散水上走行MEMS

Wireless driven MEMS pond skater (swimming robot自律分) using EWOD

ポストプロセスによるMEMS-LSIモノリシック集積

Suspended-feedthough-connected trench-isolated CMOS islands made by
MEMS-post-processing on standand CMOS circuit for MEMS-LSI monolithic integration

微細側壁非破壊測定用Swing-Probing技術

Swing probe for vertical profilometry of deep micro structures

ディープトレンチ垂直フォトダイオード

P-N junction on deep submicron trenches for polarization detection with improved efficiency

柔軟なMEMSデバイス

Flexible silicon MEMS with controlled curvature

省電力・長寿命MEMSメモリを目指すマイクロラッチ機構

Micro-latch structure for very long-life and low-power MEMS memory