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Microelectronic Test Structure Fundamentals

Presenter: Stewart Smith The University of Edinburgh
Start: 13:40 (60 minutes)

Abstract

This presentation will begin with a review of test structures detailing their history and hot topics over the past 30 years. The presentation will include the development of test structures for measuring sheet resistance, line width and contact resistance. Measurement issues associated with test structure and pad layout, along with developments in probe technologies will also be explored.

Biography

This presentation will begin with a review of test structures detailing their history and hot topics over the past 30 years. The presentation will include the development of test structures for measuring sheet resistance, line width and contact resistance. Measurement issues associated with test structure and pad layout, along with developments in probe technologies will also be explored.