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論文

論文誌/Journal and Magazines

  1. Naoto Usami, Etsuko Ota, Akio Higo, Takeshi Momose, and Yoshio Mita, "Drop-in test structure to evaluate residual stress in conformally grown films," IEEE Transactions on Semiconductor Manufacturing, early access, (2021) doi: 10.1109/TSM.2021.3082905
  2. Gilgueng Hwang, Christophe David, Alisier Paris, Dominique Decanini, Ayako Mizushima, and Yoshio Mita, "Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications," early access, (2021) doi: 10.1109/TSM.2021.3082902
  3. Norihiro Miyazawa, Naoto Usami, Haibin Wang, Takaya Kubo, Hiroshi Segawa, Takahito Takeda, Masaki Kobayashi, Yoshio Mita, and Akio Higo, "Improvement of ZnO/Si Heterojunctions with a Coaxial Circular Transmission Line Model Applicable to both Ohmic and Schottky," IEEE Transactions on Semiconductor Manufacturing, early access, (2021) doi: 10.1109/TSM.2021.3083069
  4. Gilgueng Hwang, Ayako Mizushima, Eric Lebrasseur, Kei Misumi, Naoto Usami, Akio Higo, and Yoshio Mita, "Mobile microrobotic cleaner in microfluidics," Sensors & Actuators: A. Physical, in press, 2020 (2020.12) doi: 10.1016/j.sna.2020.112502
  5. D. Decanini, Abdelmounaim Harouri, Yoshio Mita, Beomjoon Kim, Gilgueng Hwang, “3D micro fractal pipettes for capillary based robotic liquid handling”, Review of Scientific Instruments, 91, 086104. (2020.08) doi: 10.1063/5.0018456
  6. Kuniaki Konishi, Daisuke Akai, Yoshio Mita, Makoto Ishida, Junji Yumoto, and Makoto Kuwata-Gonokami*, "Circularly polarized vacuum ultraviolet coherent light generation using a square lattice photonic crystal nanomembrane," Optica, Vol. 7, Issue 8, pp. 855-863, 2020 (2020.07) doi: 10.1364/OPTICA.393816
  7. Y.Kamiya, T.Miyoshi, H.Iwase, T.Inada, A.Mizushima, Y.Mita, K.Shimazoe, H.Tanaka, I.Kurachi, Y.Arai, "Development of a neutron imaging sensor using INTPIX4-SOI pixelated silicon devices," Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment (NIMA), in press (2020.07) doi: 10.1016/j.nima.2020.164400
  8. Kuniaki Konishi, Daisuke Akai, Yoshio Mita, Makoto Ishida, Junji Yumoto, and Makoto Kuwata-Gonokami, "Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes," APL Photonics 5, 066103 (2020) doi: 10.1063/5.0008568
  9. R. Ranga Reddy, Yuki Okamoto, and Yoshio Mita, "An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces," in IEEE Transactions on Semiconductor Manufacturing, vol. 33, no. 2, pp. 187-195, May 2020, doi: 10.1109/TSM.2020.2982659
  10. Yuki Okamoto, Hiroyuki Ryoson, Koji Fujimoto, Takayuki Ohba, Yoshio Mita, "On-Chip CMOS-MEMS-Based Electroosmotic Flow Micropump Integrated With High-Voltage Generator," Journal of Microelectromechanical Systems, vol.29, Issue 1, pp.86-94, 2020 (2020.02) doi: 10.1109/JMEMS.2019.2953290
  11. Naoto Usami, Etsuko Ota, Akio Higo, Takeshi Momose, Yoshio Mita,"Area-selective Cu film growth on TiN and SiO2 by supercritical fluid deposition," IEEJ Transactions on Sensors and Micromachines, vol. 140, No. 1, pp.31-38, 2020 (2020.01) doi: 10.1541/ieejsmas.140.31
  12. Yudai Takeshiro, Naoto Usami, Yuki Okamoto, Takeaki Takada, Akio Higo, Rimon Ikeno, Nobuei Washizu, Kunihiro Asada, Yoshio Mita, "A Device for Localized Measurement of Small Particles with Electrode-Integrated Small Pores,"IEEJ Transactions on Sensors and Micromachines, Vol.139, No.8, pp.271-276 (2019.08) doi: 10.1541/ieejsmas.139.271
  13. Ranga Reddy, Keisuke Komeda, Yuki Okamoto, Eric Lebrasseur, Akio Higo, Yoshio Mita, "A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring," Sensors and Actuators A: Physical, Vol.295, pp.1-10 (2019. 05) doi: 10.1016/j.sna.2019.05.036
  14. Akio Higo, Tomoki Sawamura, Makoto Fujiwara, Eric Lebrasseur, Ayako Mizushima, Etsuko Ota, Yoshio Mita, "Experimental Comparison of Rapid Large-area Direct Electron Beam Exposure Methods with Plasmonic Devices," Sensors and Materials, Vol.31, No.8, pp.2511-2525, 2019 (2019.05) doi: 10.18494/SAM.2019.2443
  15. Naoto Usami, Etsuko Ota, Takeshi Momose, Akio Higo, Yoshio Mita, "Influence of Pretreatment on Adhesion Quality of Supercritical-fluid-deposited Cu Film on Si," Sensors and Materials, Vol.31, No.8, pp.2481-2496, 2019 (2019.05) doi: 10.18494/SAM.2019.2316
  16. Ken Saito, Daniel S. Contreras, Yudai Takeshiro, Yuki Okamoto, Satoshi Hirao, Yuya Nakata, Taisuke Tanaka, Satoshi Kawamura, Minami Kaneko, Fumio Uchikoba, Yoshio Mita, Kristofer S. J. Pister, "Study on Electrostatic Inchworm Motor Device for a Heterogeneous Integrated Microrobot System," Transactions of The Japan Institute of Electronics Packaging, vol. 12, pp. E18-009-1-E18-009-7 (2019. 04) doi: 10.5104/jiepeng.12.E18-009-1
  17. Kentaro Yamada, Julien Grand, Yuki Okamoto, Rangareddygari Ranga Reddy, Matthieu Denoual, Svetlana Mintova, Agnès Tixer-Mita and Yoshio Mita, "Impact Test for Gas Sensing Using Large Particle Size Zeolite," IEEJ Transactions on Sensors and Micromachines, vol. 138, no. 9, 2018 (2018.09) doi: 10.1541/ieejsmas.138.430
  18. Yuki Okamoto, Yoshio Mita, "A Review on Increasing of Breakdown Voltage of Standard CMOS LSI Circuits by MEMS Post-Process," IEEJ Transactions on Sensors and Micromachines, 2018 (2018. 07) doi: 10.1541/ieejsmas.138.319
  19. Akio Higo, Yoshio Mita, Haibin Wang, Takaya Kubo, Hiroshi Segawa, Naoto Usami, Yuki Okamoto, Kentaro Yamada, Yudai Takeshiro, and Masakazu Sugiyama, "Fabrication of PbS QD/Silicon Hybrid Infrared Photodiode for LSI Platform," IEEJ Transactions on Sensors and Micromachines, vol. 138, no. 7, pp. 307-311, 2018 (2018.07) doi: 10.1541/ieejsmas.138.307
  20. Mathieu Pouliquen, Matthieu Denoual, Corentin Jorel, Constantin Radu, Didier Robbes, J Grand, H Awala, S Mintova, M Harnois, O de Sagazan, S Inoue, Eric Lebrasseur, Kentaro Yamada, Yuki Okamoto, Agnès Mita-Tixier, and Yoshio Mita, "Self-identification algorithm for zeolite-based thermal capacity gas sensor," Microsystem Technologies, 2018 (2018.05) doi: 10.1007/s00542-018-3883-5
  21. Yuki Okamoto, Hiroaki Takehara, Koji Fujimoto, Takanori Ichiki, Takayuki Ohba, and Yoshio Mita, "On-Chip High-Voltage Charge Pump with MEMS Post-Processed Standard 5-V CMOS on SOI for Electroosmotic Flow Micropumps," IEEE Electron Device Letters, Vol. 39, Issue 6, pp. 851-854, 2018 (2018.04) doi: 10.1109/LED.2018.2829925
  22. Yoshio Mita, Naoyuki Sakamoto, Naoto Usami, Antoine Frappe, Akio Higo, Bruno Stefanelli, Hidehisa Shiomi, Julien Bourgeois, Andreas Kaiser, "Microscale ultrahigh-frequency resonant wireless powering for capacitive and resistive MEMS actuators," Sensors & Actuators: A. Physical, Vol. 275, no. 1, pp. 75-87, 2018 (2018.04) doi: 10.1016/j.sna.2018.03.020.
  23. Daigo Terutsuki, Hiefumi Mitsuno, Takeshi Sakurai, Yuki Okamoto, Agnes Tixier-Mita, Hiroshi Toshiyoshi, Yoshio Mita, Ryohei Kanzaki, "Increasing cell-device adherence using cultured insect cells for receptor-based biosensors," Royal Society Open Science, Vol. 5, No. 3, March, 2018 (2018.03) doi: 10.1098/rsos.172366
  24. Yoshio Mita, Atsushi Hirakawa, Bruno Stefanelli, Isao Mori, Yuki Okamoto, Satoshi Morishita, Masanori Kubota, Eric Lebrasseur, Andreas Kaiser, "Progress and opportunities in high-voltage microactuator powering technology towards one-chip MEMS," Japanese Journal of Applied Physics, 2018.3.15 (2018.03) doi: 10.7567/JJAP.57.04FA05
  25. Ngyen Ngoc Mai-Khanh, Shigeru Nakajima, Tetsuya Iizuka, Yoshio Mita and Kunihiro Asada, "Noninvasive Localization of IGBT Faults by High-Sensitivity Magnetic Probe With RF Stimulation," IEEE Transactions on Instrumentation and Measurement, Vol. 67, Issue 4, pp. 745-753, 2018 (2018.4) doi: 10.1109/TIM.2017.2789038
  26. Yuki Okamoto, Yukiya Tohyama, Shunsuke Inagaki, Mikio Takiguchi, Tomoki Ono, Eric Lebrasseur, and Yoshio Mita, "High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements," Japanese Journal of Applied Physics, Vol. 57, No. 4S, p.04FC03, 2018 (2018. 03) doi: 10.7567/JJAP.57.04FC03
  27. Yuki Okamoto, Yoshio Mita, "Integrated 0–30 V switching driver circuit fabricated by mesa isolation postprocess of standard 5 V CMOS LSI for MEMS actuator applications," Microsystem Technologies, Vol 24, No. 1, pp.503-510, 2018 (2018. 1) doi: 10.1007/s00542-017-3416-7
  28. Yoshio Mita, and Yoshihiro Kawahara, "15-year educational experience on autonomous electronic information devices by flipped classroom and try-by-yourself methods," IET Circuits, Devices and Systems, Vol. 11, No. 4, pp.321-329, 2017 (2017.6) doi: 10.1049/iet-cds.2016.0406
  29. Masaya Takasaki, Ryutaro Chida, Shota Chino, Satoshi Morishita, Yuji Ishino, Kota Hosaka, Yoshio Mita, and Takeshi Mizuno, "Structure for Ultrasonic Suspension Gap Pressure Sensor," Sensors and Materials, Vol. 29, No. 6, pp.805-816, 2017 (2017.5) doi: 10.18494/SAM.2017.1471
  30. Matthieu Denoual, Didier Robbes, Shu Inoue, Yoshio Mita, Julien Grand, Hussein Awala, and Svetlana Mintova, "Thermal resonant zeolite-based gas sensor," Sensor and Actuator B: Chemical, Vol. 245, pp.179-182 2017 (2017.4) doi: 10.1016/j.snb.2017.01.131
  31. Yuki Okamoto, Eric Lebrasseur, Isao Mori, Frédéric Marty, Yoshio Mita, "Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis," IEEE Transactions on Semiconductor Manufacturing, Vol. 30, Issue: 3, pp.201-208, 2017 (2017.3) doi: 10.1109/TSM.2017.2694845
  32. Yoshio Mita, Eric Lebrasseur, Yuki Okamoto, Frédéfic Marty, Ryota Setoguchi, Kentaro Yamada, Isao Mori, Satoshi Morishita, Yoshiaki Imai, Kota Hosaka, Atsushi Hirakawa, Shu Inoue, Masanori Kubota and Matthieu Denoual, "Opportunities of CMOS-MEMS integration through LSI foundry and open facility," Japanese Journal of Applied Physics, Vol. 56, No. 6S1, p. 06GA03, 2017 (2017.2) doi: 10.7567/JJAP.56.06GA03
  33. Isao Mori, Yuki Okamoto, Yoshio mita, "A scalable, optically-driven, high-voltage switch for remote MEMS device operation fabricated with a standard CMOS process," IEICE Electronics Express, Vol.14, no.3, p.20171174, (2017.1) doi: 10.1587/elex.14.20161174
  34. Rimon Ikeno, Satoshi Maruyama, Yoshio Mita, Makoto Ikeda, and Kunihiro Asada, "Electron beam lithography with character projection technique for high-throughput exposure with line-edge quality control," Journal of Micro/Nanolithography, MEMS, and MOEMS, 15(3), 31606,2016. (2016.5) doi: 10.1117/1.JMM.15.3.031606
  35. Wenjun Xia, Yoshio Mita and Tadashi Shibata "A Nearest Neighbor Classifier Employing Critical Boundary Vectors for Efficient On-Chip Template Reduction," IEEE Transactions on Neural Networks and Learning Systems , vol.27, no.5, pp.1094-1107 (2016.4) doi: 10.1109/TNNLS.2015.2437901
  36. Shu Inoue, Matthieu Denoual, Hussein Awala, Julien Grand, Svetlana Mintova, Agnes Tixier-Mita and Yoshio Mita, "Characterization of Zeolite-trench-embedded micro cantilevers with CMOS strain-gauge for integrated gas sensor applications," Japanese Journal of Applied Physics, Vol.55, no.4S, Apr., (2016.3) doi: 10.7567/JJAP.55.04EF14
  37. Isao Mori, Eric Lebrasseur, and Yoshio Mita, "Discharging-phototransistor-integrated high-voltage Si photovoltaic cells for fast driving demonstration of an electrostatic MEMS actuator by wavelength modulation," Japanese Journal of Applied Physics, Vol. 55, No.4S, p.04EF12 March (2016.2) doi: 10.7567/JJAP.55.04EF12
  38. Isao Mori, Masanori Kubota, Eric Lebrasseur, and Yoshio Mita, "On-chip High-voltage Silicon Photovoltaic Cell Array Made by a CMOS Post-processed Device Isolation Method for Driving a MEMS Actuator in a Remote Manner," IEEJ Transactions on Sensors and Micromachines, Vol. 136, No.2, pp.24-30 February (2016.1) doi: 10.1541/ieejsmas.136.24
  39. Agnès Tixier-Mita, Isao Mori, Takuya Takahashi, Olivier Français, Bruno Le Pioufle, Yoshio Mita, and Hiroshi Toshiyoshi, "Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.," IEEJ Transactions on Sensors and Micromachines, Vol. 134, No. 10, pp. 320-325, (2014.2) doi: 10.1541/ieejsmas.134.320
  40. Ya-Lun Ho, Li-Cung Huang, Eric Lebrasseur, Yoshio Mita and Jean-Jacques Delaunay, "Independent light-trapping cavity for ultra-sensitive plasmonic sensing," Applied Physics Letters, 105, 061112 (2014.1) doi: 10.1063/1.4893275
  41. M Denoual, D Brouard, A Veith, O de Sagazan, M Pouliquen, P Attia, E Lebrasseur, Y Mita and G Allegre, “A heat balanced sigma-delta uncooled bolometer”, Meas. Sci. Technol. 25 (2014) 065101 (8pp). (2014.04) doi: 10.1088/0957-0233/25/6/065101
  42. Julien Malapert, Satoshi Morishita, Manabu Ataka, Hiroyuki Fujita, Dominique Collard and Yoshio Mita, "Power Regulated Thermal Actuator based on UV-Patterned Polyimides for Ciliary Motion System," IEEJ Transactions on Sensors and Micromachines, Vol.133, No.3, pp.77-84 (2013) doi: 10.1541/ieejsmas.133.77
  43. Masanori Kubota, Yoshio Mita, and Masakazu Sugiyama, "Silicon sub-micron-gap deep trench Pirani vacuum gauge for operation at atmospheric pressure," J. Micromech. Microeng. 21 045034 (2011.3) doi: 10.1088/0960-1317/21/4/045034
  44. Y. Mita, Y. Li, M. Kubota, S. Morishita, W. Parkes, L.I. Haworth, B.W. Flynn, J.G. Terry, T.-B. Tang, A.D. Ruthven, S. Smith and A.J. Walton, "Demonstration of a wireless driven MEMS pond skater that uses EWOD technology," Journal of Solid-State Electronics, Vol. 53 pp. 798-802 (2009.05) doi: 10.1016/j.sse.2009.02.020
  45. Yifan Li, Yoshio Mita, Leslie I. Haworth, William Parkes, Masanori Kubota, Anthony J. Walton, "Test Structure for Characterizing Low Voltage Coplanar EWOD System," IEEE Transactions on Semiconductor Manufacturing, IEEE Transactions, Vol. 22, No. 1, pp. 88-95 (2009.02) doi: 10.1109/TSM.2008.2010737
  46. Ryoichi Ohigashi, Katsunori Tsuchiya, Yoshio Mita, and Hiroyuki Fujita, "Electric Ejection of Viscous Inks From MEMS Capillary Array Head for Direct Drawing of Fine Patterns," Journal of Microelectromechanical Systems, Vol. 17, No.2, pp.272-277 (2008.04) doi: 10.1109/JMEMS.2007.911374
  47. Kenichiro Hirose, Yoshio Mita, Yoshiaki Imai, Frederic Marty, Tarik Bourouina, Kunihiro Asada, Shuichi Sakai, Tadashi Kawazoe and Motoichi Ohtsu, "Polarization transmissive photovoltaic film device consisting of a Si photodiode wire-grid," Journal of Optics A: Pure Appl. Opt. 10 044014 (2008.04) doi: 10.1088/1464-4258/10/4/044014
  48. Y.-A. Chapuis, Lingfei Zhou, Yamato Fukuta, Yoshio Mita, and Hiroyuki Fujita, "FPGA-based decentralized control of arrayed MEMS for microrobotic application," IEEE Transactions on Industrial Electronics, v 54, n 4, Aug. 2007, p 1926-36 (2007.08) doi: 10.1109/TIE.2007.898297
  49. Kenichiro Hirose, Fumitaka Shiraishi, and Yoshio Mita, "A Simultaneous vertical and horizontal as-deposition self-patterning method on deep three-dimensional micro structures applied to vertically buried inductors," Journal of Micromechanics and Microengineering, Vol. 17, No.7, pp. S68-S76 (2007.07) doi: 10.1088/0960-1317/17/7/S02
  50. Ken Tsutsui, Masashi Nakata, Masayuki Morita, Masahide Tokuda, Kazuyuki Nagatsuma, Harumasa Onozato, Tadao Kaneko, Tomohiko Edura, Yoshio Mita, Hideomi Koinuma and Yasuo Wada, "Novel fabrication technologies of planar nano-gap electrodes for single molecule evaluation," Current Applied Physics, Vol. 7, n 4, May 2007, pp. 329-333 (2007.05) doi: 10.1016/j.cap.2006.09.005
  51. Yoshio Mita, Kenichiro Hirose, Masanori Kubota, and Tadashi Shibata, "Deep-Trench Vertical Si Photodiodes for Improved Efficiency and Crosstalk," IEEE Journal of Selected Topics on Quantum Electronics, Vol.13,No.2, pp.386-391 March/April (2007.3) doi: 10.1109/JSTQE.2007.893078
  52. Bassam Saadany, Maurine Malak, Masanori Kubota, Frederic Marty, Yoshio Mita, Diaa Khalil, and Tarik Bourouina, "Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirros on Silicon," IEEE Journal of Selected Topics in Quantum Electronics, Vol.12, No.6, Nov/Dec 2006, pp.1480-1488 (2006.11) doi: 10.1109/JSTQE.2006.884082
  53. Yamato Fukuta, Yves Andre Chapuis, Yoshio Mita, and Hiroyuki Fujita, "Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation," IEEE Journal of Micro-Electro-Mechanical Systems, Vol. 15, No. 4, pp. 212-226, (2006.08) doi: 10.1109/JMEMS.2006.879378
  54. 久保田雅則, 三田吉郎, マーティー・フレデリック, ブルイナ・タリク, 柴田直, 「ナノ開口・大開口のエッチングを可能とする輪郭描画法」, 電気学会センサ・マイクロマシン部門誌, Volume 126-E Number 6 (2006.6) doi: 10.1541/ieejsmas.126.235
  55. Yoshio Mita, Masanori Kubota, Tomoyuki Harada, Frederic Marty, Bassam Saadany, Tarik Bourouina and Tadashi Shibata, "Contour Lithography Methods for DRIE Fabrication of Nanometre-Millimetre-Scale Coexisting Microsystems," Journal of Micromechanics and Microengineering, Vol. 16, pp. S135-S141 (2006.6) doi: 10.1088/0960-1317/16/6/S20
  56. Benjamin Caillard, Yoshio Mita, Yamato Fukuta, Tadashi Shibata, and Hiroyuki Fujita, "A highly simple failure detection method for electrostatic microactuators: application to automatic testing and accelerated lifetime estimation," IEEE Transactions on Semiconductor Manufacturing, Vol. 19, No.1, pp.35-42, Feb. (2006.2) doi: 10.1109/TSM.2005.863234
  57. Frederic Marty, Lionel Rousseau, Bassam Saadany, Bruno Mercier, Olivier Français, Yoshio Mita, and Tarik Bourouina, "Advanced Etching of Silicon Based On Deep Reactive Ion Etching For Silicon High Aspect Ratio Microstructures And Three-Dimensional Micro- And NanoStructures," Microelectronics Journal, Circuits and Systems section, Vol. 36, pp.673-677 June (2005.06) doi: 10.1016/j.mejo.2005.04.039
  58. Yusuke Nakashita, Yoshio Mita, and Tadashi Shibata, "An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects," Japanese Journal of Applied Physics, Vol. 44, No. 4B, pp. 2119-2124, Apr. (2005.04) doi: 10.1143/JJAP.44.2119
  59. Daisuke Kobayashi, Yoshio Mita, Tadashi Shibata, Tarik Bourouina, and Hiroyuki Fujita, "Batch bulk-micromachined high-precision metal-on-insulator micro-spires and their application to scanning tunneling microscopy," Journal of Micromechanics and Microengineering, Vol. 14, No.9, pp. S76-S81, Sep. (2004.09) doi: 10.1088/0960-1317/14/9/013
  60. Yamato Fukuta, Masashi Yanada, Atsushi Ino, Yoshio Mita, Yves-Andre Chapuis, Satoshi Konishi, and Hiroyuki Fujita, "Conveyor for Pneumatic Two-Dimensional Manipulation Realized by Arrayed MEMS and its Control," Journal of Robotics and Mechatronics (JRM), Vol. 16, No. 2, pp. 163-170, Apr. (2004.04) doi: 10.20965/jrm.2004.p0163
  61. Huaiyu Xu, Yoshio Mita and Tadashi Shibata, "Optimizing Vector-Quantization Processor Architecture for Intelligent Query Search Applications," Japanese Journal of Applied Physics, Vol. 41 Part 1, No. 4B, pp. 2301-2305 (2002.04) doi: 10.1143/JJAP.41.2295
  62. Makoto Mita, Yoshio Mita, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers," IEEJ Transactions on Sensors and Micromachines Vol.120-E No.11, pp.493-497 (2000.11) doi: 10.1541/ieejsmas.120.493
  63. Agnes Tixier, Yoshio Mita, Jean-Philippe Gouy and Hiroyuki Fujita, "A silicon shadow mask for deposition on isolated areas," Journal of Micromechanics and Microengineering Vol.10, pp.157-162 (2000.06) doi: 10.1088/0960-1317/10/2/310
  64. Yoshio Mita, Agnes Tixier, Satoshi Oshima, Makoto Mita, Jean-Philippe Gouy and Hiroyuki Fujita, "A Silicon Shadow Mask with Unlimited Patterns and a Mechanical Alignment Structure by Al-Delay Masking Process.," IEEJ Transactions on Sensors and Micromachines Vol.120-E No.7 pp.357-362 (2000.07) doi: 10.1541/ieejsmas.120.357
  65. Yoshio Mita, Dominique Collard, Makoto Mita and Hiroyuki Fujita, "Fabrication of an Inverted Scratch-Drive-Actuator for a Powerful and Precise Conveyance System," IEEJ Transactions on Sensors and Micromachines Vol.119-E No.12 pp.648-649 (1999.12) doi: 10.1541/ieejsmas.119.648
  66. 三田 信, 三田 吉郎, 年吉洋, 藤田博之, "遅延マスク法によるシリコンの3次元バルクマイクロ構造," Trans. JIEE Vol. 119-E, No.5, pp.310-311 (1999.05) doi: 10.1541/ieejsmas.119.310
  67. Yoshio Mita, Andreas Kaiser, Patrick Garda, Maurice Milgram and Hiroyuki Fujita, "マイクロマシンとの集積化に適したフィードバック制御用分散型プロセッサ, A MEMS-Oriented Distributed Processor for Integrated Feed-Back Controller," 電子情報通信学会誌 C-II Vol.82, No. 3, pp.101-108 (1999.03)
  68. Satoshi Konishi, Yoshio Mita and Hiroyuki Fujita, "Two-dimensional conveyance system using cooperative motions of many fluidic microactuators," Advanced Rovotics, Vol.12, No.2 pp.155-165 (1998.12) doi: 10.1163/156855398X00118
  69. Hiroshi Toshiyoshi, Yoshio Mita, Makoto Ogawa and Hiroyuki Fujita, "Silicon micro motherboards for three-dimensional assembling of micro systems," IEEJ Transactions on Sensors and Micromachines, Vol. 118-E, No.10, pp.444-448 (1998.10) doi: 10.1541/ieejsmas.118.444

査読付国際学会/International Conferences

  1. Yoshio Mita, Eric Lebrasseur, Motohiko Ezawa, Keigo Tsuji, Minoru Kawamura, and Akio Higo, "TopoMEMS circuit: step-variable-resettable MEMS capacitor for topological electrical circuit (oral presentation)," The 21st International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), 20-25 June 2021, online, accepted for publication (2021)
  2. Takafumi Yamaguchi, Naoto Usami, Kei Misumi, Atsushi Toyokura, Akio Higo, Shimpei Ono, Gilgueng Hwang, Guilhem Larrieu, Yoshiho Ikeuchi, Agnes Tixier-Mita, Ken Saito, Timothee Levi, and Yoshio Mita, "Self-deformable flexible MEMS tweezer made of poly (vinylidene fluoride) /ionic liquid gel with electrical measurement capability (oral presentation)," The 21st International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), 20-25 June 2021, online, accepted for publication (2021)
  3. Akio Higo, Yukinori Ochiai, and Yoshio Mita, "High throughput 16 nm nanogap by variable shaped beam method using F7000S-VD02 EB lithography," The 21st International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), 20-25 June 2021, online, accepted for publication (2021)
  4. Taku Tsuchiya, Yuki Okamoto, Frederic Marty, Ayako Mizushima, Agnes Tixier-Mita, Olivier Francais, Bruno Le Pioufle, and Yoshio Mita, "Two-Dimensionally Arrayed Double-Layer Electrode Device which, Enables Reliable and High-Thoroughput Electrorotation," The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Virtual Event (2021.01)
  5. Kenji Suzuki, Yuta Nakayama, Naoki Shimizu, Takashi Mizuno, Yoshio Mita, and Takeshi Yoshimura, "Supersensitive Ultrasound Probes for Medical Imaging by Piezoelectric MEMS with Complemented Transmitting and Receiving Transducers," The 2020 IEEE International Ultrasonics Symposium (IUS 2020), September 6 - 11, 2019 (Virtual Event) (2020.09.10)
  6. Kuniaki Konishi, Daisuke Akai, Yoshio Mita, Makoto Ishida, Junji Yumoto, and Makoto Kuwata-Gonokami, "Circularly Polarized Third Harmonic Generation in Vacuum Ultraviolet Region Using Square Lattice Photonic Crystal Nanomembrane," 14th International Congress on Artificial Materials for Novel Wave Phenomena, Online (New York), 28 Sep - 3 Oct 2020, accepted for oral presentation (2020.09)
  7. Ayako Mizushima, R Ranga Reddy, Kuniaki Konishi, Etsuko Ohta, Tomoya Ezawa, Akio Higo, Makoto Kuwata-Gonokami, and Yoshio Mita, "Assessment of Annealing Treatment for Wrinckle-less SiO2 Membrane," Design, Test, Integration & Packaging of MEMS / MOEMS (DTIP 2020), 15-26 June 2020, Virtual Event, (2020.06.23)
  8. Kei Misumi, Naoto Usami, Akio Higo, and Yoshio Mita, "Micro-scale Electrostatic Attach-detach Device for Micro Self-reconfigurable Modular Robotic System," Design, Test, Integration & Packaging of MEMS / MOEMS (DTIP 2020), 15-26 June 2020, Virtual Event, (2020.06.19)
  9. G. Hwang, C. David, A. Paris, D. Decanini, A. Mizushima and Y. Mita, "A Rapid, Reliable and Less-destructive On-chip Mass Measurement for 3D Composite Material Testing Microstructures," 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS), Edinburgh, United Kingdom, 2020, pp. 1-4, (2020.04) doi: 10.1109/ICMTS48187.2020.9107932
  10. Norihiro Miyazawa, Naoto Usami, Haibin Wang, Takaya Kubo, Hiroshi Segawa, Yoshio Mita, and Akio Higo, "Coaxial Circular Test Structure Applicable to both Ohmic and Schottky Characteristics for ZnO/Si Heterojunctions Assessment," 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS), Edinburgh, United Kingdom, 2020, pp. 1-4, (2020.04) doi: 10.1109/ICMTS48187.2020.9107928
  11. N. Usami, E. Ota, A. Higo, T. Momose and Y. Mita, "Drop-in test structure chip to visualize residual stress of Ru/Cu film grown by atomic layer deposition and supercritical fluid deposition," 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS), Edinburgh, United Kingdom, 2020, pp. 1-4, (2020.04) doi: 10.1109/ICMTS48187.2020.9107904
  12. Kenji Suzuki, Yuta Nakayama, Izuru Kanagawa, Yuji Matsushita, Takashi Mizuno, Yoshio Mita, and Takeshi Yoshimura, “Monolithic Integration of P(VDF-TrFE) Thin Film on CMOS for Wide-Band Ultrasonic Transducer Arrays,” The 2019 IEEE International Ultrasonics Symposium (IUS 2019), October 6 - 9, 2019. Glasgow, Scotland, UK (2019.10)
  13. Yoshio Mita, Yuta Nakayama, Kenji Suzuki, Takeshi Mizuno, Tokiko Endo, and Takeshi Yoshimura, "Application of Open Target Research on CMOS-MEMS with New Materials to Industrial Innovation (invited talk)," International Symposium on Electronics and Smart Devices (ISESD 2019), 8-9, October, Bali, Indonesia (2019.10)
  14. Shunsuke Inagaki, Yuki Okamoto, Akio Higo, Yoshio Mita, "High-Resolution Piezoelectric MEMS Scanner Fully Integrated with Focus-Tuning And Driving Actuators," The 20th International Conference on Solid State Sensors and Actuators (Transducers 2019 - EUROSENSORS XXXIII), Berlin, Germany (2019. 06)
  15. Yuki Okamoto, Taku Tsuchiya, Charles Moslonka, Yu-Sheng Lin, Sung Tsang, Frédéric Marty, Ayako Mizushima, Chen-li Sun, Hsiang-Yu Wang, Agnès Tixier-Mita, Olivier Français, Bruno Le Pioufle, and Yoshio Mita, "Z-Axis Controllable Mille-Feuille Electrode Electrorotation Device Utilizing Levitation Effect," The 20th International Conference on Solid State Sensors and Actuators (Transducers 2019 - EUROSENSORS XXXIII), Berlin, Germany (2019. 06)
  16. Matthieu Denoual, Corentin Jorel, Didier Robbes, Julien Grand, And Yoshio Mita, "Steps Toward Integration of Zeolite-Based Thermal Mass Gas Detectors to Form Electronic Nose," Design, Test, Integration & Packaging of MEMS / MOEMS (DTIP 2019), 12-15 May 2019, Paris, France, pp. 14-17 (2019.05)
  17. Makoto Ogasawara, Yuji Kosugi, Jiaqi Zhang, Yuki Okamoto, Yoshio Mita, Akira Otomo, Yoshiaki Nakano, Takuo Tanemura, "Electro-optic polymer surface-normal modulator using silicon high-contrast grating resonator," Conference on Lasers and Electro-Optics (CLEO), San Jose, California, USA (2019. 05)
  18. Yuki Okamoto, Ayako Mizushima, Naoto Usami, Jun Kinoshita, Akio Higo, Yoshio Mita, "Damage Assessment Structure of Test-Pad Post-Processing on CMOS LSIs," 2019 IEEE Conference on Microelectronic Test Structures (ICMTS 2019), Kita-Kyushu, Japan (2019.03)
  19. Naoto Usami, Etsuko Ohta, Akio Higo, Takeshi Momose and Yoshio Mita, "Continuity assessment for supercritical-fluids-deposited (SCFD) Cu film as electroplating seed layer," 2019 IEEE Conference on Microelectronic Test Structures (ICMTS 2019), Kita-Kyushu, Japan (2019.03)
  20. Haibin Wang, Akio Higo, Yoshio Mita, Takaya Kubo, and Hiroshi Segawa, "PbS Quantum Dot / ZnO Nanowires Hybrid Test Structures for Infrared Photodetector," 2019 IEEE Conference on Microelectronic Test Structures (ICMTS 2019), 18-21 Mar, Kita-Kyushu, Japan, pp. 8-11 (2019.03)
  21. Akio Higo, Tomoki Sawamura, Makoto Fujiwara, Etsuko Ota, Ayako Mizushima, Eric Lebrasseur, Taro Arakawa, and Yoshio Mita,"A Micro Racetrack Optical Resonator Test Structure to Optimize Pattern Approximation in Direct Lithography Technologies," 2019 IEEE Conference on Microelectronic Test Structures (ICMTS 2019), Kita-Kyushu, Japan (2019.03)
  22. Yuki Okamoto, Koji Fujimoto, Hiroyuki Ryoson, Takayuki Ohba, Yoshio Mita, "Stick-to-Analyze Zeta Potential Measurement Chip with Integrated Electroosmotic Micropump and Liquid Flow Sensor," The 32th International Conference on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea (2019.01)
  23. Yoshio Mita, et. al, "Agile-Style Development of CMOS-Integrated Micro Electro Chemical Mechanical Systems by LSI Foundry and Nanotechnology Platform (Invited Talk)," International Symposium on Electronics and Smart Devices (ISESD 2018), 23-24, October, Bandung, Indonesia. (2018.10) doi: 10.1109/ISESD.2018.8605484
  24. Yoshio Mita, Eric Lebrasseur, Akio Higo, "In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration," Workshop on Microelectroincs Education (EWME 2018), 24-26 Sep, Braunschweig Germany, (2018.9)
  25. Daigo Terutsuki, Hidefumi Mitsuno, Takeshi Sakurai, Yuki Okamoto, Agnès Tixier-Mita, Hiroshi Toshiyoshi, Yoshio Mita, and Ryohei Kanzaki, "Cell-sensor interface analysis of a bio-hybrid electric odorant sensor," 28th anniversary World Congress on Biosensors (BIOSENSORS 2018), Miami, Florida, USA (2018.6)
  26. Kosumo Matsui, Kohei Fujiwara, Yuki Okamoto, Yoshio Mita, Hidehiko Yamaoka, Hiroyuki Koizumi, and Kimiya Komurasaki, "Development of 94GHz microstrip line rectenna," 2018 IEEE Wireless Power Transfer Conference (WPTC), 3-7 June 2018, Polytechnique Montreal, Montreal, Quebec, Canada, pp. 1-4 (2018.06) doi: 10.1109/WPT.2018.8639081
  27. Taisei Kuriyama, Yuki Okamoto, Akiyoshi Suzuki, and Yoshio Mita, "A Micromachined All-Solid On-Chip Thin-Film Battery towards Uninterruptible Photovoltaic Cells," 2018 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Roma, Italy (2018.5)
  28. Ken Saito, Daniel S. Contreras, Yudai Takeshiro, Yuki Okamoto, Yuya Nakata, Taisuke Tanaka, Satoshi, Satoshi Kawamura, Minami Kaneko, Fumio Uchikoba, Yoshio Mita, and Kristofer S. J. Pister, "Study on silicon device of microrobot system for heterogeneous integration," International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC), Mie, Japan, (2018.4)
  29. R Ranga Reddy, Yuki Okamoto, Yoshio Mita, "An On-chip Test Structure for Studying the Frictional Behavior of Deep-RIE MEMS Sidewall Surfaces," 2018 IEEE Conference on Microelectronic Test Structures (ICMTS 2018), Austin, USA (2018.3)
  30. Naoto Usami, Akio Higo, Ayako Mizushima, Yuki Okamoto and Yoshio Mita, "Test Structure for Electrical Assessment of UV Laser Direct Fine Patterned Material," 2018 IEEE Conference on Microelectronic Test Structures (ICMTS 2018), Austin, USA (2018.3)
  31. Yudai Takeshiro, Yuki Okamoto, Yoshio Mita, "Mask-programmable on-chip photovoltaic cell array (Late News)," PowerMEMS, Kanazawa, Japan (2017.11)
  32. Yoshio Mita, "Integration of a photovoltaic remote driver with high-voltage MEMS using standard CMOS technology (Invited Talk)," Journee Nationale de la Technologie Emergente (JNTE 2017), 20-22, November, Orleans, France. (2017.11)
  33. Yoshio Mita, "Visualizing is Believing - Test Strucutures for Deep-Etched High Aspect Ratio MEMS Process and Device Characterization (Invited), " 10th IEEE/ACM Workshop on Variability, Modeling, and Characterization (VMC), Irvine, CA, USA (2017.11)
  34. Yoshio Mita, "Yes We Can – A Short-Cut Research and Development of Miniaturized Smart Devices and Sensors through Open Facility on MEMS Integrated VLSI (Invited talk)," International Symposium on Electronics and Smart Devices (ISESD),Yogyakarta, Indonesia (2017.10)
  35. Yoshio Mita, ""The MEMS stands that wants Energy" - CMOS-MEMS Reliable Power Sources towards Autonomous Distributed Microsystems (Invited)," The 1st International Workshop on MEMS and Sensor System 2017, 27-28 September 2017, Ho Chi Minh City, Viet Nam (2017.09)
  36. Yoshio Mita,"Open Innovation of CMOS-MEMS Integrated Devices by Open Facility (Invited talk)," International Conference on Solid State Devices and Materials (SSDM), pp.401-402, Sendai, Japan (2017.09)
  37. Yuki Okamoto, Yukiya Tohyama, Naoto Usami Yoshio Mita, "The large-area backside etching method by changing backside layout using loading effect and ARDE for foundry-based fabrication," International Conference on Solid State Devices and Materials (SSDM), pp.347-348, Sendai, Japan (2017.09)
  38. Yuki Okamoto, Yoshio Mita, "Wireless operation of EWOD by the on-chip CMOS silicon photovoltaic cell array," International Conference on Solid State Devices and Materials (SSDM),pp.267-268, Sendai, Japan(2017.09)
  39. Akio Higo, Hai-bin Wang, Takaya Kubo, Naoto Usami, Yuki Okamoto, Kentaro Yamada, Hiroshi Segawa, Masakazu Sugiyama, and Yoshio Mita, "Fabrication of PbS Quantum dots and Silicon Device for Near-Infrared Detection," International Conference on Optical MEMS and Nanophotonics (OMN), New Mexico, USA (2017.08)
  40. Matthieu Denoual, Mathieu Pouliquen, Corentin Jorel, Constantin Radu, Didier Robbes, M Harnois, O de Sagazan, J Grand, H Awala, S Mintova, S Inoue, Eric Lebrasseur, Kentaro Yamada, Yuki Okamoto, Agnès Mita-Tixier, and Yoshio Mita, "Zeolite-based thermal mass gas sensor with self-identification algorithm," 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Bordeaux, France, (2017.7)
  41. Rimon Ikeno, Yoshio Mita, and Kunihiro Asada, "Line-edge quality optimization of electron beam resist for high-throughput character projection exposure utilizing atomic force microscope analysis," Design-Process-Technology Co-optimization for Manufacturability XI , California, USA (2017.04)
  42. Naoto Usami, Jun Kinoshita, Rimon Ikeno, Yuki Okamoto, Masaaki Tanno, Kunihiro Asada and Yoshio Mita, "An arrayed test structure for transistor damage assessment induced by circuit analysis and repairing processes with back-side-accessing Focused Ion Beam," 2017 IEEE Conference on Microelectronic Test Structures (ICMTS 2017), Grenoble, France (2017.03)
  43. Agnes Tixier-Mita, Satoshi Ihida, Grant Cathcart, Faruk Azam Shaik, Yoshio Mita, and Hiroshi Toshiyoshi, "A Test Structure to Characterize Transparent Electrode Array Platform with Transparent Access TFTs for Bio-Chemical Applications," 2017 IEEE Conference on Microelectronic Test Structures (ICMTS 2017), Grenoble, France (2017.03)
  44. Stewart Smith, Yudai Takeshiro, Yuki Okamoto, Jonathan G. Terry, Anthony J. Walton, Rimon Ikeno,Kunihiro Asada and Yoshio Mita, "Test Sructures for Nano-Gap Fabrication Proctromechanical Systems," 2017 IEEE Conference on Microelectronic Test Structures (ICMTS 2017), Grenoble, France (2017.03)
  45. Nguyen Ngoc Mai-Khanh, Shigeru Nakajima, Tetsuya Iizuka, Yoshio Mita, and Kunihiro Asada, "Experimental demonstration of non-destructive detection of IGBT fault positions by magnetic sensor," IEEE Sensors Applications Symposium (SAS) , Glassboro, NJ (2017.03)
  46. Daigo Terutsuki, Hidefumi Mitsuno, Yuki Okamoto, Takeshi Sakurai, Agnes Tixier-Mita, Hiroshi Toshiyoshi, Yoshio Mita and Ryohei Kanzaki, "Odor sensitive Field Effect Transistor (OSFET) Based on Insect Cells Expressing Insect Odrant Receptors,"The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), (2017.01)
  47. Yuki Okamoto, Hiroyuki Ryoson, Koji Fujimoto, Keiji Honjo, Takayuki Ohba and Yoshio Mita, "Hotspot Liquid Microfluidic Cooling: Comparing The Efficiency between Horizontal Flow and Vertical Flow," PowerMEMS, Paris, France, (2016.12)
  48. Matthieu Denoual, Eric Lebrasseur, and Yoshio Mita, "Examples of CMOS-MEMS realizations within a France-Japan collaboration (Invited)," 29th International Microprocesses and Nanotechnology Conference (MNC 2016), 8-11 Nov Kyoto, Japan, (2016.11.09)
  49. Toru Nakura, Yuki Okamoto, Yoshio Mita, and Kunihiro Asada, "One week TAT of 0.8μm CMOS gate array with analog elements for educational exercise," 11th European Workshop on Microelectronics Education (EWME), 2016, Southampton, UK, (2016.5)
  50. Yoshio Mita, and Yoshihiro Kawahara, "Introduction to electronic information devices — Try-by-yourself-style lecture on autonomous electronic devices," 11th European Workshop on Microelectronics Education (EWME), 2016, Southampton, UK, (2016.5)
  51. Yuki Okamoto, Isao Mori and Yoshio Mita, "Demonstration of 0-30V Comb-Drive MEMS Actuator by integrated switching circuit with post-mesa-isolated standard 5V CMOS transistor," 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Budapest, Hungary, (2016.5)
  52. Matthieu Denoual, M. Pouliquen, Julien Grand, Hussein Awala, Sveltana Mintova, O. de Sagazan, Shu Inoue, Agnès Tixier-Mita, Yoshio Mita, and D. Robbes, "Microfabricated test structures for thermal resonant gas sensor," IEEE 2016 International Conference on Microelectronic Test Structures (ICMTS), 28-31 Mar. 2016 Yokohama, Japan, pp.16 - 19 (2016.3)
  53. Yuki Okamoto, Eric Lebrasseur, Isao Mori and Yoshio Mita, "An End-point Visualization Test Structure for All Plasma Dry Release of Deep-RIE MEMS," 2016 IEEE Conference on Microelectronic Test Structures (ICMTS2016), March 28-31, Yokohama, Japan, (2016.3)
  54. Shu Inoue, Ryota Setoguchi, Matthieu Denoual, Sveltana Mintova, and Yoshio Mita, "Zeolite-trench-embedded micro cantilevers for CMOS strain-gauge integrated gas sensors," The 2015 International Conference on Solid State Devices and Materials, September 28-30, Sapporo, Japan, pp. 800-801 (2015.09) doi: 10.7567/JJAP.55.04EF14
  55. Isao Mori and Yoshio Mita, "Discharging-Phototransistor-Integrated High-Voltage Si Photovoltaic Cells for Fast Driving of an Electrostatic MEMS Actuator by Wavelength Modulation," Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials, September 28-30, Sapporo, Japan, pp. 162-163 (2015.09)
  56. Naoyuki Sakamoto, Antoine Frappe, Bruno Stefanelli, Andreas Kaiser and Yoshio Mita, "Wireless Drive of A MEMS Ciliary Motion Actuator via Coupled Magnetic Resonances Using Micro Inductors," Solis State Sensors and Actuators 2015. (TRANSDUCERS '15). Anchorage, USA, (2015.7)
  57. Ryota Setoguchi, Eric Lebrasseur, Masanori Kubota and Yoshio Mita, "A strain-sensor-integrated test bed for electro mechanical characterization of VLSI probe," Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on, Montpellier, (2015.4)
  58. Yoshio Mita, Masanori Kubota, Matthieu Denoual, Eric Lebrasseur, and Tomoki Sawamura, "«MEMS de Piano» un TP de conception, de fabrication et test de résonateur MEMS (in French)," CETSIS2014 : Enseignement des Technologies et des Sciences de l'Information et des Systèmes, 27-29 oct. 2014 Besançon, France (2014.10)
  59. Yoshio Mita, Eric Lebrasseur, Tomoki Sawamura, Naoko Kondo, and Kunihiro Asada, "UTokyo VDEC’s CMOS-MEMS Technology via Nanotechnology Platform for Prospective Integrated Magnetic Sensor," 20th IMEKO TC4 International Symposium and 18th International Workshop on ADC Modelling and Testing Research on Electric and Electronic Measurement for the Economic Upturn Benevento, Italy, September 15-17, 2014 (2014.09)
  60. Yoshio Mita, Masanori Kubota, Matthieu Denoual, Eric Lebrasseur, and Tomoki Sawamura, ""MEMS de Piano" - an Experimental Course of Design, Fabrication, and Testing of MEMS Oscillator," in the Proceedings of the 10th European Workshop on Micoelectronics Education (EWME 2014), 10-14 May, Tallinn, Estonia, S05_03 (2014.5)
  61. Isao Mori, Masanori Kubota, and Yoshio Mita, "A test structure of bypass diodes for on-chip high-voltage silicon photovoltaic cell array," 2014 IEEE Conference on Microelectronic Test Structures (ICMTS2014), March 24-27, Udine, Italy, (2014.4)
  62. Agnès Tixier-Mita, Takuya Takahashi, Hiroyuki Fujita, Hiroshi Toshiyoshi, Isao Mori, Yoshio Mita, Olivier Français, Bruno Le Pioufle, "Detection of micro-beads by impedance spectroscopy," Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2014), 1-4 April, Cannes Côte d'Azur, France, pp.87-90 (2014.04)
  63. Isao Mori, Masanori Kubota, Eric Lebrasseur, and Yoshio Mita, "Remote power feed and control of MEMS with 58 V silicon photovoltaic cell made by a CMOS post-process dry release and device isolation method," Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014), April 1-4, Cannes, France, (2014.3)
  64. Agnès Tixier-Mita, Eric Lebrasseur, Takuya Takahashi, Yoshio Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi, Olivier Français, and Le Pioufle Bruno, "Compressively-Stressed Test Structures for Opaque Micro-Structures Releasing Visualization," 2014 IEEE International Conference on Microelectronic Test Structures (ICMTS), 24-27 Mar. Udine, Italy pp. 170-174 (2014.3)
  65. Atsushi Hirakawa, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita, "Experimental Evaluation of High Voltage Hold-Off Capability of Post-Process Mesa-Isolated Series Standard CMOS Transistors," The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), June 17-20, Barcelona, Spain, (2013.06)
  66. Masanori Kubota, Kota Hosaka, Masakazu Sugiyama, and Yoshio Mita, "Evaluation of Silicon Fracture Strength Dependence on Stealth Dicing Layers for "Cleave-Before-Use" MEMS Freestanding Cantilever Probes," The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), June 17-20, Barcelona, Spain, (2013.06)
  67. Kota Hosaka, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita, "An Integrated CMOS-MEMS Probe having Two-Tips per Cantilever for Individual Contact Sensing and Kelvin Measurement with Two Cantilevers," 25th IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March, Osaka Japan, (2013.03)
  68. Tran Nam Binh, Satoshi Morishita Masanori Kubota, and Yoshio Mita, "A Stiffness-Defined Silicon Plane Bending Method to Realize Perfectly-Curved Surface Formation for Tunable Parabolic Mirrors," 2012 IEEE Optical MEMS and Nanophotonics Conference, 6-9 August 2012, Banff, Alberta, Canada, (2012.08)
  69. Satoshi Morishita, Masanori Kubota, and Yoshio Mita, "A Blur-Range Test Structure of Collimation-Controller-Integrated Silicon Shadow Mask for Three-Dimensional Surface Patterning with Sputtering," 25th IEEE International Conference on Microelectronic Test Structures (ICMTS), 19-22 March, Sand Diego, CA, USA, (2012.03)
  70. Satoshi Morishita, Masanori Kubota, and Yoshio Mita, "Integration of EWOD Pumping Device in Deep Microfluidic Channels using a Three-Dimensional Shadowmask," in Proc. of IEEE International Conference on MicroElectroMechanical Systems (MEMS 2012), Paris, France, January 30 - Feburary 2, (2012.01)
  71. Masanori Kubota, Yoshio Mita, Takeshi Momose, Aiko Kondo, Yukihiro Shimogaki, Yoshiaki Nakano and Masakazu Sugiyama, "A 50 nm-Wide 5 μm-Deep Copper Vertical Gap Formation Method by a Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Puressure," in Proc. of IEEE International Conference on MicroElectroMechanical Systems (MEMS 2012), Paris, France, January 30 - Feburary 2, (2012.01)
  72. Isao Mori, Satoshi Morishita, Masanori Kubota, Kentaroh Watanabe and Yoshio Mita, "A Monolithically-Integrated, Batch Post-Processed 17.8 V Silicon Solar Cell for Remote MEMS Driving," Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials, September 28-30, Nagoya, Japan pp. 1041-1042 (2011.09)
  73. Yoshio Mita, Satoshi Morishita, Isao Mori, and Masanori Kubota, "Value-Added VLSI devices by MEMS technology (Invited)," AWAD 2011, June 28-July 1, Daejeon, Korea, (2011.07)
  74. Satoshi Morishita, Masanori Kubota, Isao Mori, Kunihiro Asada, Frederic Marty, and Yoshio Mita, "A Bridge-Connected Isolated Silicon Islands Post-Processing Method for Fine-Grain-Integrated ±10V-Operating CMOS-MEMS by Standard 5V CMOS Process Technology," 21st Workshop on Micromechanics and Microsystems Workshop, (MME 2010), September 27-29, Enschede, Netherlands, A08 pp.48-51 (2010.09)
  75. Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Agnes Tixier-Mita, Satoshi Morishita, and Takahisa Masuzawa, "A Balanced-SeeSaw MEMS Swing Probe for Vertical Profilometry of Deep Micro Structures," 23rd IEEE International Conference on Microelectronic Test Structures (ICMTS), 22-25 March, Hiroshima, Japan, pp. 58-63 (2010.03)
  76. Masanori KUBOTA, Yoshio MITA, Masakazu SUGIYAMA, and Yoshiaki NAKANO, "A bulk micromachined vertical nano-gap Pirani wide-range pressure test structure for MEMS-integration," 23rd IEEE International Conference on Microelectronic Test Structures (ICMTS), 22-25 March, Hiroshima, Japan, pp. 14-17 (2010.03)
  77. Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Akio Higo, Shaojun Ma, Satoshi Morishita, Masakazu Sugiyama, and Takahisa Masuzawa, "An Active Swing Probing Method for High Aspect Ratio Deep Hole Profiler," 20th Workshop on Micromachining, Micromechanics and Microsystems, (MME 2009), September 20-22, Toulouse, France D12 (2009.09)
  78. K. Takahashi, I. W. Jung, A. Higo, Y. Mita, H. Fujita, H. Toshiyoshi, and O. Solgaard, "A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner," IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2009), pp. 77-78 (2009.08)
  79. Jun-Hyoung Kim, Masanori Kubota, Akio Higo, Hideki Abe, Yoshitaka Oka, and Yoshio Mita, "A Curvature Controlled Flexible Silicon Micro Electrode Array to Wrap Neurons for Signal Analysis," The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09), June 21-25, Denver, USA, pp. 1810-1813 (2009.06)
  80. Satoshi Morishita, JunHyong Kim, Frederic Marty, Yifan Li, Anthony J. Walton, and Yoshio Mita, "A Three-Dimensional Silicon Shadowmask for Patterning On Trenches with Vertical Walls," The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09), June 21-25, Denver, USA, pp. 1608-1611 (2009.06)
  81. Yoshio Mita, Yifan Li, Masanori Kubota, William Parkes, Leslie I. Haworth, Brian W. Flynn, Jonathan G. Terry, T.B. Tang, Alec Ruthven, Stewart Smith, and Anthony J. Walton, "Wireless Driven EWOD Technology for MEMS Pond Skater Application," 38th European Solid-State DEvice Research Conference (ESSDERC 2008), Edinburgh, UK, Sep. 16-19, pp.306-309 (2008.09)
  82. Yoshiaki Imai, Yoshio Mita, Kenichiro Hirose, Masanori Kubota and Tadashi Shibata, "Surface Corrugated P-N Junction on Deep Submicron Trenches for Polarization Detection With Improved Efficiency," Asia-Pacific Conference of Transducers (APCOT), Taiwan pp. (2008.06)
  83. Yifan Li, Yoshio Mita , Les Haworth, William Parkes, Masanori Kubota, and Anthony Walton, "Test Structure for Characterising Low Voltage Coplanar EWOD System," in Proc. of IEEE International Conference on Microelectronic Test Structures(ICMTS), Edinburgh, UK, Mar. 24-27, pp.80-85 (2008.03)
  84. Yohei Hamaguchi, Masanori Kubota, Jean-Bernard Pourciel and Yoshio Mita, "High-Aspect-Ratio Vertical Surface Profiler using Sensitive Displacement Detection by Optomecanical Probe," in Proc. of IEEE International Conference on MicroElectroMechanical Systems (MEMS 2007), Tuscon AZ, USA, January 14-17, pp.884-887 (2008.01)
  85. Kenichiro Hirose, Yoshio Mita, and Shuichi Sakai, "Polarization-Transmissive Thin-Film Solar Cell with Photodiode Nanowires," IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2007), August 20-24, Taiwan, pp.29-30 (2007.8)
  86. Caillard, B. Pellet, C.; Touboul, A.; Mita, Y.; Fujita, H., Electrical overstress/electrostatic discharges (EOS/ESD) specificities in MEMS: outline of a protection strategy, Proceedings of the 14th International Symposium on the Physical & Failure Analysis of Integrated Circuits IPFA 2007, July 2007, pp. 107-111 (2007.7)
  87. Sakda Srisomrun, Yoshio Mita, Kazunori Hoshino, Masakazu Sugiyama, and Tadashi Shibata, "'Silicon on PDMS': SOI Extra Thin Active Layer Transfered to Organic Film for Flexible Applications," in Proc. of IEEE International Conference on MicroElectroMechanical Systems (MEMS 2007), Kobe, January 22-25, pp.263-266 (2007.01)
  88. Kenichiro Hirose, Yoshio Mita, and Tadashi Shibata, "Self-Patterning Metal Deposition on Deep Three-Dimensional MicroStructures for Vertically Buried Inductors," Micromechanics and Microengineering Europe 2006 (MME '06), Southampton, UK, September 3-5, pp.85-88 (2006.09)
  89. Kenichiro Hirose, Yoshio Mita, Masanori Kubota, and Tadashi Shibata, "Deep-Trench Vertical Si Photodiode Towards Active-Device Integrated OMEMS," IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2006), August 20-24, Montana, USA, pp. 191-192 (2006.8)
  90. Bassam Saadany, Dhaa Khalil, Maurine Malak, Masanori Kubota, Frederic Marty, Yoshio Mita, and Tarik Bourouina, "An all Silicon Micro-machined Add-Drop Optical Filter," IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2006), August 20-24, Montana, USA, pp. 94-95 (2006.08)
  91. Bassam Saadany, Maurine Malak, Frederic Marty, Yoshio Mita, Dhaa Khalil, and Tarik Bourouina, "Electrostatically-tuned Optical Filter Based on Silicon Bragg Reflectors," IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2006), August 20-24, Montana, USA, pp. 86-87 (2006.08)
  92. Bassam Saadany, Tarik Bourouina, Maurine Malak, Masanori Kubota, Yoshio Mita, and Dhaa Khalil, "A Miniature Michelson Interferometer using Vertical Bragg Mirrors on SOI," IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2006), August 20-24, Montana, USA, pp. 50-51 (2006.08)
  93. Tomoyuki Harada, Kota Ito, Tadashi Shibata and Yoshio Mita, "A Reliable Bulk Knife-Edged Greek Cross Test Structure for as-Deposition Self-Patterning of New LSI Materials," in Proc. of IEEE International Conference on Microelectronic Test Structures(ICMTS), Austin TX, USA, Mar. 5-9, pp.149-154 (2006.03)
  94. Yoshio Mita, Masanori Kubota, Masakazu Sugiyama, Frederic Marty, Tarik Bourouina, and Tadashi Shibata, "Aspect Ratio Dependent Scalloping Attenuation in DRIE and an Application to Low-Loss Fiber-Optical Switches," in Proc. of IEEE International Conference on MicroElectroMechanical Systems (MEMS 2006), Istanbul, Turkey, January 23-26, pp. 114-117 (2006.01)
  95. Yusuke Nakashita, Yoshio Mita, and Tadashi Shibata, "An Analog Visual Pre-Processing Processor Employing Cyclic Line Access in Only-Nearest-Neighbor-Interconnects Architecture," to be published in Advances in Neural Information Processing Systems 18: Proceedings of the 2005 NIPS Conference, Vancouver, Canada, Dec. (2005.12)
  96. Masanori Kubota, Yoshio Mita, Frederic Marty, Tarik Bourouina, and Tadashi Shibata, "An improved locos-contour-lithography method for fabricating nanometer-and-millimeter-scale coexisting structures," MicroMechanics Europe Workshop (MME '05), Göteborg, Sweden, September 4-6, pp. 107-110 (2005.09)
  97. L. Zhou, Y. -A. Chapius, Y. Fukuta, Y. Mita, F. Braun, and H. Fujita, "Architecture and implementation of distributed control system for MEMS-based intelligent motion surface," IEEE International Symposium on Industrial Electronics, 20-23 June 2005, Dubrovnik, Croatia, Vol. 3, pp. 1043-1048 (2005.06)
  98. Frederic Marty, Bassam Saadany, Tarik Bourouina, Yoshio Mita, Tadashi Shibata, "High Aspect Ratio Nano-Structures (HARNS) for Photonic MEMS Based on Vertical DBR Architecture," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), June 5-9, Seoul, Korea, Vol.1, pp. 384-387 (2005.06)
  99. Masanori Kubota, Yoshio Mita, Kota Ito, Frederic Marty, Tarik Bourouina, and Tadashi Shibata, "A Contour-Lithography Method for Rapid and Precise Deep-Etched Nano-MEMS Structure Fabrication," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), June 5-9, Seoul, Korea, Vol.2, pp.1449-1452 (2005.06)
  100. Kota Ito, Yoshio Mita, Masanori Kubota, Frederic Marty, Tarik Bourouina, and Tadashi Shibata, "Electrical Critical Dimension Measurement Method by Integration of Test Structure into MEMS Devices," The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05), June 5-9, Seoul, Korea, Vol.2, pp. 2031-2034 (2005.06)
  101. Benjamin Caillard, Yoshio Mita, Yamato Fukuta, Tadashi Shibata, and Hiroyuki Fujita, "Accelerated life time estimation of electrostatic microactuators," Proc. of IEEE International Conference on Microelectronic Test Structures(ICMTS), Apr. 4-7, Leuven, Belgium, pp. 101-105 (2005.04)
  102. Benjamin Caillard, Yoshio Mita, Yamato Fukuta, Yves-Andre Chapuis, Tadashi Shibata, and Hiroyuki Fujita, "Electrical Detection of Failures of MEMS Electrostatic Microactuators for Test Circuit," IEEE 6th Latin-American Test Workshop, Mar. 30-Apr. 2, Salvador, Bahia, Brazil, pp.201-206 (2005.03)
  103. Kazunori Hoshino, Takaharu Nagai, Yoshio Mita, Masakazu Sugiyama, Kiyoshi Matsumoto, and Isao Shimoyama, "Active Ink-Jet Nozzles Equipped with Arrayed Visual Sensors for Parallel Alignment Control," IEEE International Conference on MicroElectroMechanical Systems (MEMS 2005), Jan. 31- Feb. 3, Florida, USA (2005.01)
  104. Yamato Fukuta, Yves-Andre Chapuis, Yoshio Mita and Hiroyuki Fujita, "A MEMS Arrays for Pneumatic Conveyor and its Control Based on Distributed System," IEEE International Conference on MicroElectroMechanical Systems (MEMS 2005), Jan. 31- Feb. 3, Florida, USA (2005.01)
  105. Yamato Fukuta, Yves-Andre Chapuis, Yoshio Mita and Hiroyuki Fujita, "Airflow MEMS Array Conveyor Which Provide Clean and Contact-Free Manipulations for Micro TAS," 8th International Conference on Miniaturised Systems for Chemistry and Life Sciences (MicroTAS 2004), Sep. 26-30, Malmoe, Sweden (2004.09)
  106. Yamato Fukuta, Yoshio Mita, Yves-Andre Chapuis and Hiroyuki Fujita, "Airflow Micromanipulation of Objects by Arrayed MEMS Device for Autonomous Distributed System," Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT), Jul. 4-7, Sapporo, Japan, Vol.3-2, pp. 880-884 (2004.07)
  107. Frederic Marty, L.Rousseau, Bassam Saadany, Bruno Mercier, Olivier Francais, Yoshio Mita, and Tarik Bourouina, "Advanced Silicon Etching Techniques Based on Deep Reactive Ion Etching (DRIE) for Silicon HARMS and 3D Micro- and Nano-Structures," ASME European Micro and Nano Systems (EMN04), 20-21 October 2004, Paris, France, pp.25-28 (2004.10)
  108. Yusuke Nakashita, Yoshio Mita, and Tadashi Shibata, "An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects," International Conference on Solid State Devices and Materials (SSDM '04), Sep. 19-22, Tokyo, Japan (2004.09)
  109. Bassam Saadany, Frederic Marty, Yoshio Mita, Dhaa Khalil, and Tarik Bourouina, "A MEMS Tunable Optical Filter Based on Vertical DBR Architecture," Design, Test, Integration and Packaging of MEMS/MOEMS, 12-14 May 2004, Montreux, Switzerland (2004.05)
  110. Yamato Fukuta, Yoshio Mita, Yves-Andre Chapuis, Makoto Arai and Hiroyuki Fujita, "MEMS Conveyance System for Pneumatic Two-Dimensional Manipulation based on Autonomous Distributed Systems," Proc. IEEE International Conference on Robotics and Automation (ICRA '04), Apr. 26- May 1,New Orleans, USA, WM14-1 (2004.04)
  111. Yoshio Mita, Satoshi Komatsu, Makoto Ikeda, Minoru Fujishima, and Kunihiro Asada, "Practical Course of Design, Fabrication and Testing of CMOS Gate Array," 5th European Workshop on Microelectronics Education (EWME04), April 15-16, Lausanne, Switzerland (2004.04)
  112. Daisuke Kobayashi, Yoshio Mita, Tadashi Shibata, Tarik Bourouina, Hiroyuki Fujita, and Pierre Beauvillan, "High-Precision Metal-on-Insulator Micro Spires for Use in Nonmagnetic-Probe Magnetic Microscopy," The 14th MicroMechanics Europe Workshop (MME 03), 2-4 November 2003, Delft, the Netherlands (2003.11)
  113. Yamato Fukuta, Yoshio Mita, Makoto Arai and Hiroyuki Fujita, "Pneumatic Two-Dimensional Conveyance System for Autonomous Distributed MEMS," The 12th International Conference on Solid-State Sensors and Actuators and Microsystems (Transducers '03), June 8-12, Boston, USA, 3A2.4 pp.1019-1022 (2003.06)
  114. Agnes Tixier-Mita, Yoshio Mita and Hiroyuki Fujita, "Simple, Robust and Controllable Nanostructures Fabrication Technique Using Standard Si Wafer," The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), June 8-12, Boston, USA, 2A2.3 pp.250-253 (2003.06)
  115. Yoshio Mita, Daisuke Kobayashi and Tadashi Shibata, "A Convex-Corner Preservation Principle in Bulk Micromachining and its Application to Nano-Point Needles," The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), June 8-12, Boston, USA, 3E131.P pp.1683-1686 (2003.06)
  116. Eric Leclerc, Yoshio Mita and Teruo Fujii, "Polydimethylsiloxane Nanostructures Fabrication by FIB Machining for Single Molecule Studies," Proceedings of Second Joint EMBS-BMES Conference 2002, Houston USA, pp.1634-1635 (2002.10)
  117. Yoshio Mita and Tadashi Shibata, "Bulk Micromachined Image-Forwarding Mirror Array for Feature Extraction VLSI Sensor System," in the Proceedings of IEEE/LEOS International Conference on Optical MEMS and Their Applications, Aug. 20-23, Lugano, Switzerland, pp. 205-206, (2002.08)
  118. Kazumi Nakamatsu, Yoshio Mita, Tadashi Shibata, Jair Minoro, and Abe Paulista, "Reasoning Systems Based on Para-consistent Logic Programs and Their Hardware Implementation," 2002 Western MultiConference (WMC '02), Jan. 27-31, San Antonio, Texas (2002.01)
  119. Huaiyu Xu, Yoshio Mita and Tadashi Shibata, "Intelligent Internet Search Applications Based on VLSI Associative Processors," in the Proceedings of The 2002 International Symposium on Applications and the Internet (SAINT-2002), Jan.28 - Feb.1, Nara, Japan, pp. 230-237, (2002.01)
  120. Jean-Philippe Gouy, Satoshi Oshima, Yoshio Mita, Agnes Tixier and Hiroyuki Fujita, "Electrical Microconnector using Micromachined Cantilevers for 3D Chip Level Assembly," Mechatronics'01 5th Franco-Japanese Congress / 3rd European-Asian Congress,Oct. 9-11, Besancon, France, pp.383-386, (2001.10)
  121. Huaiyu Xu, Yoshio Mita and Tadashi Shibata, "Optimizing Associative Processor Architecture for Intelligent Internet Search applications," International Conference on Solid State Devices and Materials (SSDM '01), Sep. 26-30, Tokyo, Japan (2001.09)
  122. Kuniyuki Kakushima, Makoto Mita, Yoshio Mita, Gen Hashiguchi and Hiroyuki Fujita, "Fabrication of Various Shapes Nano Structure Using Si Anistropic Etching and Silicidation," International Conference on Solid State Sensors and Actuators (Transducers '01), June 10-14, Munich, Germany, pp.1090-1091 (2001.06)
  123. Yoshio Mita, Makoto Arai, Agnes Tixier and Hiroyuki Fujita, "Bulk Micromachined Durable Air-Flow Microactuator Array for Robust Conveyance Systems," International Conference on Solid State Sensors and Actuators (Transducers '01), June 10-14, Munich, Germany, pp.710-713 (2001.06)
  124. Ryoichi Ohigashi, Katsunori Tsuchiya, Yoshio Mita, and Hiroyuki Fujita, "Micro Capillaries Array Head for Direct Drawing of Fine Patterns," IEEE International Conference on MicroElectroMechanical Systems (MEMS 2001), Jan. 21-25 Interlaken, Switzerland (2001.01)
  125. Agnes Tixier, Yoshio Mita, Bruno Le Pioufle, P. Surbled, Y. Murakami, Eiji Tamiya, Hiroyuki Fujita; "Realisation of a Cell Manipulation Bio-Microsystem using Shadow Mask Technics," 4th international Conference on Miniaturised Systems for Chemistry and Life Sciences (MicroTAS 2000), Enschede, May 11-14, The Netherlands, pp.123-128, (2000.05)
  126. Agnes Tixier, Laurent Griscom, Katell Cozic, H. Nagai, Bruno le Pioufle, Y. Murakami, Eiji Tamiya, Hiroyuki Fujita, "Catching and Attaching Cells using an Array of Microholes"; IEEE-EMBS 2000 Conference, Lyon, France, p.36- (2000.05)
  127. Yoshio Mita, Andreas Kaiser, Patrick Garda, Bruno Stefanelli, and Hiroyuki Fujita, "Sensor-Microactuator Collocated MEMS for Fully-Integrated Microsystems," International Power Electronics Conference (IPEC-Tokyo 2000), Apr. 3-7, Tokyo, Japan, pp.1422-1427 (2000.04)
  128. Yoshio Mita, Makoto Mita, Agnes Tixier, Jean-Philippe Gouy and Hiroyuki Fujita, "Embedded-Mask-Methods for mm-scale multi-layer vertical/slanted Si structures," IEEE International Conference on MicroElectroMechanical Systems (MEMS 2000), Jan. 26-29, Miyazaki, Japan, pp.300-305 (2000.01)
  129. Agnes Tixier, Yoshio Mita, Satoshi Oshima, Jean-Philippe Gouy and Hiroyuki Fujita, "3-D Microsystem Packaging For Interconnecting Electrical, Optical And Mechanical Microdevices To The External World," IEEE International Conference on MicroElectroMechanical Systems (MEMS 2000), Jan. 26-29, Miyazaki, Japan, pp.698-705 (2000.01)
  130. Yoshio Mita, Andreas Kaiser, Bruno Stefanelli, Patrick Garda, Maurice Milgram, and Hiroyuki Fujita, "A Distributed Microactuator Conveyance System With Integrated Controller," IEEE International Conference on Man, Systems and Cybernetics (SMC '99), Oct. 14-17, Tokyo, Japan (1999.10)
  131. Agnes Tixier, Yoshio Mita, Jean-Philippe Gouy and Hiroyuki Fujita, "A Silicon Shadow Mask for Deposition on Isolated Areas," MicroMechanics Europe Workshop (MME '99), Sep. 27-29, Orsay, France, pp.195-198 (1999.09)
  132. Agnes Tixier, Jean-Philippe Gouy, Yoshio Mita, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Microactuate Slider-Based Tunable Filters for Optical Fiber Transmission," IEEE/LEOS International Conference on Optical MEMS (MOEMS '99), Aug. 27-29, Mainz, Germany (1999.08)
  133. Bruno Stefanelli, Yoshio Mita, Andreas Kaiser and Hiroyuki Fujita, "A 32bit 100V Switching Array IC Ready-to-Use for Everyone through Multi-Chip Foundry Service," International Conference on Solid State Sensors and Actuators (Transducers '99), June7-10, Sendai, Japan, pp.822-823 (1999.06)
  134. Yoshio Mita, Tomohiko Oba, Gen Hashiguchi, Makoto Mita, Patrice Minotti, and Hiroyuki Fujita, "An Inverted Scratch-Drive-Actuators Array for Large Area Actuation of External Objects," International Conference on Solid State Sensors and Actuators (Transducers '99), June 7-10, Sendai, Japan, pp.1196-1197 (1999.06)
  135. Yoshio Mita, Andreas Kaiser, Patrick Garda, Maurice Milgram, and Hiroyuki Fujita, "Design and Prototyping of a MEMS-Oriented Distributed Feed-Back Processor," IEEE International Conference on Microelectronics for Neural, Fuzzy and Bio-inspired Systems (MicroNeuro '99), April 6-10, Granada, Spain, pp.212-216 (1999.04)
