -lengthX }; # micro meter my ($LY) = $args -> { -lengthY }; # micro meter my ($W) = $args -> { -width }; # micro meter my ($G) = $args -> { -gap }; # micro meter my ($layer) = $args -> { -layer}; my ($gds2File) = $args -> { -gds2File}; my $name = sprintf("scribe-X%03d-Y%03d", $LX, $LY); $gds2File -> printBgnstr (-name => $name); $gds2File -> printBoundary ( -xy=> [ $G/2, $G/2, $G/2 + $LX, $G/2, $G/2 + $LX, $G/2 + $W, $G/2 + $W, $G/2 + $W, $G/2 + $W, $G/2 + $LY, $G/2, $G/2 + $LY, ], -layer=> $layer); $gds2File -> printBoundary ( -xy=> [ $LX + $G/2, -$G/2, 2 * $LX + $G/2, -$G/2, 2 * $LX + $G/2, -$G/2 - $W, $LX + $G/2, -$G/2 - $W ], -layer=> $layer); $gds2File -> printBoundary ( -xy=> [ -$G/2, $LY + $G/2, -$G/2, 2 * $LY + $G/2, -$G/2 - $W, 2 * $LY + $G/2, -$G/2 - $W, $LY + $G/2], -layer=> $layer); $gds2File -> printEndstr(); return $name; } # ---------------------------------------------------------- # Coarse Mark # ---------------------------------------------------------- sub CoarseMark { my ($args) = @_; my ($size) = $args -> {-size}; # um my ($width) = $args -> {-width}; # um my ($cross) = $args -> {-cross}; # um my $gds2File = $args -> {-gds2File}; my $name = sprintf("CoarseMark-%3.1f", $size); my $S = $size / 2; my $W = $width; my $W2 = $width / 2; my $C = $cross/ 2; $gds2File -> printBgnstr( -name => $name); $gds2File -> printBoundary ( -xy => [ -$S, -$S, -$S, $S, $S, $S, $S, -$S, -$S + $W, -$S, -$S + $W, -$S + $W, $S - $W, -$S + $W, $S - $W, $S - $W, -$S + $W, $S - $W, -$S + $W, $S - $W, -$S + $W, -$S ]); $gds2File -> printBoundary ( -xy => [ -$C, -$W2, -$W2, -$W2, -$W2, -$C, $W2, -$C, $W2, -$W2, $C, -$W2, $C, $W2, $W2, $W2, $W2, $C, -$W2, $C, -$W2, $W2, -$C, $W2, ]); $gds2File -> printEndstr(); return $name; } sub box10 { my ($args) = @_; my $gds2File = $args -> {-gds2File}; my $name = sprintf("box10"); $gds2File -> printBgnstr( -name => $name); $gds2File -> printBoundary( -xy => [ -5,-5, -5, 5, 5,5, 5, -5] ); $gds2File -> printEndstr(); return $name; } # Fine and Alignment set for each corner sub cornerMark { my ($args) = @_; my ($Aname) = $args -> {-Aname}; my ($Fname) = $args -> {-Fname}; my $gds2File = $args -> {-gds2File}; my $name = sprintf("cornerMark"); $gds2File -> printBgnstr( -name => $name); # Coarse # $gds2File -> printSref ( -name => $Aname, -xy =>[0,0]) ; # Fine my $shift = 400; foreach my $i ( 0..4) { $gds2File -> printSref ( -name => $Fname, -xy => [- $shift, $i * 100 - $shift ]); $gds2File -> printSref ( -name => $Fname, -xy => [ $i * 100 - $shift, -$shift ]); } $gds2File -> printSref ( -name => $Fname, -xy => [ 0, 0 ]); $gds2File -> printEndstr(); return $name; } # ---------------------------------------------------------- # H E L P # ---------------------------------------------------------- sub usage{ my ($args) = @_; my ($frame) = $args -> {-frame}; # um print STDERR < '>'. $gds_name); $gds2File -> printInitLib(-name=>'LibraryName', -uUnit => 0.00025, -dbUnit => 0.00025/1000000); ## ---------------------------------------------------- ## call two sub routine ## ---------------------------------------------------- my $scribe = ScribeL ({ -width => 20, -layer => 0, -lengthX => 100, -lengthY => 200, -gap => 120, -gds2File => $gds2File}); my $cornerMark = Marks::Combo({ -gds2File => $gds2File }); my $CoarseMark = Marks::GlobalMark({-width => 10, -length => 500, -gds2File => $gds2File}); my $LocalMark = Marks::LocalMark({-W => 0.5, -L => 10, -G => 1.5, -N => 2, -gds2File => $gds2File}); ## ---------------------------------------------------- ## master structure ## ---------------------------------------------------- my $oneUnitName = sprintf("OneUnit%02d", $F * 2/1000) ; my $WaferBoundary = WaferBoundary({ -gds2File => $gds2File, -layer => 10, -size => 50000}); $gds2File -> printBgnstr( -name => $oneUnitName); foreach my $P ( $C ) { ## , $X) { $gds2File -> printSref( -name => $cornerMark, -xy => [ $P, $P] ); $gds2File -> printSref( -name => $cornerMark, -xy => [-$P, $P], -angle => 90 ); $gds2File -> printSref( -name => $cornerMark, -xy => [-$P,-$P], -angle => 180 ); $gds2File -> printSref( -name => $cornerMark, -xy => [ $P,-$P], -angle => 270 ); $gds2File -> printSref( -name => $CoarseMark, -xy => [ $P, $P] ); $gds2File -> printSref( -name => $CoarseMark, -xy => [-$P,-$P]); # $gds2File -> printSref( -name => $CoarseMark, -xy => [-$P, 0]); $gds2File -> printSref( -name => $CoarseMark, -xy => [ $P, 0]); # $gds2File -> printSref( -name => $CoarseMark, -xy => [ 0, -$P]); $gds2File -> printSref( -name => $CoarseMark, -xy => [ 0, $P]); } #$gds2File -> printSref( -name => $bigFrame, -xy => [0,0]); #$gds2File -> printSref( -name => $smallFrame, -xy => [0,0]); # ----------------------------------------------------- # place scribe mark # ----------------------------------------------------- $gds2File -> printSref( -name => $scribe, -xy => [ -$frame, -$frame]); $gds2File -> printSref( -name => $scribe, -xy => [ $frame, -$frame], -angle=> 180, -reflect=> 1); $gds2File -> printSref( -name => $scribe, -xy => [ $frame, $frame], -angle=> 180); $gds2File -> printSref( -name => $scribe, -xy => [ -$frame, $frame], -reflect => 1); #$gds2File -> printSref( -name => $Vertical, -xy => [0,0]); # ----------------------------------------------------- # place external boundary # ----------------------------------------------------- $gds2File -> printBoundary (-xy => [ $F, $F, -$F, $F, -$F, -$F, $F, -$F], -layer => 20); my $S = 10000; # span/2 my $s = 10000/3; # span / $count $gds2File -> printAref(-name => 'vernierx3', -columns => 3, -rows => 3, -xy => [ -$S + $s, -$S + $s, $S + $s, -$S + $s, -$S + $s, $S + $s, ]); my $charIndex = 0; foreach my $y ( -1, 0, 1) { foreach my $x ( -1, 0, 1) { text2gds::text_flat( $x * 6666.666 + 0.9 , $y * 6666.666, 31, 0.05, chr($charIndex++ + 0x41), $gds2File); } } $gds2File -> printEndstr(); my @PLACEMENT = ( [ qw( 0 1 1 0 ) ], [ qw( 1 1 1 1 ) ], [ qw( 1 1 1 1 ) ], [ qw( 0 1 1 0 ) ], ); #print STDERR join(':', qw( 0 1 0 1))."\n"; my $bigFrame = vernier::Frame_4x3({ -gds2File => $gds2File, -frame_sizeX => 400, -frame_sizeY => 300, -width => 20}); my $smallFrame = vernier::Frame_4x3({ -gds2File => $gds2File, -frame_sizeX => 40, -frame_sizeY => 30, -width => 2}); vernier::vernierx3({ -gds2File => $gds2File, -smallFrame => $smallFrame, -bigFrame => $bigFrame }); my($offsetX,$offsetY) = (-30000, -30000); $gds2File -> printBgnstr( -name => 'Wafer'); my $dieIndex = 1; foreach my $y ( 0 .. $#PLACEMENT) { # print STDERR __LINE__. ' ' . $y. " "; my @ROW = $PLACEMENT[$y]-> [0]; # not used for now foreach my $x ( 0 .. 3) { my $bit = $PLACEMENT[$y] -> [$x]; my $XXX = $x * 20000 - 30000; my $YYY = $y * 20000 - 30000; if ($bit == 1 ) { $gds2File -> printSref( -name => $oneUnitName, -xy => [$x * 20000 + $offsetX, $y * 20000 + $offsetY]); my $stringA = sprintf(" %d %d %s", $x - 2, $y - 2 , 'A'); text2gds::text_flat( -9800 + $XXX, -9800 + $YYY, 30, 5, $stringA, $gds2File); my $stringB = sprintf(" %d %d %s", $x - 2, $y - 2 , 'B'); text2gds::text_flat( 9800 + $XXX, -9800 + $YYY, 30, 5, $stringB, $gds2File); my $stringC = sprintf(" %d %d %s", $x - 2, $y - 2 , 'C'); text2gds::text_flat( 9800 + $XXX, 9800 + $YYY, 30, 5, $stringC, $gds2File); my $stringD = sprintf(" %d %d %s", $x - 2, $y - 2 , 'D'); text2gds::text_flat( -9800 + $XXX, 9800 + $YYY, 30, 5, $stringD, $gds2File); foreach my $xx ( -1, 0, 1 ){ foreach my $yy ( -1, 0, 1 ){ text2gds::text_flat( $XXX + $xx * 6666.67 - 0.9, $YYY + $yy * 6666.67, 32, 0.05 , $dieIndex, $gds2File); } } $dieIndex++ } } } $gds2File -> printSref ( -name => $WaferBoundary, -xy => [0,0]); $gds2File -> printEndstr(); $gds2File -> printEndlib(); print $gds_name,"\n"; # trick to use klayout `perl AlignmentMark2` }; # ----------------------------------------------------- # call sub main( ) # ----------------------------------------------------- main (); __END__ ;; ----- eval-region stuff (require 'time-stamp) (add-hook 'write-file-hooks 'time-stamp) (setq time-stamp-active t) ;; (setq time-stamp-time-zone "UTC") (setq time-stamp-time-zone nil) (setq time-stamp-format "%Y-%02m-%02d %02H:%02M"); (setq time-stamp-start "$VERSION = \"") ; (setq time-stamp-end "\"") ; (setq time-stamp-line-limit 20) ; ; default is 8