| 12/27i | iPhoto CADE-4T Spin Coat, ma-P 1275G, 1225G |
| 12/27 | ZEP520A, CAN038 Contrast curve |
| 12/24 | Accuracy User defined (BEAMER) |
| 12/21 | ZEP520A-7 Contrast curve by OLS5000 |
| 12/17x | Spin coater back, NLD-5700 Si log, CAN040 contamination, ADE3000s log |
| 12/17 | ZEP520A-7 contrast curve at DekTak |
| 12/16 | Exposure for Si/Au lift off (Center Over DOSE for 16x16 (m/m) Span) |
| 12/15v | GaSb/Au after exposure |
| 12/15 | GaSb/Au, VHX6000 manual |
| 12/14 | U-DICR (OLS 5000), F5112 EPC |
| 12/13c | Vacuum gauge (NSP2) ADE 3000S manual weight limit |
| 12/13 | F5112 screen shot |
| 12/12 | Regulus stage, Show Images (firefox) |
| 12/10n | NLD-5700 Si screenshot (cassette reset) |
| 12/10 | Stealth screen, Ion shower rotation SW, Cooling water jig |
| 12/08r | Regulus8230 Startup Screen (Detector selection) |
| 12/08 | TM-3030 mode, Regulus8239 manipulator |
| 12/07 | NLD-5700 Si etching Ant/Bias 60W/300W failed, Regulus shots |
| 12/06 | BEAMER vs. f7kcnv |
| 12/03 | Regulus operation etc (detector selection) Ramp Annealer |
| 12/02 | Sapphire + CAN, edit on simple instruction, Si + ZEP520A problem |
| 12/01 | NLD-5700 Si DRP problem F0034, Cooling water |
| 11/28 | F7000S SPC_Smoke_Detector warning, Log, Alignment Mark, Go and Go setting |
| 11/25 | JSM-6610 Filament replacement, NLD log, SPLC_Smoke detector, Toho Spec 3100 |
| 11/24 | Alignment Mark with CAN resist |
| 11/23 | MD Signal Viewer |
| 11/22 | NLD-5700 Si problem |
| 11/19 | Glass flakes, NSP2 chrom film, Shibaura bombs |
| 20211111x | |
| 11/11o | Si, Au exposure and Etching |
| 11/11 | Elionix Ion Shower bomb and spikes, EB-380T target |
| 11/04 | Eiko LL/Chamer ADE-3000S scale Espacer 300HX02 |
| 11/03 | Field stitching error with HSQ(?) |
| 11/02a | VR120-S Eiko cooling water |
| 11/02 | VR120-S Eiko screen shot |
| 10/22x | VR120-S |
| 10/22 | Cooling water tool buffer tank VR-120 |
| 10/20 | Adjuster screw, Ion Shawer target Xvision Pure N2,PSA |
| 10/19 | ADE-3000S log canister drawing |
| 10/14 | CAN, Holes (VHX-6000 Photo) |
| 10/11 | MPM-E350 Air Gun Waste Tank |
| 10/07z | ZEP530A SEM L/S (6) L/S 143 photos |
| 10/07 | Regulus 4 inch stage, Lift Off |
| 10/05 | Ion sputter at BLDG #2 |
| 10/04 | ZEP530A SEM L/S (5) L/S -> Hole 211 photos |
| 09/28n | NLD-5700 Si Wafer drop out at cassette |
| 09/28 | ZEP530A SEM L/S (4) L/S |
| 09/27 | ZEP530A SEM L/S (3) revenge |
| 09/24 | ZEP530A SEM L/S (2) by veteran |
| 09/21 | Alignment Mark offsest location (wrong) |
| 09/15S | BEBI con leak issue |
| 09/15 | ZEP530A SEM L/S (1) bad focus |
| 09/13z | ZEP530A CP/L andS Wafer Map and GDSII relation |
| 09/13 | ZEP530A spin coat |
| 09/12 | server room #116 relocation on Sunday |
| 09/10e | BEBI con re-wiring |
| 09/10 | CAN, F7000S for YNU |
| 09/07 | NLD-5700 Si (ZEP/Si) |
| 09/06 | Au + ZEP520A-7 smoke |
| 09/04 | TwoPillerTwoHole-2021-08-30-10.48.gds |
| 08/27 | Contrast Curve at Dektak |
| 20210826 | |
| 08/25 | ZEP520A + OAP + Espacer (Wang-10mm, JJD-WANG_10mm) |
| 08/18 | Structure color |
| 08/05x | NANO_Delaunay_20210804chir |
| 08/05f | Structure color |
| 08/04Ma | tabata_makajie_20210803_L1, two focus points |
| 08/04 | CE-300 Etching Recipe |
| 08/03 | NLD-5700 Si with Aoki lab |
| 07/29s | SEM photo S100-150x128P00 ... |
| 07/29 | Structure color |
| 07/28s | SEM (profile) Si/CE-300I etching (Univ. H) |
| 07/28 | ebview (YL) |
| 07/21 | Nikkei paper |
| 07/20 | Lift off weight scale |
| 07/15 | wrong Exposure (No cleaning Glass) |
| 07/09 | NLD-5700 Si screen shot 29 photo |
| 06/24o | Lift off recipes |
| 06/24 | Lift off recipes |
| 06/16 | Lift off Power cable construction |
| 06/11 | WM-3000 |
| 06/09 | Dry pumps NLD-5700Si |
| 06/08 | Mask spin coart (Strange pattern) |
| 06/03 | Fast Laminator MAII-550 (大成ラミネータ |
| 05/27 | iPhone snapshot, reservation |
| 05/26s | Spin coater 保守 |
| 05/26 | AQ-50, Lambda2, Chrom Etcher, PEM-800, CPS, PECS, Lift off, Toho Spec |
| 05/10 | SEM photo (Kimura lab) |
| 04/23 | exposure on Graphene (VHX-6000 photo) |
| 04/13 | WEC for exposure on Graphene |
| 04/09 | Klayout instance structure |
| 03/22 | wrong --pec process (YNU) |
| 03/18G | SEM (profile) Si/CE-300I etching (Univ. H) |
| 03/18D | SEM (profile) Si/CE-300I etching (Univ. H) |
| 03/18A | SEM (profile) Si/CE-300I etching (Univ. H) |
| 03/16N | SEM (profile) Si/CE-300I etching (Univ. H) |
| 03/16 | ZI shower valve has been fixed NLD-5700 Si |
| 03/11 | ESP32-WRO |
| 03/03 | VPE-4F XeF2 Si etcher |
| 02/25 | F7000S particle on ESC |
| 02/24 | F7000S error with horizontal offset |
| 02/19Y | F5112 Alignment Tool (SEM on) |
| 02/19 | F7000S Measurement Condition Recipe |
| 02/16 | F7000S log for Terashima (AID status) |
| 02/03 | Silicon Grease |
| 02/02 | F7000S log for Terashima (AID status) |
| 01/28 | OLS-5000 L-Trace |
| 01/25 | RIE-10NR WM-3000 |
| 01/20y | YNU lift off (VHX-6000) |
| 01/20 | RIE-10NR |
| 01/18y | YNU (VHX-6000, ebview) |
| 01/18 | F5112 screen shot, 超音波洗浄器 |
| 01/14 | BEXELWIN |
| 01/08 | Spin coater chuck |
| 01/06 | YNU (VHX-6000, ebview) |
| 01/05 | SIH-450 i-Miller CFS-4ES Belljar Aneal-oven furnase CE-300I MUC-21... |
| 00_top-index.cgi |