  136. Yoshio Mita, Andreas Kaiser, Patrick Garda, Maurice Milgram, Dominique Collard, and Hiroyuki Fujita, "Distributed Vertices Extraction Algorithm for Object Classification Micro Systems," 4th Japan-France Congress on Mechatronics, Oct., Kokura, Japan, pp.482-485 (1998.10)
  137. Yoshio Mita, Satoshi Konishi, and Hiroyuki Fujita, "Two Dimensional Micro Conveyance System with Through Holes for Electrical and Fluidic Interconnection," 9th International Conference on Solid-State Sensors and Actuators (Transducers '97), Chicago, USA, pp.37-40 (1997.06)
  138. Yoshio Mita, Satoshi Konishi and Hiroyuki Fujita, "Implementation of a micro conveyance system controller," 2nd Japan-France congress on Mechatronics (Mechatronics'96), Oct. 2-4, Besancon, France, pp.583-588 (1996.10)
  139. Yoshio Mita, Minoru Fujishima, and Koichiro Hoh, "Simultaneous Determination of Threshold Voltage, Mobility, and Parasitic Resistance for Short-channel MOSFETs," Proc. of IEEE International Conference on Microelectronic Test Structures(ICMTS), Trento, Italy, pp. 131-134 (1996.03)

その他発表、シンポジウム/ Domestic Conferences and Others

  1. Yoshio Mita, “Innovative research through CMOS-MEMS open platform with young generation (Keynote talk)”, VANJ Conference 2020 online, 28-29 Nov 2020 (2020.11)
  2. 【解説記事】多田 一成、三田吉郎(文)、"<2020年秀でた利用成果-3>21世紀の「黄金の国ジパング」を目指して~ナノテクノロジープラットフォーム東京大学微細加工拠点による光触媒・ 超親水性機能融合反射防止多層膜材料の開発~"、Nanotech Japan Bulletin, Vol. 13, No. 3 (2020.06)
  3. Yoshio Mita, ""L'essentiel est invisible" - Fundamentals of Microelectronic Test Structure," Tutorial Talk at 2020 International Conference on Microelectronic Test Structures (ICMTS), April 6-9, Edinburgh, United Kingdom, (2020.04)
  4. Yoshio Kamiya, Yoshinobu Miyoshi, Yoshio Mita, Ikuo Kurachi, and Yasuo Arai, “Development of a Neutron Imaging Sensor using INTPIX4, SOI Pixelated Silicon Devices,” 12th International "Hiroshima" Symposium on the Development and Application of Semiconductor Tracking Detectors (HSTD12), 14-18 December, International Conference Center Hiroshima, Japan, 329, (2019.12)
  5. Yoshio Mita, ““Trust and Coordinate” - Case Study in UTokyo Nanofabrication Site with Nanotechnology Platform,” OECD Global Science Forum – Science Europe 2nd International Workshop on Optimising the operation and use of national Research Infrastructure, 28-29 Nov 2019, Sejong Hall, Seoul, Korea (2019.11)
  6. Yoshio Mita, “A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring,” 17th NAMIS workshop, Mumbai, India, 25 - 27 Nov. 2019 (2019.11)
  7. 栗山 大成、ルブラッスール エリック、平川 顕二、岩瀬 正幸、小笠原 宗博、依田 孝、三田 吉郎、「2 段階パラメータランピングによる高アスペクト垂直深掘りトレンチの作製」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19am3-PS3-7(2019.11)
  8. 宇佐美 尚人、太田 悦子、肥後 昭男、百瀬 健、三田 吉郎、「高アスペクト比深掘りトレンチの均一な電解めっきを可能とする超臨界流体薄膜堆積法で作製された低抵抗銅薄膜種層」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19am3-PS3-23(2019.11)
  9. 岡本 有貴、良尊 弘幸、藤本 興治、大場 隆之、三田 吉郎、「モノリシック高電圧駆動回路集積CMOS-MEMS 電気浸透流マイクロポンプ」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm3-T-3(2019.11)
  10. 山口 龍太郎、宇佐美 尚人、松下 裕司、吉村 武、肥後 昭男、三田 吉郎、「ソフトマイクロアクチュエータを目指すP(VDF-TrFE)圧電薄膜加工」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、 アクトシティ浜松、静岡県、19pm5-PS3-16(2019.11)
  11. 中山 雄太、鈴木 謙次、金川 いづる、松下 裕司、水野 隆、三田 吉郎、吉村 武、「P(VDF-TrFE)薄膜とCMOS のモノリシック構造による広帯域超音波トランスデューサアレイ」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm5-PS3-20(2019.11)
  12. 稲垣 俊典、岡本 有貴、肥後 昭男、三田 吉郎、「集積圧電アクチュエータによる自己変形を利用した可変焦点大面積MEMS 光スキャナ」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm5-PS3-24(2019.11)
  13. 槌屋 拓、岡本 有貴、Moslonka Charles、Lin Yu-Sheng、Tsang Sung、Marty Frédéric、水島 彩子、Sun Chen-li、Wang Hsiang-Yu、Français Olivier、Le Pioufle Bruno、三田 吉郎、「モノリシック集積多層電極による細胞電気回転測定の垂直位置制御」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm5-PS3-66(2019.11)
  14. 三角 啓、宇佐美 尚人、肥後 昭男、Piranda Benoit、Bourgeois Julien、三田 吉郎、「マイクロモジュラーロボットに向けたサブミリメートルスケール静電着脱機構の検証」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、20am2-PS3-25(2019.11)
  15. 高崎 正也、原 智大、岡本 有貴、三田 吉郎、山口 大介、石野 裕二、水野 毅、「スクイーズ膜圧力分布計測用センサアレイの開発」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2017、アクトシティ浜松、静岡県、21pm1-PS3-25(2019.11)
  16. 米谷 玲皇、上木 瞭太郎、Penekwong Khemnat、吉原 健太、九里 伸治、池田 克弥、指田 和之、吉田 賢一、山田 一郎、三田 吉郎、割澤 伸一、「高感度化のためのSnO2 ガスセンサの表面応答性に関する研究」、第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、20am2-PN3-15(2019.11)
  17. 三田吉郎, 吉村 武, 水野 隆, 鈴木 謙次, 中山 雄太, 遠藤 登喜子、「(招待講演)産学連携とナノテクプラットフォームで拓く集積化高感度超音波プローブの研究」、第32回回路とシステムワークショップ、22 - 23 Aug. 2019、東京電機大学、東京都、A2-1、pp. 77 - 79 (2019.08)
  18. Yoshio Mita and Michel de Labachererie, "Japanese Nanotechnology Platform, UTokyo VDEC Fabrication Site, and Collaboration Project with CNRS-RENATECH," 2nd European Nanofabrication Research Infrastructure Symposium (ENRIS 2019), 16-18 June 2019, Enschede, the Netherland, (2019.6)
  19. 三田吉郎, 「失敗は成功の元: ナノテクノロジープラットフォームで試して拓く先端集積MEMS」第17回ナノテクノロジー総合シンポジウム, 2019年2月1日, 東京ビッグサイト (2019.2)
  20. 三田吉郎, 「IoT-MEMSに適した非接触エネルギー伝送手法の研究」エイトラムダフォーラム2017第4回会合, 2017年12月14日フォレスト本郷 (2017.12)
  21. 宇佐美 尚人, 肥後 昭男、太田 悦子、三田 吉郎、「超臨界流体を用いたシリコン酸化膜上への銅薄膜直接成膜技術による高アスペクト比ナノ開口構造の埋め込みの実現」、第35回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2018、 札幌国際会議場、北海道、01pm1-PS-183 (2018.11)
  22. 稲垣 俊典、岡本 有貴、肥後 昭男、三田 吉郎、「機械的混合加振による圧電薄膜アクチュエータ集積2軸MEMS光スキャナ」、第35回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2018、 札幌国際会議場、北海道、01pm1-PS-185 (2018.11)
  23. 三田吉郎, 「集積化MEMS の未来を拓くナノテクノロジープラットフォーム ~新機能・高信頼センサシステムの実現とその課題~(招待講演)」日本画像学会2017年度関東シンポジウム 2017年12月12日 発明会館, 東京 (2017.12)
  24. 山田健太郎, Julien Grand, 岡本有貴, Reddy Ranga,Matthieu Denoual, Sveltana Mintova, Agnes Tixier-Mita, 三田吉郎, 「粒子径の大きなゼオライトを用いたガスセンシングに向けた衝撃試験」, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, 31 Oct. - 2 Nov. 2017, 01pm4-PS-168, 広島国際会議場, 広島, (2017.11)
  25. 太田悦子,Xavier Hurtaud,百瀬健,肥後昭男,三田吉郎, 「超臨界流体薄膜形成技術によるSiトレンチ基板へのCu製膜の検討」, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, 31 Oct. - 2 Nov. 2017, 01pm4-PS-130, 広島国際会議場, 広島, (2017.11)
  26. 肥後昭男, Wang Haibin, 久保貴哉, 宇佐美尚人, 岡本有貴, 山田健太郎, 瀬川浩司, 杉山正和, 三田吉郎, 「LSI一体集積のためのシリコン上PbS量子ドット赤外フォトダイオードの試作」, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, 31 Oct. - 2 Nov. 2017, 広島国際会議場, 広島, 01am2-PS-123 (2017.11)
  27. 竹城雄大, 宇佐美尚人, 高田武晃, 池野理門, 鷲津信栄,浅田邦博, 三田吉郎, 「高性能コールター計測のための局所電極付きナノポア構造の作製」, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, 31 Oct. - 2 Nov. 2017, 広島国際会議場, 広島, 01am2-PS-125 (2017.11)
  28. 岡本有貴, 三田吉郎「On-Chip MEMSアクチュエータ駆動のためのMEMS後加工5V標準CMOS素子を利用した30Vスイッチング回路(口頭発表)」, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, 31 Oct. - 2 Nov. 2017, 広島国際会議場, 広島, 01am1-A-1(2017.11)
  29. 三田吉郎、「絵に描いた餅」を形にする : ナノテクノロジープラットフォームによる迅速微細モノ作り、O plus E : Optics + electronics (2017.04)
  30. 方琦, 上木瞭太郎, 福井類, ⼭⼝武司, 佐藤真, 越後谷天垣, 三田吉郎, 山田一郎, 割澤伸一, 「SnO2薄膜によるガスセンシング性能とピエゾ抵抗特性評価」, 2017年度精密工学会春季大会 (2017.3)
  31. 三田吉郎, 「ナノテクノロジー・プラットフォームとVLSIファウンドリの融合による短TAT集積システム研究(招待講演)」, FEIセミナー, 2016年10月19日 (2016.10)
  32. 三田吉郎, 「集積化CMOS-MEMSによる高機能流体素子とその展開~VDECとナノテクPFが拓く短TAT試作研究の試み(招待講演)」, アドバンテスト展, 2016年10月14日 (2016.10)
  33. Yoshio Mita, ""MEMS-de-Piano": a short turn-around-time experimental course in UTokyo Nanotechnology Platform," NAMIS School 2016, 16 September, Komaba, Tokyo (2016.9)
  34. 谷智行,村川智, 和田龍馬, 山田快斗, 伊藤公平, 三田吉郎, 白濱圭也, 「擬2次元トポロジカル超流動3He研究用多重マイクロスリット構造の作成」, 日本物理学会2016年秋期大会,平成28年9月16日発表 (2016.9)
  35. T. Tani, S. Murakawa, R. Wada, K. Yamada, K. Itho, Y. Mita, and K. Shirahama, "Microfabrication of Multi-Slit Structures for Studies of Quasi-2 Dimensional Topological Superfulid 3He," International Symposium on Quantum Fluids and Solids, 10-16 Aug., Prague, Chech Republic, 2016年8月11日発表 (2016.8)
  36. 竹城雄大, 岡本有貴, 三田吉郎, 「エネルギー自立IoTデバイス向け電圧・電流プログラマブル太陽電池アレイ」, LSIとシステムのワークショップ2016, 東京大学 (2016.5)
  37. 三田吉郎, 基礎講座シリーズ「今さら聞けない?測定・制御のコツ《制御技術(パソコン)のコツ》」応用物理, 84巻12号 pp.1107-1112 (2015.12)
  38. 三田吉郎, 「集積化MEMSとナノテクノロジー・プラットフォームで拓く次世代IoTものづくり研究」日本大学理工学部特別講義 2015年12月9日 (2015.12)
  39. 三田吉郎, 「集積化MEMSとナノテクノロジー・プラットフォームで拓く次世代IoTものづくり研究」MEMS・光学設計ソリューションセミナー, ベルギー大使館, 東京  2015年12月3日 (2015.12)
  40. Yoshio Mita, Agnes Tixier-Mita, Matthieu Denoual, Sveltana Mintova, "Projet Bilateral JSPS/CNRS: NEZ-ZEN NEZ electroniques, a basede Zeolithes avec une Electronique innovante, et Nano-Structure," Journee Francophone de Recherche, 13 Nov 2015, Yebisu, Tokyo, (2015.11)
  41. Yoshio Mita, "Next-Generation IoT devices resarech by Integrated MEMS technologies with Nanotechnology Platform (Keynote Speech)," Creating a smart life - 2015 International symposium of smart sensor and its application in kitchen, 9-10 November, Guanzhou, China (2015.11)
  42. 三田吉郎, 「ナノテクノロジープラットフォームと集積化MEMSで拓く次世代IoTデバイス研究」, 日本MRSニュース, Vol. 27, No.4, pp.4-7 (2015.11)
  43. 三田吉郎, 「ナノテク東大拠点と集積化MEMSが拓くデバイスの新展開」, エイトラムダフォーラム第二回講演会招待講演, フォレスト本郷, 2015年7月24日 (2015.7)
  44. 岡本有貴, 森功, 久保田雅則, Eric Lebrasseur, 三田吉郎, 「高電圧化CMOS太陽電池を利用したEWODアクチュエータの自立型無線駆動に関する研究」, LSIとシステムのワークショップ2015, 北九州国際会議場 (ポスター発表) (2015.5)
  45. Yuki Okamoto, Isao Mori, Kentaro Kawahara, Eric Lebrasseur and Yoshio Mita, "Solar-Powered ElectroWetting for Silicon Pondskater," Microswimmers 2015, Bordeaux, France, (2015.4)
  46. Yoshio Mita, "Sub-centimetre CMOS-MEMS Silicon Pond-skater," Microswimmers - from bulk to interfaces, 13-15 April, Bordeaux France (oral presentation) (2015.4)
  47. 三田吉郎, 「MEMS de Piano : MEMS設計解析基礎講座」電気学会「第32回センサ・マイクロマシンと応用システム」シンポジウム「MEMS開発基礎講座」講演, 2015年10月27日, 新潟 (2015.10)
  48. 三田吉郎, 「ナノテクプラットフォームと集積化MEMSによる21世紀型センサ技術の新展開」, スマート・アクチュエータ/センサ委員会第108回定例会招待講演, 東京大学山上会館, 2015年2月6日 (2015.2)
  49. 三田吉郎, 「ナノテクノロジープラットフォーム 東京大学VDECでの教育研究の展開」, 工業材料, Vol.63, No.1, pp.65-68 (2015.1)
  50. 三田吉郎, 「Si深掘り加工と集積回路が開く電子デバイスの新展開」, (独)日本学術振興会, 結晶加工と評価技術 第145委員会 第141回研究会, 明治大学 駿河台キャンパス, 東京, 2014年12月18日, pp.7-11 (2014.12)
  51. 三田吉郎, 「TSV向け大面積・高速Si深掘りエッチング技術」Electronic Journal 第2322回 Technical Seminar, 連合会館, 東京 (2014.7)
  52. 三田吉郎, 「高アスペクト高速Si深掘りエッチング技術」Electronic Journal 第2190回 Technical Seminar, 連合会館, 東京 (2014.4)
  53. 三田吉郎, 「TSV向け大面積・高速Si深掘りエッチング技術の現状と課題」, Electronic Journal 1789回Technical Seminar基調講演, 「TSV向け大面積・高速Si深掘りエッチング技術」, pp. 7-43. (2013.7)
  54. 米田佳祐, 久保田雅則, ティクシェ三田アニエス, 森下賢志, 森功, 保坂航太, 三田吉郎, 「省電力・長寿命MEMSメモリを目指すマイクロラッチ機構設計と作製」, 電子情報通信学会LSIとシステムのワークショップ2013, 北九州 (2013.5)
  55. 三田吉郎、Tixier-Mita Agnes 「共に働く研究者」、電気学会全国大会公開シンポジウム1-H4-3 「男女共同参画の要らなくなる日」、 名古屋大学、(2013.03.20)
  56. Yoshio Mita, "Wireless-Driven Pond-Skating Microrobot as a Technology Driver for Integrated MEMS (Keynote Speech)," CINTRA Workshop on "Next generation of self-power smart sensors for environmental monitoring," 19-20 March, Singapore (2013.03.19)
