Read a struct named sleeve-320-0.050 which contains the layers:

and the cells:
:SREF(SqSIPHA0W50nm), SREF(SqSIPHA70W50nm), SREF(SqSIPHA55W50nm), SREF(SqSIPHA35W50nm), SREF(SqSIPHA20W50nm), SREF(SqSIPHA0W50nm), SREF(SqSIPHA70W50nm), SREF(SqSIPHA55W50nm), SREF(SqSIPHA35W50nm), SREF(SqSIPHA20W50nm), SREF(SqSIPHA0W50nm), SREF(SqSIPHA70W50nm), SREF(SqSIPHA55W50nm), SREF(SqSIPHA35W50nm), SREF(SqSIPHA20W50nm), SREF(SqSIPHA0W50nm), SREF(SqSIPHA70W50nm), SREF(SqSIPHA55W50nm), SREF(SqSIPHA35W50nm), SREF(SqSIPHA20W50nm), SREF(SqSIPHA0W50nm), 

Read a struct named HoleSIPH320nm-0.05 which contains the layers:

and the cells:
:SREF(HoleSIPH220nm), SREF(sleeve-320-0.050), 

Read a struct named sleeve-320-0.100 which contains the layers:

and the cells:
:SREF(SqSIPHA0W100nm), SREF(SqSIPHA60W100nm), SREF(SqSIPHA30W100nm), SREF(SqSIPHA0W100nm), SREF(SqSIPHA60W100nm), SREF(SqSIPHA30W100nm), SREF(SqSIPHA0W100nm), SREF(SqSIPHA60W100nm), SREF(SqSIPHA30W100nm), SREF(SqSIPHA0W100nm), SREF(SqSIPHA60W100nm), SREF(SqSIPHA30W100nm), SREF(SqSIPHA0W100nm), 

Read a struct named HoleSIPH320nm-0.10 which contains the layers:

and the cells:
:SREF(HoleSIPH110nm), SREF(sleeve-320-0.100), 

Read a struct named HoleSIPH110nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named HoleSIPH220nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA0W50nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA0W100nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA20W50nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA30W100nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA35W50nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA55W50nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA60W100nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named SqSIPHA70W50nm which contains the layers:
no. 18, type 0,
and the cells:
:BOUNDARY, 

Read a struct named top which contains the layers:

and the cells:
:SREF(HoleSIPH320nm-0.10), SREF(HoleSIPH320nm-0.05),