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[SemImageFile]

InstructName=SU8200

SemVersion=03-11

SDMVersion=

SerialNumber=8200-1693-01

DataNumber=Regulus 0010

SampleName=

Format=jpg

ImageName=goto-500n_0010.jpg

Directory=Z:\MITA_LAB\fujiwara\

Date=2019/12/27

Time=17:03:25

Media=NE[DATA]

DataSize=1280x960

PixelSize=1.653646

SignalName=SE(UL)

DisplaySignalName=SE(UL)

SEDetSetting=

AcceleratingVoltage=1000 Volt

DecelerationVoltage=0 Volt

DecelerationMode=

Magnification=60000

WorkingDistance=7975.69 um

EmissionCurrent=8200 nA

LensMode=Normal

PhotoSize=1000

MagnificationDisplay=0

Vacuum=

MicronMarker=500

SubMagnification=0

SubSignalName=

SpecimenBias=0 V

Condencer1=5000

ScanSpeed=Slow4

CaptureSpeed_Integration=

CalibrationScanSpeed=10

ImgEnhance=0

ColorMode=Grayscale

ColorPalette=

ScreenMode=Full Screen

Comment=

KeyWord1=

KeyWord2=

Condition=Vacc=1.0kV   Mag=x60.0k   WD=8.0mm

DataDisplayCombine=1

StageType=5

StagePositionX=21784000

StagePositionY=37245998

StagePositionR=359.307

StagePositionZ=8000000

StagePositionT=0

FocusDepth=1.0

DynamicFocus=0

TiltCompensation=0

RasterRotation=0.0

MagneticSample=OFF

EBIC_Value00=

EBIC_ValueFF=

EBIC_Polarity=

DriftCorrectionIntegration=0

LiveImgEnhance=0
(拡大縮少)