  57. Isao Mori, Satoshi Morishita, Masanori Kubota, Kentaroh Watanabe and Yoshio Mita, "A Monolithically-Integrated, Batch Post-processed 17.8 V Silicon Solar Cell Array for Remote MEMS Driving," Japanese French Research, 16-17 November, Tokyo, (2012.11)
  58. 平川淳, 森下賢志, 三田吉郎, 「SOI基板上のメサ分離型標準バルクCMOS素子の絶縁耐圧評価」, マイクロマシン・センサシステム研究会, 6月11-12日京都 (2012.06)
  59. 木原泰樹, 久保田雅則, 森下賢志, 百瀬健, 近藤愛子, 霜垣幸浩, 三田吉郎, 「ステルスダイシングを利用した埋め込み式予約素子分離法」, マイクロマシン・センサシステム研究会, 6月11-12日, 京都 (2012.06)
  60. 森功, 久保田雅則, 三田吉郎, 「環境にばらまくセンサネットワーク素子実現に関する一考察」, 電気学会マイクロマシン・センサシステム研究会, 京都 (2012.06)
  61. Yoshio Mita, "MEMS-integrated VLSI Foundry Scheme in the University of Tokyo VDEC and its Application to Particle Sensor," International Workshop on High Energy Geophysics 2011 - Muon and Neutrino Radiography -, Oct. 27-28, 2011, Happon-en, Tokyo, p.38 (2011.10.28)
  62. 三田吉郎、「オンチップ光発電回路とMEMS の集積化研究動向(招待講演)」、電子情報通信学会ソサイアティ大会、札幌 (2011.09.15)
  63. Yoshio Mita, "MEMS, More-than-Moore, and Test Structures," Tutorial Talk at 2011 IEEE International Conference on Microelectronic Test Structures (24th ICMTTS), 4-7 Apr 2011, Amsterdam, the Netherlands (2011.04)
  64. Yoshio Mita, "Autonomous Distributed MEMS Robots as Technology Drivers (招待講演)," GCOE on Photonics and Electronics Science and Engineering 3rd Young Researchers International Symposium, University of Kyoto Katsura Campus, 8 Dec 2010, pp. 18-19 (2010.12)
  65. Yoshio Mita, Satoshi Morishita, Masanori Kubota, Isao Mori, Frederic Marty et Kunihiro Asada, "Mehode d'Isolation à Posteriori des Composants Electronique Integres sur Puce Silicium," Journee Francophone de la Recherche (フランス語による科学シンポジウム), 27 Novembre 2010, Maison Franco-Japonaise, Tokyo, Japon (2010.11)
  66. 三田吉郎, "TSV向けSi深掘りエッチング技術の現状と課題," Electronic Journal 601回Technical Seminar 「TSV向けSi深掘りエッチング技術の最前線」, pp. 7-38. (2010.10)
  67. Yoshio Mita, "Autonomous Distributed MEMS Robots as Technology Drivers" (招待講演), Japan-France Frontiers of Engineering (JFFoE), Grenoble, France, 11-13 Oct. 2010 (2010.10)
  68. Yoshio Mita, ""More-than-VLSI" Devices by MEMS Deep Etching Technology" (招待講演),IEICE ICD symposium in Vietnam (ICDV), Ho Chi Minh City, Vietnam, 16-18 Aug. 2010 (2010.08)
  69. Yoshio Mita, Jean-Bernard Pourciel*, Masanori Kubota, Shaojun Ma, Akio Higo, Agnes Tixier-Mita, Satoshi Morishita, Masakazu Sugiyama, et Takahisa Masuzawa, "La Methode "Swing-Probing" Pour la Profilomètrie de Microtrous Très Profonds," Journee Francophone de la Recherche (フランス語による科学シンポジウム), 14 Novembre 2009, Maison Franco-Japonaise, Tokyo, Japon (2009.11)
  70. 三田吉郎、「高機能MEMS三次元構造形成のためのプロセス技術(招待講演)」、応用物理学会秋季全国大会(2009.9)
  71. 金俊亨、久保田雅則、肥後昭男、三田吉郎、「柔らかいシリコンマイクロ構造とその神経信号解析への応用」、応用物理学会第二回集積化MEMS技術研究会、2008年11月21、東京大学 (2008.11)*研究奨励賞受賞
  72. Y.Mita, "Special Section on the IEEE International Conference on Microelectronic Test Structures," IEEE Transactions on Semiconductor Manufacturing, Vol. 21, No. 4, pp. 494-495 (2008.11)
  73. Y.Mita, L.Bouraoui et M.Parent, "Vision stereo pour la detection d'obstacles vulnerables: methode de <> pour l'amelioration de la precision de mise en correspondance," Journee Francophone de la Recherche, 28 Novembre 2008, IIS Univ. Tokyo, Japon (2008.11)
  74. Y.Mita, "FOREWORD, Special Section on Microelectronic Test Structures (ICMTS2007)," IEICE Trans. Volume E91-C No.8, pp.1313-1314 (2008.08)
  75. 松山知弘、三田吉郎、久保田雅則、柴田 直、藤田博之(東京大学)「静電駆動型大面積MEMS における消費電力」、電気学会マイクロマシン・センサシステム研究会、東北大学、2008年6月12、13日 (MSS-08-20) pp. 95-100 (2008.06)
  76. Yoshio MITA, Kenichiro Hirose, Masanori Kubota, et Tadashi Shibata, "Integration du Dispositif Electronique Actif en MicroStructure Tri-Dimensionnel (in French)," Journee Scientifique Francophone 2006, Takeda Hall, 1 Decembre, Tokyo (2006.12)
  77. Yoshio Mita, Masanori Kubota, Kota Ito, Frederic Marty, Tarik Bourouina, et Tadashi Shibata, "Plus etroites et profondes: Derniers Avancements de la Fabrication de Nano-Structures en Silicium par le projet SAKURA 03-05," Journees Scietifique Francophone 2005, 11 - 12, Novembre, Tokyo (2005.11)
  78. Tarik Bourouina, Frederic Marty, Bruno Mercier, Yoshio Mita, Tadashi Shibata, Mathilde Callies, Yong Chen, Anne Pepin, and David Quere, "Single Crystal Silicon, High Aspect Ratio, Micro- and Nano-Structures: Technology and Applications (Invited)," International Conference on Materials for Advanced Technologies (ICMAT 2005), 3 - 8, July, Singapore, pp.67-70 (2005.07)
  79. Yves-Andre Chapuis, Yamato Fukuta, Lin Zhou, Yoshio Mita and Hiroyuki Fujita, "Control of MEMS-based actuators array for micro-smart system," Proc. SPIE International Symposium on Smart Materials, Nano-, and Micro-Smart Systems, Sydney, Australia, December 12-15, (2004.12)
  80. Yoshio Mita, Daisuke Kobayashi, Tarik Bourouina, et Tadashi Shibata, "Fabrication en parallèle de micro-aiguilles de 150um avec un rayon de courbure nanometrique pour l'application à la microscopie à effet tunnel," Journees Scietifique Francophone 2004, 4 - 5, Novembre, Tokyo (2004.11)
  81. Yoshio Mita, Masanori Takada, and Tadashi Shibata, "A Simple and fast PC interface for VLSI Measurement," Proceedings of 2004 IEEE Asia-Pacific Conference on Advanced System Integrated Circuits (AP-ASIC), Aug. 4-5, 2004 Fukuoka, Japan, pp. 398-400 (2004.08)
  82. Yves-Andre Chapuis, Yamato Fukuta, Yoshio Mita and Hiroyuki Fujita, "Distributed MEMS-microvalves suitable structure for improving performances of intelligent pneumatic two-dimensional micro-conveyer," Proc. SPIE International Symposium - Smart Structures and Materials 2004, San Diego, CA USA, pp.355-365 (2004.03)
  83. Yves-Andre Chapuis, Yamato Fukuta, Yoshio Mita and Hiroyuki Fujita, "Les microsystemes intelligents: technologies et applications," (Text in French), Proc. Journees Scientifiques Francophones 2003, 24 - 26, Novembre, Tokyo, Japan, (2003.11)
  84. Yoshio Mita, Tarik Bourouina, Agnes Tixier-Mita et Tadshi Shibata, "Projet SAKURA: Collaboration franco-japonaise pour le developpement et la fourniture de nanostructures standardisees pour des systèmes biologiques et optique (in French)," Journ'ees Scietifique Francophone 2003, 24 - 26, Novembre, Tokyo, Japan (2003.11)
  85. 福田和人、簗田将志、猪野篤史、三田吉郎、シャピー・イヴ-アンドレ、小西聡、藤田博之、「多数マイクロマシンを用いた物体搬送システムの制御手法に 関する研究」、日本機械学会 ロボティクス・メカトロニクス講演会2003 (robomec '03)、函館、講演番号2P1-3F-D4、講演概要集 pp.111、(2003.03)
  86. 杉浦邦晃, 三田吉郎, 藤島実, 鳳紘一郎, 「Siシャドウマスクのメカニカルアラインメント精度向上」, 応用物理学会春季全国大会, 3月27日, 神奈川 (2003.03)
  87. 三田吉郎, 柴田直, 「知的画像特徴検出回路との融合を目指したバルクマイクロマシーニングによるマイクロミラーアレイ~集積化MEMSへの試み~(Invited)」, 精密工学会知能メカトロニクス専門委員会研究会, 12月13日, 高松 (2002.12)
  88. Yoshio Mita et Tadashi Shibata, "Dispositifs VLSI qui essayent d'imiter une partie du fonctionnement du cerveau humain," Journ'ees Science et Technologie 2002, 17 - 19, Novembre, Tokyo (2002.11)
  89. 福田和人、荒井誠、三田吉郎、アニエス・ティクシエ、藤田博之、「バルクマイクロマシニングによるアレイ型エアーフローアクチュエータ」、日本機械学会 ロボティクス・メカトロニクス講演会2002 (robomec '02)、松江、講演番号2A1-A10、講演概要集 pp.62、(2002)
  90. Makoto Arai, Yamato Fukuta, Yoshio Mita, Agnes Tixier and Hiroyuki Fujita, "An Airflow Actuator Array Realized by Bulk Micromachining Technique," Proc. IEE of Japan Sensor Symposium on Sensors, Micromachines, and Applied Systems, Kyoto, Japan, pp. 447-450, (2002.11)
  91. 大東良一、土屋勝則、三田吉郎、藤田博之、「マイクロキャピラリーアレイの製作と微量流体吐出の観察」、第4回化学とマイクロシステム研究会予稿集 p. 73. (2001)
  92. 大東良一、土屋勝則、三田吉郎、藤田博之、「マイクロキャピラリアレイによる微細パターンの直描」、第106回日本印刷学会予稿集 pp. 17 -20.(2001)
  93. Ryoichi Ohigashi, Katsunori Tsuchiya, Yoshio Mita, and Hiroyuki Fujita, "Electric Cone Jet with Microcapillary Array Head for Fine Patterning," Technical Digest of the 18th Sensor Symposium 2001, pp. 35-38. (2001)
  94. Jean-Philippe Gouy, M. Kitamura, Ali Ben Moussa, Agnes Tixier, Yoshio Mita, Takao Someya, Hiroyuki Fujita and Yasuhiko Arakawa, "Deposition of Organic Semiconductors through Silicon Shadow Masks for Integrated LED on Silicon Substrate," The 48th Spring Meeting of The Japan Society of Applied Physics, Mar. 28-31, p. 1286, (2001.03)
  95. Satoshi Oshima, Yoshio Mita, Agnes Tixier, Jean-Philippe Gouy, Hiroyuki Fujita, "Fabrication and Characterisation of Microconnectors aiming the Assembly of Electrical, Mechanical and Optical Device," Electronics Conference on Micromachine and Sensor System Research, Japan, n. MSS-00-4, (2000.03) (in Japanese)
  96. Satoshi Oshima, Yoshio Mita, Agnes Tixier, Jean-Philippe Gouy, Hiroyuki Fujita, "Fabrication of Fabry-Perot Tunable Filter by Micromachine and its Connection to fibers," Electronics Conference on Micromachine and Sensor System Research, Japan, n. MSS-00-2, (in Japanese) (2000.11)
  97. Satoshi Oshima, Yoshio Mita, Agnes Tixier, Jean-Philippe Gouy, Hiroyuki Fujita; "Characterisation of patterning precision in 3-D structures of Si Shadow Mask made by Delay-Masking Process," Electronics Conference of the National Convention Record IEE, Japan, vol. 3, 1111-1112, (2000) (in Japanese)
  98. Agnes Tixier, Laurent Griscom, Katell Cozic, Marie Frenea, H. Nagai, Bruno le Pioufle, Yuichi Murakami, Eichi Tamiya, Hiroyuki Fujita, "Use of aspiration through microholes to catch then attach cells on active areas by means of chemical links," CHEMICRO'2001 Conference, Tokyo, Japan, (2001)
  99. 三田, 荒井, Andreas Kaiser, 藤田, "GA生成プログラムで制御するMEMS組み込み用分散型プロセッサの設計," 第4回システムLSI琵琶湖ワークショップ, Nov. 27-29, Shiga, Japan (2000).11
  100. Yoshio Mita, Shuhei Amakawa and Takahiro Kurosawa, "Electronics Research with FreeBSD," BSD Conference 2000, Oct. 17-20 Monterey (CA), USA, pp. 208-212 (2000.10)
  101. Yoshio Mita, Makoto Mita, Agnes Tixier, Hiroshi Toshiyoshi, Jean-Philippe Gouy and Hiroyuki Fujita, "多機能マイクロマシンのチップレベル実装技術," 次世代センサ協議会第28回研究会招待講演, Feb. 29, Tokyo, Japan (2000.02)
  102. Yoshio Mita, Andreas Kaiser, Patrick Garda, Maurice Milgram, and Hiroyuki Fujita, "形状認識を行なう分散型マイクロ搬送システム," 第11回SICE自律分散システム・シンポジウム, Jan. , Nagoya, Japan (1999.01)
  103. 三田, 安宅, Andreas Kaiser, 藤田, "マイクロ搬送システムに適した分散的頂点検出による物体識別," 平成10年SICE自律分散システム・シンポジウム. Jan., Kobe, Japan, pp.339-342 (1998.01)
  104. Yoshio Mita, Satoshi Konishi and Hiroyuki Fujita, "自律分散型マイクロ搬送システムの実現," 第9回 SICE自律分散システム・シンポジウム, Jan., Sapporo, Japan, pp.15-19 (1997.01)
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