HNS: Fujiwara's Diary

various L/S with 5 m/m length,
50 to 300 nm Hole set


GDSII name	LandS-2021-09-13-16.35.gds
Perl script	LandS
Target line width	50,60,80,100,120,140,160,200
line width variation	-16 ..+9, 1 nm step
Target Hole	50 - 300 (nm), 10 nm step

The recipe/condition is the same as the first ZEP530A

210 nm ねらいの
2000 rpm とする
   500  3.0   5.0
  2000  5.0  60.0

pre-bake 180 deg 5 min

＠ spin coat:

＠ EB log:

[16:23:15][HOST@f7000s:~]$ ./EBadmin/exposure-log -F 2021-08-25 -g D-LAB -pbq
from: 35 days ago
 to: 0 days ago
    EXP-     date    start    sec  rate hh:mm:ss BUF  adj   FP  mA WEC FocusPoint BEF  errors	    
-------- -------- -------- ------  ---- -------- --    --  [--] - ---------------  		    
 w  9067 20210826 19:31.00   1060  1.07  0:17.40 (1 -  31) [81]    D-LAB_makoto_ZEP530A-contrast-curve 
 w  9344 20210913 19:43.46   1935  1.10  0:32.15 (1 -  31) [26]    D-LAB_standard_ZEP530-LandS-CP18Hole

     Focus_points_file_waf100mm_81point       D-LAB_makoto_contrast-curve-by-layer.bef 
     D-LAB_standard_100mm-26p                 D-LAB_standard_LandS-2021-09-13-16.35.bef

(DOSE) 140, 150, 160

label format

S005-050-P100


S005	Span 5 um
050	50 nm diameter
P100	Pitch 100 nm

W50-34.00 nm x 10


W50	Target width 50 nm
34.00	design width ( -16 nm in this case)
x 10	10 pairs of 100 nm pitch L/S (pitch is always target width x 2

＠ measured results (HoleSiPH):


DOSE	design (nm)	Measure	diff
140	50	50.3	+0.3
140	300	320	+20
150	50	46	-4
150	60	61	+1
150	60	58	-2
150	80	87	+8
150	300	327	+27
160	60	62	+2
160	300	329	+29
160	300	333	+33

＠ Regulus Line and Space:

(https://www.if.t.u-tokyo.ac.jp/~makoto/p21/20210928/)


	design
DOSE	width (nm)	Measure	diff
140	34	45	+9
140	43	50	+7
140	59	63.5	+4.5
140	104	113	+9
140	184	221	+37
150	34	47	+13
150	34	50	+16
150	43	51.6	+8.6
150	39	50.8	+11.8
150	84	106.3	+22.3
150	104	119	+15
160	34	48	+14
160	84	115	+31
150	184	221	+37
160	184	221	+37

2021年09月13日(月) 旧暦 [n年日記] [更新:"2021/09/29 09:14:57"]

#1 [EB] ZEP530A exposure part 2

＠ spin coat:

＠ EB log:

＠ 1st Regulus:

＠ Regulus by veteran:

＠ Regulus revenge:

＠ measured results (HoleSiPH):

＠ Regulus Line and Space: