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0050 0100 0150 0200 縮少

Photo of the pattern for contrast curve

Stiched image by OLS5000 (5X)

HSQ: 3000 rpm, 220 nm, PreBake 150 deg x 2 min, Development: NWD-W, 4 minutes, at 23.0 degree

9 x 9 x (5X), took some 30 mins to scan, actual geometry is some 21 x 21 m/m

Line and Space measures 64 / 64 (um)

basic dose range set as 0.5 to 15.99 verically

dose ratio 35/40/45/50 from left to the right

resulting dose range: 17.5 to 560 (35, to the left)

Ratio 35 40 4550
Max 560640 720800
Min 17.5 20 22.525

The left most column is scanned by DekTak

Each four pair is made up by two columns, one on the left: for DekTak recognition, the right: for true log scale (dose/distance) for OLS5000 scanning, but I could not get profile image from this yet

(拡大縮少)